Matches in SemOpenAlex for { <https://semopenalex.org/work/W2007193876> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W2007193876 abstract "High velocity aerosol cleaning using ultrapure water or dilute aqueous solutions (e.g. dilute ammonia) is common in semiconductor IC fabrication [1]. This process combines droplet impact forces with continuous liquid flow for improved cleaning efficiency of sub-100nm particles. As with any physically enhanced cleaning process, improved particle removal can be accompanied by increased substrate damage, especially to smaller (<80nm) features [2]. Solvents such as N-methylpyrrolidone (NMP) and tetrahydrofurfuryl alcohol (THFA) are used for resist strip applications [3]. It is possible, and sometimes useful, to deliver these solvents through the same spray nozzle normally used for aqueous spray cleaning. In this presentation we explore the particle removal and substrate damage performance of 2-ethoxyethanol (EGEE), NMP and THFA as used in a conventional aerosol spray cleaning system" @default.
- W2007193876 created "2016-06-24" @default.
- W2007193876 creator A5005203021 @default.
- W2007193876 creator A5044486582 @default.
- W2007193876 creator A5054343410 @default.
- W2007193876 creator A5056576628 @default.
- W2007193876 creator A5061145610 @default.
- W2007193876 creator A5066530245 @default.
- W2007193876 creator A5087201919 @default.
- W2007193876 date "2009-01-01" @default.
- W2007193876 modified "2023-10-02" @default.
- W2007193876 title "High Velocity Aerosol Cleaning with Organic Solvents: Particle Removal and Substrate Damage" @default.
- W2007193876 doi "https://doi.org/10.4028/www.scientific.net/ssp.145-146.39" @default.
- W2007193876 hasPublicationYear "2009" @default.
- W2007193876 type Work @default.
- W2007193876 sameAs 2007193876 @default.
- W2007193876 citedByCount "5" @default.
- W2007193876 countsByYear W20071938762012 @default.
- W2007193876 countsByYear W20071938762014 @default.
- W2007193876 countsByYear W20071938762015 @default.
- W2007193876 crossrefType "journal-article" @default.
- W2007193876 hasAuthorship W2007193876A5005203021 @default.
- W2007193876 hasAuthorship W2007193876A5044486582 @default.
- W2007193876 hasAuthorship W2007193876A5054343410 @default.
- W2007193876 hasAuthorship W2007193876A5056576628 @default.
- W2007193876 hasAuthorship W2007193876A5061145610 @default.
- W2007193876 hasAuthorship W2007193876A5066530245 @default.
- W2007193876 hasAuthorship W2007193876A5087201919 @default.
- W2007193876 hasConcept C111368507 @default.
- W2007193876 hasConcept C127313418 @default.
- W2007193876 hasConcept C127413603 @default.
- W2007193876 hasConcept C136525101 @default.
- W2007193876 hasConcept C142724271 @default.
- W2007193876 hasConcept C171250308 @default.
- W2007193876 hasConcept C178790620 @default.
- W2007193876 hasConcept C184651966 @default.
- W2007193876 hasConcept C185592680 @default.
- W2007193876 hasConcept C192562407 @default.
- W2007193876 hasConcept C204787440 @default.
- W2007193876 hasConcept C2776382133 @default.
- W2007193876 hasConcept C2777289219 @default.
- W2007193876 hasConcept C2778517922 @default.
- W2007193876 hasConcept C2778829809 @default.
- W2007193876 hasConcept C2779345167 @default.
- W2007193876 hasConcept C2780710336 @default.
- W2007193876 hasConcept C42360764 @default.
- W2007193876 hasConcept C71924100 @default.
- W2007193876 hasConceptScore W2007193876C111368507 @default.
- W2007193876 hasConceptScore W2007193876C127313418 @default.
- W2007193876 hasConceptScore W2007193876C127413603 @default.
- W2007193876 hasConceptScore W2007193876C136525101 @default.
- W2007193876 hasConceptScore W2007193876C142724271 @default.
- W2007193876 hasConceptScore W2007193876C171250308 @default.
- W2007193876 hasConceptScore W2007193876C178790620 @default.
- W2007193876 hasConceptScore W2007193876C184651966 @default.
- W2007193876 hasConceptScore W2007193876C185592680 @default.
- W2007193876 hasConceptScore W2007193876C192562407 @default.
- W2007193876 hasConceptScore W2007193876C204787440 @default.
- W2007193876 hasConceptScore W2007193876C2776382133 @default.
- W2007193876 hasConceptScore W2007193876C2777289219 @default.
- W2007193876 hasConceptScore W2007193876C2778517922 @default.
- W2007193876 hasConceptScore W2007193876C2778829809 @default.
- W2007193876 hasConceptScore W2007193876C2779345167 @default.
- W2007193876 hasConceptScore W2007193876C2780710336 @default.
- W2007193876 hasConceptScore W2007193876C42360764 @default.
- W2007193876 hasConceptScore W2007193876C71924100 @default.
- W2007193876 hasLocation W20071938761 @default.
- W2007193876 hasOpenAccess W2007193876 @default.
- W2007193876 hasPrimaryLocation W20071938761 @default.
- W2007193876 hasRelatedWork W1743607014 @default.
- W2007193876 hasRelatedWork W2002978432 @default.
- W2007193876 hasRelatedWork W200982838 @default.
- W2007193876 hasRelatedWork W2087486927 @default.
- W2007193876 hasRelatedWork W2129142187 @default.
- W2007193876 hasRelatedWork W2181642362 @default.
- W2007193876 hasRelatedWork W2321677984 @default.
- W2007193876 hasRelatedWork W2515678691 @default.
- W2007193876 hasRelatedWork W2564443619 @default.
- W2007193876 hasRelatedWork W2626249648 @default.
- W2007193876 hasRelatedWork W2952098355 @default.
- W2007193876 hasRelatedWork W3752647 @default.
- W2007193876 hasRelatedWork W51339084 @default.
- W2007193876 hasRelatedWork W1513309260 @default.
- W2007193876 hasRelatedWork W1564485284 @default.
- W2007193876 hasRelatedWork W2832280561 @default.
- W2007193876 hasRelatedWork W2842579179 @default.
- W2007193876 hasRelatedWork W2849524009 @default.
- W2007193876 hasRelatedWork W2935573346 @default.
- W2007193876 hasRelatedWork W950780080 @default.
- W2007193876 isParatext "false" @default.
- W2007193876 isRetracted "false" @default.
- W2007193876 magId "2007193876" @default.
- W2007193876 workType "article" @default.