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• W2007310023 abstract "For a submicron photolithography process, there is little room for error. In this paper, an optimized technique for photoresist (PR) development is reported, to fabricate a nanogap biosensor for application in biomedical nanodiagnostics. The pattern transfer on the wafer substrate requires precise alignment and Deep Ultra-Violet (DUV) light exposure. This research describes the photolithography process to develop a standard manufacturing procedure for pattern transfer from chrome mask. The key factor for PR development is understood and the optimization is done based on the PR thickness, spin speed, spin time, exposure time, post-exposure bake (PEB) time, developer concentration and developing time to achieve the design feature size of 1 micron. The PR is coated and spun at 3000 rpm and 5000 rpm at 30s and 40s respectively to form a very thin layer. However, the UV exposure time is remained constant at 10s. After the pattern transfer, the wafer is immersed in different concentrations of RD6 developer to develop the PR. To further improve the resolution of image transfer, the PEB time is also optimized for a better throughput on feature size. These optimizations are important to reduce the dimension error and were able to achieve error free design to protect critical dimension and prevent device failure." @default.
• W2007310023 created "2016-06-24" @default.
• W2007310023 creator A5017366245 @default.
• W2007310023 creator A5033574430 @default.
• W2007310023 creator A5068461434 @default.
• W2007310023 creator A5087438853 @default.
• W2007310023 date "2013-11-01" @default.
• W2007310023 modified "2023-09-27" @default.
• W2007310023 title "Conventional Photolithography and Process Optimization of Pattern-Size Expansion Technique for Nanogap Biosensor Fabrication" @default.
• W2007310023 cites W1607019360 @default.
• W2007310023 cites W2001744487 @default.
• W2007310023 cites W2058420239 @default.
• W2007310023 cites W2071534017 @default.
• W2007310023 cites W2105419490 @default.
• W2007310023 cites W2107996474 @default.
• W2007310023 cites W2555369252 @default.
• W2007310023 cites W4250279840 @default.
• W2007310023 doi "https://doi.org/10.4028/www.scientific.net/amr.832.89" @default.
• W2007310023 hasPublicationYear "2013" @default.
• W2007310023 type Work @default.
• W2007310023 sameAs 2007310023 @default.
• W2007310023 citedByCount "3" @default.
• W2007310023 countsByYear W20073100232014 @default.
• W2007310023 countsByYear W20073100232015 @default.
• W2007310023 countsByYear W20073100232020 @default.
• W2007310023 crossrefType "journal-article" @default.
• W2007310023 hasAuthorship W2007310023A5017366245 @default.
• W2007310023 hasAuthorship W2007310023A5033574430 @default.
• W2007310023 hasAuthorship W2007310023A5068461434 @default.
• W2007310023 hasAuthorship W2007310023A5087438853 @default.
• W2007310023 hasConcept C105487726 @default.
• W2007310023 hasConcept C111368507 @default.
• W2007310023 hasConcept C111919701 @default.
• W2007310023 hasConcept C120665830 @default.
• W2007310023 hasConcept C121332964 @default.
• W2007310023 hasConcept C127313418 @default.
• W2007310023 hasConcept C134406635 @default.
• W2007310023 hasConcept C136525101 @default.
• W2007310023 hasConcept C138885662 @default.
• W2007310023 hasConcept C142724271 @default.
• W2007310023 hasConcept C14737013 @default.
• W2007310023 hasConcept C160671074 @default.
• W2007310023 hasConcept C160756335 @default.
• W2007310023 hasConcept C171250308 @default.
• W2007310023 hasConcept C182873914 @default.
• W2007310023 hasConcept C192562407 @default.
• W2007310023 hasConcept C204223013 @default.
• W2007310023 hasConcept C204787440 @default.
• W2007310023 hasConcept C207789793 @default.
• W2007310023 hasConcept C2776401178 @default.
• W2007310023 hasConcept C2777289219 @default.
• W2007310023 hasConcept C2779227376 @default.
• W2007310023 hasConcept C41008148 @default.
• W2007310023 hasConcept C41794268 @default.
• W2007310023 hasConcept C41895202 @default.
• W2007310023 hasConcept C49040817 @default.
• W2007310023 hasConcept C53524968 @default.
• W2007310023 hasConcept C71924100 @default.
• W2007310023 hasConcept C98045186 @default.
• W2007310023 hasConceptScore W2007310023C105487726 @default.
• W2007310023 hasConceptScore W2007310023C111368507 @default.
• W2007310023 hasConceptScore W2007310023C111919701 @default.
• W2007310023 hasConceptScore W2007310023C120665830 @default.
• W2007310023 hasConceptScore W2007310023C121332964 @default.
• W2007310023 hasConceptScore W2007310023C127313418 @default.
• W2007310023 hasConceptScore W2007310023C134406635 @default.
• W2007310023 hasConceptScore W2007310023C136525101 @default.
• W2007310023 hasConceptScore W2007310023C138885662 @default.
• W2007310023 hasConceptScore W2007310023C142724271 @default.
• W2007310023 hasConceptScore W2007310023C14737013 @default.
• W2007310023 hasConceptScore W2007310023C160671074 @default.
• W2007310023 hasConceptScore W2007310023C160756335 @default.
• W2007310023 hasConceptScore W2007310023C171250308 @default.
• W2007310023 hasConceptScore W2007310023C182873914 @default.
• W2007310023 hasConceptScore W2007310023C192562407 @default.
• W2007310023 hasConceptScore W2007310023C204223013 @default.
• W2007310023 hasConceptScore W2007310023C204787440 @default.
• W2007310023 hasConceptScore W2007310023C207789793 @default.
• W2007310023 hasConceptScore W2007310023C2776401178 @default.
• W2007310023 hasConceptScore W2007310023C2777289219 @default.
• W2007310023 hasConceptScore W2007310023C2779227376 @default.
• W2007310023 hasConceptScore W2007310023C41008148 @default.
• W2007310023 hasConceptScore W2007310023C41794268 @default.
• W2007310023 hasConceptScore W2007310023C41895202 @default.
• W2007310023 hasConceptScore W2007310023C49040817 @default.
• W2007310023 hasConceptScore W2007310023C53524968 @default.
• W2007310023 hasConceptScore W2007310023C71924100 @default.
• W2007310023 hasConceptScore W2007310023C98045186 @default.
• W2007310023 hasLocation W20073100231 @default.
• W2007310023 hasOpenAccess W2007310023 @default.
• W2007310023 hasPrimaryLocation W20073100231 @default.
• W2007310023 hasRelatedWork W1994107532 @default.
• W2007310023 hasRelatedWork W1999769483 @default.
• W2007310023 hasRelatedWork W2006024169 @default.
• W2007310023 hasRelatedWork W2017301441 @default.
• W2007310023 hasRelatedWork W2022048592 @default.
• W2007310023 hasRelatedWork W2029906755 @default.
• W2007310023 hasRelatedWork W2034861163 @default.
• W2007310023 hasRelatedWork W2045302986 @default.
• W2007310023 hasRelatedWork W2057011409 @default.

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