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- W2007241844 abstract "We have been able to develop a new useful method for the heteroepitaxial growth on a highly lattice-mismatched substrate by MOVPE successfully. We have found that the surface morphology of InP epitaxial layer grown on a GaAs substrate by MOVPE strongly depends on the supply rate of the group III material. Based on this experimental finding, an InP epitaxial layer with a uniform and mirror-smooth surface has been successfully grown on a 2-inch GaAs (100) substrate. In addition to the surface morphology, we have measured the RHEED pattern, the x-ray diffraction pattern, the Hall mobility, the carrier concentration, and the photoluminescence as functions of the flow rate of the group III carrier gas." @default.
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- W2007241844 date "1988-01-01" @default.
- W2007241844 modified "2023-09-27" @default.
- W2007241844 title "Direct MOVPE growth of InP on GaAs substrates" @default.
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- W2007241844 doi "https://doi.org/10.1016/0022-0248(88)90579-9" @default.
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