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- W2007053497 abstract "Tertiarybutylarsine (TBAs) is an ideal alternative to highly toxic AsH3 for organometallic vapor phase epitaxy (OMVPE). Its decomposition was studied in a flow tube reactor using D2 as the carrier gas. The products were analyzed in a time-of-flight mass spectrometer. The major products are isobutane (C4H10), isobutene (C4H8) and AsH3. The decomposition proceeds via two routes: intramolecular coupling, to produce C4H10 and AsH, and β-elimination at higher temperatures which yields C4H8 and AsH3. Addition or trimethylgallium (TMGa) has little effect on the rate and product distribution of TBAs decomposition; however, the pyrolysis of TMGa is altered greatly by the presence of TBAs. Numerical modeling shows that the main pathway to remove TMGa is via reaction with the AsH from the coupling step. In OMVPE growth the substrate temperatures are high enough that some TMGa decomposes independently, in which case the AsH serves to prevent adsorption of the CH3 radicals and thus results in low carbon contamination." @default.
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- W2007053497 date "1988-01-01" @default.
- W2007053497 modified "2023-09-26" @default.
- W2007053497 title "GaAs growth using tertiarybutylarsine and trimethylgallium" @default.
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- W2007053497 doi "https://doi.org/10.1016/0022-0248(88)90499-x" @default.
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