Matches in SemOpenAlex for { <https://semopenalex.org/work/W2007013823> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W2007013823 abstract "The effect of the electron energy distribution function (EEDF) on high-density, low-pressure, oxygen discharges is investigated in this work. Some examples of the oxygen discharge applications are ashing of photoresist, removing polymer films and oxidation or deposition of thin film oxides. A global model for oxygen inductively coupled plasma (ICP) [1] was modified to include a general distribution function allowing the study of the plasma parameters as the EEDF is varied from being Maxwellian to become Druyvesteyn like. Plasma parameters namely electron density, electron temperature, plasma potential and electronegativity are discussed for different values of applied power and pressure for these two types of EEDFs. Moreover, our results are compared with argon ICP [2], thus the main differences between electropositive plasma and electronegative plasma were studied. When a Druyvesteyn EEDF is assumed, the number of high-energy electrons is fewer and the number of average-energy electrons is higher compared with an assumption of a Maxwellian EEDF. The electron density and the electronegativity decrease as the EEDF change from Maxwellian to Druyvesteyn." @default.
- W2007013823 created "2016-06-24" @default.
- W2007013823 creator A5036982181 @default.
- W2007013823 creator A5039723042 @default.
- W2007013823 creator A5079295051 @default.
- W2007013823 date "2014-05-01" @default.
- W2007013823 modified "2023-09-27" @default.
- W2007013823 title "Study of non-maxwellian electron energy distribution functions for an oxygen discharge" @default.
- W2007013823 cites W2001008969 @default.
- W2007013823 cites W2005074391 @default.
- W2007013823 cites W2025849812 @default.
- W2007013823 cites W2032227296 @default.
- W2007013823 cites W2036089353 @default.
- W2007013823 cites W2044119241 @default.
- W2007013823 cites W2046346400 @default.
- W2007013823 cites W2046623549 @default.
- W2007013823 cites W2059794503 @default.
- W2007013823 cites W2061139552 @default.
- W2007013823 cites W2065398634 @default.
- W2007013823 cites W2068674765 @default.
- W2007013823 cites W2069398451 @default.
- W2007013823 cites W2085373390 @default.
- W2007013823 cites W2094048305 @default.
- W2007013823 cites W2153131814 @default.
- W2007013823 cites W2158904657 @default.
- W2007013823 cites W243429239 @default.
- W2007013823 doi "https://doi.org/10.1109/plasma.2014.7012703" @default.
- W2007013823 hasPublicationYear "2014" @default.
- W2007013823 type Work @default.
- W2007013823 sameAs 2007013823 @default.
- W2007013823 citedByCount "0" @default.
- W2007013823 crossrefType "proceedings-article" @default.
- W2007013823 hasAuthorship W2007013823A5036982181 @default.
- W2007013823 hasAuthorship W2007013823A5039723042 @default.
- W2007013823 hasAuthorship W2007013823A5079295051 @default.
- W2007013823 hasConcept C121332964 @default.
- W2007013823 hasConcept C147120987 @default.
- W2007013823 hasConcept C177293861 @default.
- W2007013823 hasConcept C178790620 @default.
- W2007013823 hasConcept C184779094 @default.
- W2007013823 hasConcept C185592680 @default.
- W2007013823 hasConcept C192039680 @default.
- W2007013823 hasConcept C192562407 @default.
- W2007013823 hasConcept C540031477 @default.
- W2007013823 hasConcept C547737533 @default.
- W2007013823 hasConcept C62520636 @default.
- W2007013823 hasConcept C82706917 @default.
- W2007013823 hasConceptScore W2007013823C121332964 @default.
- W2007013823 hasConceptScore W2007013823C147120987 @default.
- W2007013823 hasConceptScore W2007013823C177293861 @default.
- W2007013823 hasConceptScore W2007013823C178790620 @default.
- W2007013823 hasConceptScore W2007013823C184779094 @default.
- W2007013823 hasConceptScore W2007013823C185592680 @default.
- W2007013823 hasConceptScore W2007013823C192039680 @default.
- W2007013823 hasConceptScore W2007013823C192562407 @default.
- W2007013823 hasConceptScore W2007013823C540031477 @default.
- W2007013823 hasConceptScore W2007013823C547737533 @default.
- W2007013823 hasConceptScore W2007013823C62520636 @default.
- W2007013823 hasConceptScore W2007013823C82706917 @default.
- W2007013823 hasLocation W20070138231 @default.
- W2007013823 hasOpenAccess W2007013823 @default.
- W2007013823 hasPrimaryLocation W20070138231 @default.
- W2007013823 hasRelatedWork W1546444341 @default.
- W2007013823 hasRelatedWork W1976115398 @default.
- W2007013823 hasRelatedWork W1978021383 @default.
- W2007013823 hasRelatedWork W1982794934 @default.
- W2007013823 hasRelatedWork W1984107449 @default.
- W2007013823 hasRelatedWork W2013712853 @default.
- W2007013823 hasRelatedWork W2027702979 @default.
- W2007013823 hasRelatedWork W2032240387 @default.
- W2007013823 hasRelatedWork W2032741087 @default.
- W2007013823 hasRelatedWork W2054988970 @default.
- W2007013823 hasRelatedWork W2063925132 @default.
- W2007013823 hasRelatedWork W2080097088 @default.
- W2007013823 hasRelatedWork W2094053155 @default.
- W2007013823 hasRelatedWork W2105214815 @default.
- W2007013823 hasRelatedWork W2146893721 @default.
- W2007013823 hasRelatedWork W246256919 @default.
- W2007013823 hasRelatedWork W2752934890 @default.
- W2007013823 hasRelatedWork W2963390253 @default.
- W2007013823 hasRelatedWork W3009500729 @default.
- W2007013823 hasRelatedWork W2965348041 @default.
- W2007013823 isParatext "false" @default.
- W2007013823 isRetracted "false" @default.
- W2007013823 magId "2007013823" @default.
- W2007013823 workType "article" @default.