FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2007033754> ?p ?o ?g. }

• W2007033754 endingPage "113531" @default.
• W2007033754 startingPage "113531" @default.
• W2007033754 abstract "Boron diffusion in Si and strained SiGe with and without C was studied using point defect injection. Interstitial-, vacancy- and noninjection conditions were achieved by annealing Si capping layers which were either bare, with Si3N4 film or with Si3N4+SiO2 bilayers, respectively. Concentration profiles of B, Ge, and C were obtained using secondary-ion-mass spectrometry and diffusion coefficients of B in each type of matrix were extracted by computer simulation. Under inert annealing, we find that C strongly suppresses B diffusion in SiGe:C, but the effect of C is less strong in Si:C, particularly at high temperatures. In contrast, C only weakly suppresses B diffusion in both Si:C and SiGe:C under interstitial injection. For inert anneal conditions, C reduces the B diffusion coefficient in Si:C by factors of 4.2, 5.9, and 1.9 at 940, 1000, and 1050 °C respectively, whereas for interstitial injection the factors are 2.1, 1.3, and 1.1, respectively. The equivalent factors for SiGe:C are 8.4, 5.9, and 8.0 for inert anneal conditions and 2.2, 3.4, and 1.6 for interstitial injection conditions. The degree of B diffusion suppression achieved in both Si:C and SiGe:C is dependent on the level of C retained during annealing. Diffusion of C is shown to be faster in Si:C and hence less C is retained there after annealing than in SiGe:C. Interstitial injection is shown to strongly enhance C diffusion in both Si:C and SiGe:C and hence decreases the effectiveness of C for B diffusion suppression. These findings illustrate that the retarding effect of C on B diffusion in both Si:C and SiGe:C is strongly reduced when the anneal is carried out under conditions where interstitials are injected from the surface." @default.
• W2007033754 created "2016-06-24" @default.
• W2007033754 creator A5010659682 @default.
• W2007033754 creator A5012369334 @default.
• W2007033754 creator A5014316100 @default.
• W2007033754 creator A5038063138 @default.
• W2007033754 creator A5044480269 @default.
• W2007033754 date "2005-06-01" @default.
• W2007033754 modified "2023-09-26" @default.
• W2007033754 title "Effect of point defect injection on diffusion of boron in silicon and silicon–germanium in the presence of carbon" @default.
• W2007033754 cites W1524027467 @default.
• W2007033754 cites W1965470525 @default.
• W2007033754 cites W1988447800 @default.
• W2007033754 cites W1993821869 @default.
• W2007033754 cites W1999112603 @default.
• W2007033754 cites W2006125868 @default.
• W2007033754 cites W2009643206 @default.
• W2007033754 cites W2012133289 @default.
• W2007033754 cites W2025321384 @default.
• W2007033754 cites W2042039856 @default.
• W2007033754 cites W2045330802 @default.
• W2007033754 cites W2048413805 @default.
• W2007033754 cites W2051024068 @default.
• W2007033754 cites W2077994487 @default.
• W2007033754 cites W2081445031 @default.
• W2007033754 cites W2102773060 @default.
• W2007033754 cites W2109845091 @default.
• W2007033754 cites W2118007856 @default.
• W2007033754 cites W2172197770 @default.
• W2007033754 cites W33139186 @default.
• W2007033754 doi "https://doi.org/10.1063/1.1927706" @default.
• W2007033754 hasPublicationYear "2005" @default.
• W2007033754 type Work @default.
• W2007033754 sameAs 2007033754 @default.
• W2007033754 citedByCount "7" @default.
• W2007033754 countsByYear W20070337542014 @default.
• W2007033754 countsByYear W20070337542015 @default.
• W2007033754 countsByYear W20070337542016 @default.
• W2007033754 countsByYear W20070337542020 @default.
• W2007033754 crossrefType "journal-article" @default.
• W2007033754 hasAuthorship W2007033754A5010659682 @default.
• W2007033754 hasAuthorship W2007033754A5012369334 @default.
• W2007033754 hasAuthorship W2007033754A5014316100 @default.
• W2007033754 hasAuthorship W2007033754A5038063138 @default.
• W2007033754 hasAuthorship W2007033754A5044480269 @default.
• W2007033754 hasConcept C113196181 @default.
• W2007033754 hasConcept C121332964 @default.
• W2007033754 hasConcept C154256306 @default.
• W2007033754 hasConcept C164675345 @default.
• W2007033754 hasConcept C178790620 @default.
• W2007033754 hasConcept C185592680 @default.
• W2007033754 hasConcept C191897082 @default.
• W2007033754 hasConcept C192562407 @default.
• W2007033754 hasConcept C2777855556 @default.
• W2007033754 hasConcept C2780389399 @default.
• W2007033754 hasConcept C43617362 @default.
• W2007033754 hasConcept C49040817 @default.
• W2007033754 hasConcept C501308230 @default.
• W2007033754 hasConcept C544956773 @default.
• W2007033754 hasConcept C550623735 @default.
• W2007033754 hasConcept C69357855 @default.
• W2007033754 hasConcept C8010536 @default.
• W2007033754 hasConcept C97355855 @default.
• W2007033754 hasConceptScore W2007033754C113196181 @default.
• W2007033754 hasConceptScore W2007033754C121332964 @default.
• W2007033754 hasConceptScore W2007033754C154256306 @default.
• W2007033754 hasConceptScore W2007033754C164675345 @default.
• W2007033754 hasConceptScore W2007033754C178790620 @default.
• W2007033754 hasConceptScore W2007033754C185592680 @default.
• W2007033754 hasConceptScore W2007033754C191897082 @default.
• W2007033754 hasConceptScore W2007033754C192562407 @default.
• W2007033754 hasConceptScore W2007033754C2777855556 @default.
• W2007033754 hasConceptScore W2007033754C2780389399 @default.
• W2007033754 hasConceptScore W2007033754C43617362 @default.
• W2007033754 hasConceptScore W2007033754C49040817 @default.
• W2007033754 hasConceptScore W2007033754C501308230 @default.
• W2007033754 hasConceptScore W2007033754C544956773 @default.
• W2007033754 hasConceptScore W2007033754C550623735 @default.
• W2007033754 hasConceptScore W2007033754C69357855 @default.
• W2007033754 hasConceptScore W2007033754C8010536 @default.
• W2007033754 hasConceptScore W2007033754C97355855 @default.
• W2007033754 hasIssue "11" @default.
• W2007033754 hasLocation W20070337541 @default.
• W2007033754 hasOpenAccess W2007033754 @default.
• W2007033754 hasPrimaryLocation W20070337541 @default.
• W2007033754 hasRelatedWork W1971081315 @default.
• W2007033754 hasRelatedWork W1974378933 @default.
• W2007033754 hasRelatedWork W1981449548 @default.
• W2007033754 hasRelatedWork W2006125868 @default.
• W2007033754 hasRelatedWork W2034274768 @default.
• W2007033754 hasRelatedWork W2088081281 @default.
• W2007033754 hasRelatedWork W2091143923 @default.
• W2007033754 hasRelatedWork W2136398123 @default.
• W2007033754 hasRelatedWork W2162182679 @default.
• W2007033754 hasRelatedWork W2935944697 @default.
• W2007033754 hasVolume "97" @default.
• W2007033754 isParatext "false" @default.
• W2007033754 isRetracted "false" @default.

• next