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- W2007226370 endingPage "821" @default.
- W2007226370 startingPage "818" @default.
- W2007226370 abstract "After extensive utilisation of tantalum (Ta) catalyst filaments for hot wire chemical vapor deposition (HWCVD) of thin silicon films a strong degradation takes place. A high concentration of silicon was found not only on the surface but also in the bulk of the tantalum filament. Visual microscopic investigations, Secondary Ion Mass Spectrometry (SIMS), X-ray Diffraction (XRD) and Energy Dispersive X-ray Analysis (EDX) indicate appearance of various silicides and formation of thick silicon layer (> 50 μm) on the filament surface. The high-power backscattered scanning electron microscopy (SEM BSE) and optical microscopic analysis of the filament cross section reveal a complicated, non-uniform structure of filaments after use. By XRD a recrystallisation of tantalum kernel was detected. The EDX analysis indicates that silicides on the filament surface have the highest concentration of Si." @default.
- W2007226370 created "2016-06-24" @default.
- W2007226370 creator A5006502160 @default.
- W2007226370 creator A5014286400 @default.
- W2007226370 creator A5018749744 @default.
- W2007226370 creator A5057803840 @default.
- W2007226370 creator A5074265347 @default.
- W2007226370 creator A5089882794 @default.
- W2007226370 date "2008-01-01" @default.
- W2007226370 modified "2023-10-18" @default.
- W2007226370 title "Investigation of silicon contamination of Ta filaments used for thin film silicon deposition" @default.
- W2007226370 cites W2030215518 @default.
- W2007226370 cites W2049852791 @default.
- W2007226370 cites W2051021955 @default.
- W2007226370 cites W2499431564 @default.
- W2007226370 cites W2595636474 @default.
- W2007226370 cites W2606839434 @default.
- W2007226370 cites W2625699652 @default.
- W2007226370 doi "https://doi.org/10.1016/j.tsf.2007.06.207" @default.
- W2007226370 hasPublicationYear "2008" @default.
- W2007226370 type Work @default.
- W2007226370 sameAs 2007226370 @default.
- W2007226370 citedByCount "9" @default.
- W2007226370 countsByYear W20072263702012 @default.
- W2007226370 countsByYear W20072263702013 @default.
- W2007226370 countsByYear W20072263702014 @default.
- W2007226370 crossrefType "journal-article" @default.
- W2007226370 hasAuthorship W2007226370A5006502160 @default.
- W2007226370 hasAuthorship W2007226370A5014286400 @default.
- W2007226370 hasAuthorship W2007226370A5018749744 @default.
- W2007226370 hasAuthorship W2007226370A5057803840 @default.
- W2007226370 hasAuthorship W2007226370A5074265347 @default.
- W2007226370 hasAuthorship W2007226370A5089882794 @default.
- W2007226370 hasConcept C113196181 @default.
- W2007226370 hasConcept C127413603 @default.
- W2007226370 hasConcept C14228908 @default.
- W2007226370 hasConcept C151730666 @default.
- W2007226370 hasConcept C159985019 @default.
- W2007226370 hasConcept C162356407 @default.
- W2007226370 hasConcept C171250308 @default.
- W2007226370 hasConcept C185592680 @default.
- W2007226370 hasConcept C19067145 @default.
- W2007226370 hasConcept C191897082 @default.
- W2007226370 hasConcept C192562407 @default.
- W2007226370 hasConcept C26771246 @default.
- W2007226370 hasConcept C2779227376 @default.
- W2007226370 hasConcept C2816523 @default.
- W2007226370 hasConcept C42360764 @default.
- W2007226370 hasConcept C43617362 @default.
- W2007226370 hasConcept C514619126 @default.
- W2007226370 hasConcept C544956773 @default.
- W2007226370 hasConcept C57410435 @default.
- W2007226370 hasConcept C64297162 @default.
- W2007226370 hasConcept C77671233 @default.
- W2007226370 hasConcept C86803240 @default.
- W2007226370 hasConceptScore W2007226370C113196181 @default.
- W2007226370 hasConceptScore W2007226370C127413603 @default.
- W2007226370 hasConceptScore W2007226370C14228908 @default.
- W2007226370 hasConceptScore W2007226370C151730666 @default.
- W2007226370 hasConceptScore W2007226370C159985019 @default.
- W2007226370 hasConceptScore W2007226370C162356407 @default.
- W2007226370 hasConceptScore W2007226370C171250308 @default.
- W2007226370 hasConceptScore W2007226370C185592680 @default.
- W2007226370 hasConceptScore W2007226370C19067145 @default.
- W2007226370 hasConceptScore W2007226370C191897082 @default.
- W2007226370 hasConceptScore W2007226370C192562407 @default.
- W2007226370 hasConceptScore W2007226370C26771246 @default.
- W2007226370 hasConceptScore W2007226370C2779227376 @default.
- W2007226370 hasConceptScore W2007226370C2816523 @default.
- W2007226370 hasConceptScore W2007226370C42360764 @default.
- W2007226370 hasConceptScore W2007226370C43617362 @default.
- W2007226370 hasConceptScore W2007226370C514619126 @default.
- W2007226370 hasConceptScore W2007226370C544956773 @default.
- W2007226370 hasConceptScore W2007226370C57410435 @default.
- W2007226370 hasConceptScore W2007226370C64297162 @default.
- W2007226370 hasConceptScore W2007226370C77671233 @default.
- W2007226370 hasConceptScore W2007226370C86803240 @default.
- W2007226370 hasIssue "5" @default.
- W2007226370 hasLocation W20072263701 @default.
- W2007226370 hasOpenAccess W2007226370 @default.
- W2007226370 hasPrimaryLocation W20072263701 @default.
- W2007226370 hasRelatedWork W1974536436 @default.
- W2007226370 hasRelatedWork W1977601008 @default.
- W2007226370 hasRelatedWork W1994082984 @default.
- W2007226370 hasRelatedWork W2007074685 @default.
- W2007226370 hasRelatedWork W2050082790 @default.
- W2007226370 hasRelatedWork W2075623037 @default.
- W2007226370 hasRelatedWork W2138375871 @default.
- W2007226370 hasRelatedWork W2328837405 @default.
- W2007226370 hasRelatedWork W2356201124 @default.
- W2007226370 hasRelatedWork W4254462134 @default.
- W2007226370 hasVolume "516" @default.
- W2007226370 isParatext "false" @default.
- W2007226370 isRetracted "false" @default.
- W2007226370 magId "2007226370" @default.
- W2007226370 workType "article" @default.