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• W2007207125 endingPage "3866" @default.
• W2007207125 startingPage "3860" @default.
• W2007207125 abstract "Simulation of gas-phase and surface chemistry is an essential part in numerical study of chemical vapor deposition for film growth. When integrated with a model for transport processes such as gas flow, heat transfer, and mass transfer, it allows the prediction of gas-phase composition, film deposition rate, and film uniformity. For halide-assisted chemical vapor deposition of silicon carbide film growth, three-dimensional simulation of the deposition process can be time-consuming due to the large number of chemical reactions involved. In this study, a simplified chemical reaction mechanism was developed for silicon carbide growth with silicon tetrachloride and propane as precursors. After model validation, the reduced reaction steps were implemented into a three-dimensional simulation of halide-assisted chemical vapor deposition to predict the distributions of gas velocity, temperature, concentration of the intermediate reactants, and film deposition rate. Specifically, the effects of deposition pressure on the film growth were investigated. The integrated model for chemistry and transport process demonstrated the capability of modeling a deposition process with reasonable computing time. We envision that this model will provide a useful tool for design, test, and optimization of the deposition process for growing silicon carbide films or bulk crystals by use of halide-assisted chemical vapor deposition process." @default.
• W2007207125 created "2016-06-24" @default.
• W2007207125 creator A5004483141 @default.
• W2007207125 creator A5036431282 @default.
• W2007207125 creator A5085804402 @default.
• W2007207125 date "2009-03-23" @default.
• W2007207125 modified "2023-10-16" @default.
• W2007207125 title "Reduction of Chemical Reaction Mechanism for Halide-Assisted Silicon Carbide Epitaxial Film Deposition" @default.
• W2007207125 cites W1609509065 @default.
• W2007207125 cites W1979015306 @default.
• W2007207125 cites W1985058421 @default.
• W2007207125 cites W1986383847 @default.
• W2007207125 cites W1989263993 @default.
• W2007207125 cites W1990058050 @default.
• W2007207125 cites W1996257837 @default.
• W2007207125 cites W2000038848 @default.
• W2007207125 cites W2017488538 @default.
• W2007207125 cites W2017636308 @default.
• W2007207125 cites W2022711294 @default.
• W2007207125 cites W2036632697 @default.
• W2007207125 cites W2039758840 @default.
• W2007207125 cites W2043447463 @default.
• W2007207125 cites W2047325326 @default.
• W2007207125 cites W2051681822 @default.
• W2007207125 cites W2059141072 @default.
• W2007207125 cites W2067202908 @default.
• W2007207125 cites W2071324675 @default.
• W2007207125 cites W2074488693 @default.
• W2007207125 cites W2074785738 @default.
• W2007207125 cites W2076673069 @default.
• W2007207125 cites W2081670111 @default.
• W2007207125 cites W2085602793 @default.
• W2007207125 cites W2090581819 @default.
• W2007207125 cites W2116512436 @default.
• W2007207125 cites W2141686486 @default.
• W2007207125 cites W2158114986 @default.
• W2007207125 doi "https://doi.org/10.1021/ie8017093" @default.
• W2007207125 hasPublicationYear "2009" @default.
• W2007207125 type Work @default.
• W2007207125 sameAs 2007207125 @default.
• W2007207125 citedByCount "10" @default.
• W2007207125 countsByYear W20072071252012 @default.
• W2007207125 countsByYear W20072071252020 @default.
• W2007207125 countsByYear W20072071252021 @default.
• W2007207125 countsByYear W20072071252022 @default.
• W2007207125 countsByYear W20072071252023 @default.
• W2007207125 crossrefType "journal-article" @default.
• W2007207125 hasAuthorship W2007207125A5004483141 @default.
• W2007207125 hasAuthorship W2007207125A5036431282 @default.
• W2007207125 hasAuthorship W2007207125A5085804402 @default.
• W2007207125 hasConcept C110738630 @default.
• W2007207125 hasConcept C127413603 @default.
• W2007207125 hasConcept C151730666 @default.
• W2007207125 hasConcept C171250308 @default.
• W2007207125 hasConcept C171560689 @default.
• W2007207125 hasConcept C177801218 @default.
• W2007207125 hasConcept C178790620 @default.
• W2007207125 hasConcept C179104552 @default.
• W2007207125 hasConcept C183866003 @default.
• W2007207125 hasConcept C185592680 @default.
• W2007207125 hasConcept C19067145 @default.
• W2007207125 hasConcept C191897082 @default.
• W2007207125 hasConcept C192562407 @default.
• W2007207125 hasConcept C2776412973 @default.
• W2007207125 hasConcept C2779227376 @default.
• W2007207125 hasConcept C2780722187 @default.
• W2007207125 hasConcept C2816523 @default.
• W2007207125 hasConcept C42360764 @default.
• W2007207125 hasConcept C49040817 @default.
• W2007207125 hasConcept C544956773 @default.
• W2007207125 hasConcept C57410435 @default.
• W2007207125 hasConcept C64297162 @default.
• W2007207125 hasConcept C75937256 @default.
• W2007207125 hasConcept C86803240 @default.
• W2007207125 hasConceptScore W2007207125C110738630 @default.
• W2007207125 hasConceptScore W2007207125C127413603 @default.
• W2007207125 hasConceptScore W2007207125C151730666 @default.
• W2007207125 hasConceptScore W2007207125C171250308 @default.
• W2007207125 hasConceptScore W2007207125C171560689 @default.
• W2007207125 hasConceptScore W2007207125C177801218 @default.
• W2007207125 hasConceptScore W2007207125C178790620 @default.
• W2007207125 hasConceptScore W2007207125C179104552 @default.
• W2007207125 hasConceptScore W2007207125C183866003 @default.
• W2007207125 hasConceptScore W2007207125C185592680 @default.
• W2007207125 hasConceptScore W2007207125C19067145 @default.
• W2007207125 hasConceptScore W2007207125C191897082 @default.
• W2007207125 hasConceptScore W2007207125C192562407 @default.
• W2007207125 hasConceptScore W2007207125C2776412973 @default.
• W2007207125 hasConceptScore W2007207125C2779227376 @default.
• W2007207125 hasConceptScore W2007207125C2780722187 @default.
• W2007207125 hasConceptScore W2007207125C2816523 @default.
• W2007207125 hasConceptScore W2007207125C42360764 @default.
• W2007207125 hasConceptScore W2007207125C49040817 @default.
• W2007207125 hasConceptScore W2007207125C544956773 @default.
• W2007207125 hasConceptScore W2007207125C57410435 @default.
• W2007207125 hasConceptScore W2007207125C64297162 @default.
• W2007207125 hasConceptScore W2007207125C75937256 @default.
• W2007207125 hasConceptScore W2007207125C86803240 @default.

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