Matches in SemOpenAlex for { <https://semopenalex.org/work/W2007103022> ?p ?o ?g. }
Showing items 1 to 90 of
90
with 100 items per page.
- W2007103022 abstract "Reported in this paper is an investigation of the process parameter effects on surface roughness and subsurface damage (SSD) in CMP of single crystalline Silicon. For the given experiments, the appropriate method to examine the SSD can be obtained. The surface roughness and figure accuracy were measured with an atomic force microscope (AFM) and Taylor-Hobson profilometer. The experiments results indicate proper process parameter for the best surface roughness, which can be divided into two stages. It should use longer time in the finish polishing stage, while shorter time and reduce the ratio of polishing pads and head in the ultra-finish polishing stage. Generally speaking, the isotropic etching of single crystalline Silicon, anisotropic etching of single crystalline Silicon and hand burnishing are mostly used to find the SSD and it is found that the last method is the best one to see the SSD by SEM." @default.
- W2007103022 created "2016-06-24" @default.
- W2007103022 creator A5002082567 @default.
- W2007103022 creator A5006956415 @default.
- W2007103022 creator A5021731855 @default.
- W2007103022 creator A5050156870 @default.
- W2007103022 creator A5061560792 @default.
- W2007103022 date "2012-02-01" @default.
- W2007103022 modified "2023-09-24" @default.
- W2007103022 title "Research on Process Parameter Effects on Surface Roughness and Subsurface Damage in CMP of Single Crystalline Silicon" @default.
- W2007103022 cites W1992010807 @default.
- W2007103022 cites W2006988674 @default.
- W2007103022 cites W2014821558 @default.
- W2007103022 cites W2045104083 @default.
- W2007103022 cites W2092604308 @default.
- W2007103022 cites W2095311261 @default.
- W2007103022 doi "https://doi.org/10.4028/www.scientific.net/amr.472-475.887" @default.
- W2007103022 hasPublicationYear "2012" @default.
- W2007103022 type Work @default.
- W2007103022 sameAs 2007103022 @default.
- W2007103022 citedByCount "0" @default.
- W2007103022 crossrefType "journal-article" @default.
- W2007103022 hasAuthorship W2007103022A5002082567 @default.
- W2007103022 hasAuthorship W2007103022A5006956415 @default.
- W2007103022 hasAuthorship W2007103022A5021731855 @default.
- W2007103022 hasAuthorship W2007103022A5050156870 @default.
- W2007103022 hasAuthorship W2007103022A5061560792 @default.
- W2007103022 hasConcept C100460472 @default.
- W2007103022 hasConcept C102951782 @default.
- W2007103022 hasConcept C107365816 @default.
- W2007103022 hasConcept C120665830 @default.
- W2007103022 hasConcept C121332964 @default.
- W2007103022 hasConcept C138113353 @default.
- W2007103022 hasConcept C159985019 @default.
- W2007103022 hasConcept C171250308 @default.
- W2007103022 hasConcept C176980610 @default.
- W2007103022 hasConcept C180088628 @default.
- W2007103022 hasConcept C184050105 @default.
- W2007103022 hasConcept C192562407 @default.
- W2007103022 hasConcept C2779227376 @default.
- W2007103022 hasConcept C33220542 @default.
- W2007103022 hasConcept C49040817 @default.
- W2007103022 hasConcept C544956773 @default.
- W2007103022 hasConcept C71039073 @default.
- W2007103022 hasConcept C79261456 @default.
- W2007103022 hasConceptScore W2007103022C100460472 @default.
- W2007103022 hasConceptScore W2007103022C102951782 @default.
- W2007103022 hasConceptScore W2007103022C107365816 @default.
- W2007103022 hasConceptScore W2007103022C120665830 @default.
- W2007103022 hasConceptScore W2007103022C121332964 @default.
- W2007103022 hasConceptScore W2007103022C138113353 @default.
- W2007103022 hasConceptScore W2007103022C159985019 @default.
- W2007103022 hasConceptScore W2007103022C171250308 @default.
- W2007103022 hasConceptScore W2007103022C176980610 @default.
- W2007103022 hasConceptScore W2007103022C180088628 @default.
- W2007103022 hasConceptScore W2007103022C184050105 @default.
- W2007103022 hasConceptScore W2007103022C192562407 @default.
- W2007103022 hasConceptScore W2007103022C2779227376 @default.
- W2007103022 hasConceptScore W2007103022C33220542 @default.
- W2007103022 hasConceptScore W2007103022C49040817 @default.
- W2007103022 hasConceptScore W2007103022C544956773 @default.
- W2007103022 hasConceptScore W2007103022C71039073 @default.
- W2007103022 hasConceptScore W2007103022C79261456 @default.
- W2007103022 hasLocation W20071030221 @default.
- W2007103022 hasOpenAccess W2007103022 @default.
- W2007103022 hasPrimaryLocation W20071030221 @default.
- W2007103022 hasRelatedWork W1978762732 @default.
- W2007103022 hasRelatedWork W1982877043 @default.
- W2007103022 hasRelatedWork W1995799504 @default.
- W2007103022 hasRelatedWork W2011297957 @default.
- W2007103022 hasRelatedWork W2028390166 @default.
- W2007103022 hasRelatedWork W2044189356 @default.
- W2007103022 hasRelatedWork W2065622943 @default.
- W2007103022 hasRelatedWork W2066839441 @default.
- W2007103022 hasRelatedWork W2070037377 @default.
- W2007103022 hasRelatedWork W2325245571 @default.
- W2007103022 hasRelatedWork W2604844895 @default.
- W2007103022 hasRelatedWork W2793541873 @default.
- W2007103022 hasRelatedWork W2909657128 @default.
- W2007103022 hasRelatedWork W2917368256 @default.
- W2007103022 hasRelatedWork W2945687076 @default.
- W2007103022 hasRelatedWork W3019034681 @default.
- W2007103022 hasRelatedWork W3121185327 @default.
- W2007103022 hasRelatedWork W3147069378 @default.
- W2007103022 hasRelatedWork W2831606551 @default.
- W2007103022 hasRelatedWork W2850943325 @default.
- W2007103022 isParatext "false" @default.
- W2007103022 isRetracted "false" @default.
- W2007103022 magId "2007103022" @default.
- W2007103022 workType "article" @default.