Matches in SemOpenAlex for { <https://semopenalex.org/work/W2007218757> ?p ?o ?g. }
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95
with 100 items per page.
- W2007218757 endingPage "29" @default.
- W2007218757 startingPage "23" @default.
- W2007218757 abstract "A new breed of pattern generators for photomasks using spatial light modulator (SLM) technology with many architectural similarities to that of a modern stepper is under development. The SLM, having an array of individually addressed micromirrors, is illuminated by an excimer DUV laser pulse and imaged onto the surface of a photomask. A stage moves the photomask to a new position and the SLM is reloaded with a new portion of the pattern, followed by a new exposure. The complete pattern is stitched together at a high rate. Analog modulation of each pixel provides an address grid satisfying the requirements of the industry roadmap without speed penalty. The new SLM technology has the resolution to rival that of e-beam pattern generators, yet provides the productivity of laser patterning due to the massive parallel exposure strategy." @default.
- W2007218757 created "2016-06-24" @default.
- W2007218757 creator A5006885155 @default.
- W2007218757 creator A5028431168 @default.
- W2007218757 creator A5076332768 @default.
- W2007218757 creator A5077668618 @default.
- W2007218757 creator A5090254817 @default.
- W2007218757 creator A5090421868 @default.
- W2007218757 date "2001-09-01" @default.
- W2007218757 modified "2023-10-14" @default.
- W2007218757 title "New laser pattern generator for DUV using a spatial light modulator" @default.
- W2007218757 cites W2173503348 @default.
- W2007218757 doi "https://doi.org/10.1016/s0167-9317(01)00531-7" @default.
- W2007218757 hasPublicationYear "2001" @default.
- W2007218757 type Work @default.
- W2007218757 sameAs 2007218757 @default.
- W2007218757 citedByCount "14" @default.
- W2007218757 countsByYear W20072187572016 @default.
- W2007218757 countsByYear W20072187572020 @default.
- W2007218757 countsByYear W20072187572021 @default.
- W2007218757 crossrefType "journal-article" @default.
- W2007218757 hasAuthorship W2007218757A5006885155 @default.
- W2007218757 hasAuthorship W2007218757A5028431168 @default.
- W2007218757 hasAuthorship W2007218757A5076332768 @default.
- W2007218757 hasAuthorship W2007218757A5077668618 @default.
- W2007218757 hasAuthorship W2007218757A5090254817 @default.
- W2007218757 hasAuthorship W2007218757A5090421868 @default.
- W2007218757 hasConcept C120665830 @default.
- W2007218757 hasConcept C121332964 @default.
- W2007218757 hasConcept C123079801 @default.
- W2007218757 hasConcept C125245961 @default.
- W2007218757 hasConcept C137905882 @default.
- W2007218757 hasConcept C14737013 @default.
- W2007218757 hasConcept C151346624 @default.
- W2007218757 hasConcept C163258240 @default.
- W2007218757 hasConcept C165005293 @default.
- W2007218757 hasConcept C171250308 @default.
- W2007218757 hasConcept C187504802 @default.
- W2007218757 hasConcept C192562407 @default.
- W2007218757 hasConcept C200274948 @default.
- W2007218757 hasConcept C24890656 @default.
- W2007218757 hasConcept C2777903624 @default.
- W2007218757 hasConcept C2779227376 @default.
- W2007218757 hasConcept C2780477314 @default.
- W2007218757 hasConcept C2780992000 @default.
- W2007218757 hasConcept C41008148 @default.
- W2007218757 hasConcept C49040817 @default.
- W2007218757 hasConcept C520434653 @default.
- W2007218757 hasConcept C53524968 @default.
- W2007218757 hasConcept C62520636 @default.
- W2007218757 hasConcept C76155785 @default.
- W2007218757 hasConceptScore W2007218757C120665830 @default.
- W2007218757 hasConceptScore W2007218757C121332964 @default.
- W2007218757 hasConceptScore W2007218757C123079801 @default.
- W2007218757 hasConceptScore W2007218757C125245961 @default.
- W2007218757 hasConceptScore W2007218757C137905882 @default.
- W2007218757 hasConceptScore W2007218757C14737013 @default.
- W2007218757 hasConceptScore W2007218757C151346624 @default.
- W2007218757 hasConceptScore W2007218757C163258240 @default.
- W2007218757 hasConceptScore W2007218757C165005293 @default.
- W2007218757 hasConceptScore W2007218757C171250308 @default.
- W2007218757 hasConceptScore W2007218757C187504802 @default.
- W2007218757 hasConceptScore W2007218757C192562407 @default.
- W2007218757 hasConceptScore W2007218757C200274948 @default.
- W2007218757 hasConceptScore W2007218757C24890656 @default.
- W2007218757 hasConceptScore W2007218757C2777903624 @default.
- W2007218757 hasConceptScore W2007218757C2779227376 @default.
- W2007218757 hasConceptScore W2007218757C2780477314 @default.
- W2007218757 hasConceptScore W2007218757C2780992000 @default.
- W2007218757 hasConceptScore W2007218757C41008148 @default.
- W2007218757 hasConceptScore W2007218757C49040817 @default.
- W2007218757 hasConceptScore W2007218757C520434653 @default.
- W2007218757 hasConceptScore W2007218757C53524968 @default.
- W2007218757 hasConceptScore W2007218757C62520636 @default.
- W2007218757 hasConceptScore W2007218757C76155785 @default.
- W2007218757 hasLocation W20072187571 @default.
- W2007218757 hasOpenAccess W2007218757 @default.
- W2007218757 hasPrimaryLocation W20072187571 @default.
- W2007218757 hasRelatedWork W1844722597 @default.
- W2007218757 hasRelatedWork W2005313234 @default.
- W2007218757 hasRelatedWork W2007218757 @default.
- W2007218757 hasRelatedWork W2059622818 @default.
- W2007218757 hasRelatedWork W2069889488 @default.
- W2007218757 hasRelatedWork W2080140755 @default.
- W2007218757 hasRelatedWork W2081138184 @default.
- W2007218757 hasRelatedWork W2094151632 @default.
- W2007218757 hasRelatedWork W2156588976 @default.
- W2007218757 hasRelatedWork W2741122274 @default.
- W2007218757 hasVolume "57-58" @default.
- W2007218757 isParatext "false" @default.
- W2007218757 isRetracted "false" @default.
- W2007218757 magId "2007218757" @default.
- W2007218757 workType "article" @default.