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- W2006998032 endingPage "56" @default.
- W2006998032 startingPage "52" @default.
- W2006998032 abstract "Amorphous hydrogenated silicon nitride films (a-Si 1-x N:H) can have varied applications in optoelectronics when produced as alloys with a wide range mobility gap. Employing ArF LCVD and using SiH 4 /NH 3 or Si 2 H 6 /NH 3 as the precursor gases, we have tailored the bandgap (Eg) of this material from 1.6 to 4.9 eV. It was found that Si 2 H 6 /NH 3 mixture produced highly silicon-rich alloys with compositions below the percolation threshold (x ∼ 0.52) of Si-Si bonds and E g between 1.6 and 2.9 eV, while SiH 4 /NH 3 , produced nitrogen-rich alloys (x ∼ 0.59) with E g upto 4.9 eV. This alloy can thus serve as dielectric and passivating films and also as a wide bandgap semiconductor. Correlations of the gap variation with film structure and composition are discussed." @default.
- W2006998032 created "2016-06-24" @default.
- W2006998032 creator A5014453313 @default.
- W2006998032 creator A5016221874 @default.
- W2006998032 creator A5045403262 @default.
- W2006998032 creator A5050018106 @default.
- W2006998032 creator A5062177440 @default.
- W2006998032 date "2000-12-01" @default.
- W2006998032 modified "2023-10-15" @default.
- W2006998032 title "Photo-induced deposition and characterization of variable bandgap a-SiN:H alloy films" @default.
- W2006998032 cites W1966381457 @default.
- W2006998032 cites W1969464536 @default.
- W2006998032 cites W2002032074 @default.
- W2006998032 cites W2027631221 @default.
- W2006998032 cites W2036323685 @default.
- W2006998032 cites W2050000110 @default.
- W2006998032 cites W2054614499 @default.
- W2006998032 cites W2075705444 @default.
- W2006998032 cites W2092764428 @default.
- W2006998032 doi "https://doi.org/10.1016/s0169-4332(00)00583-3" @default.
- W2006998032 hasPublicationYear "2000" @default.
- W2006998032 type Work @default.
- W2006998032 sameAs 2006998032 @default.
- W2006998032 citedByCount "13" @default.
- W2006998032 countsByYear W20069980322016 @default.
- W2006998032 countsByYear W20069980322018 @default.
- W2006998032 countsByYear W20069980322020 @default.
- W2006998032 crossrefType "journal-article" @default.
- W2006998032 hasAuthorship W2006998032A5014453313 @default.
- W2006998032 hasAuthorship W2006998032A5016221874 @default.
- W2006998032 hasAuthorship W2006998032A5045403262 @default.
- W2006998032 hasAuthorship W2006998032A5050018106 @default.
- W2006998032 hasAuthorship W2006998032A5062177440 @default.
- W2006998032 hasConcept C127313418 @default.
- W2006998032 hasConcept C151730666 @default.
- W2006998032 hasConcept C171250308 @default.
- W2006998032 hasConcept C181966813 @default.
- W2006998032 hasConcept C191897082 @default.
- W2006998032 hasConcept C192562407 @default.
- W2006998032 hasConcept C2780026712 @default.
- W2006998032 hasConcept C2780841128 @default.
- W2006998032 hasConcept C2816523 @default.
- W2006998032 hasConcept C49040817 @default.
- W2006998032 hasConcept C64297162 @default.
- W2006998032 hasConceptScore W2006998032C127313418 @default.
- W2006998032 hasConceptScore W2006998032C151730666 @default.
- W2006998032 hasConceptScore W2006998032C171250308 @default.
- W2006998032 hasConceptScore W2006998032C181966813 @default.
- W2006998032 hasConceptScore W2006998032C191897082 @default.
- W2006998032 hasConceptScore W2006998032C192562407 @default.
- W2006998032 hasConceptScore W2006998032C2780026712 @default.
- W2006998032 hasConceptScore W2006998032C2780841128 @default.
- W2006998032 hasConceptScore W2006998032C2816523 @default.
- W2006998032 hasConceptScore W2006998032C49040817 @default.
- W2006998032 hasConceptScore W2006998032C64297162 @default.
- W2006998032 hasIssue "1-4" @default.
- W2006998032 hasLocation W20069980321 @default.
- W2006998032 hasOpenAccess W2006998032 @default.
- W2006998032 hasPrimaryLocation W20069980321 @default.
- W2006998032 hasRelatedWork W1507116910 @default.
- W2006998032 hasRelatedWork W1969887887 @default.
- W2006998032 hasRelatedWork W1991986159 @default.
- W2006998032 hasRelatedWork W1999962534 @default.
- W2006998032 hasRelatedWork W2019976760 @default.
- W2006998032 hasRelatedWork W2089251307 @default.
- W2006998032 hasRelatedWork W2322045178 @default.
- W2006998032 hasRelatedWork W2783283445 @default.
- W2006998032 hasRelatedWork W2996358649 @default.
- W2006998032 hasRelatedWork W4303926928 @default.
- W2006998032 hasVolume "168" @default.
- W2006998032 isParatext "false" @default.
- W2006998032 isRetracted "false" @default.
- W2006998032 magId "2006998032" @default.
- W2006998032 workType "article" @default.