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- W2007339900 endingPage "966" @default.
- W2007339900 startingPage "955" @default.
- W2007339900 abstract "Abstract Thermal oxidation of silicon is described as a three-component thermodynamic local process involving silicon, silicon oxide, and oxygen molecules. A simplified system of model equations is used to demonstrate the evoluton of the Si-SiO 2 interface. For the one-dimensional case the equivalence with the model of Deal and Grove could be shown analytically. For that purpose effective interface coordinates have been introduced which establish the connection between the conventional concept of sharp interfaces and our diffusive interface, i.e., a transition region between pure silicon and pure silicon oxide." @default.
- W2007339900 created "2016-06-24" @default.
- W2007339900 creator A5059852819 @default.
- W2007339900 creator A5079420272 @default.
- W2007339900 date "1991-11-01" @default.
- W2007339900 modified "2023-10-18" @default.
- W2007339900 title "A Simulation System for Diffusive Oxidation of Silicon:One-Dimensional Analysis" @default.
- W2007339900 doi "https://doi.org/10.1515/zna-1991-1106" @default.
- W2007339900 hasPublicationYear "1991" @default.
- W2007339900 type Work @default.
- W2007339900 sameAs 2007339900 @default.
- W2007339900 citedByCount "2" @default.
- W2007339900 crossrefType "journal-article" @default.
- W2007339900 hasAuthorship W2007339900A5059852819 @default.
- W2007339900 hasAuthorship W2007339900A5079420272 @default.
- W2007339900 hasBestOaLocation W20073399001 @default.
- W2007339900 hasConcept C113843644 @default.
- W2007339900 hasConcept C121332964 @default.
- W2007339900 hasConcept C13355873 @default.
- W2007339900 hasConcept C159467904 @default.
- W2007339900 hasConcept C159985019 @default.
- W2007339900 hasConcept C168167062 @default.
- W2007339900 hasConcept C178790620 @default.
- W2007339900 hasConcept C185592680 @default.
- W2007339900 hasConcept C191897082 @default.
- W2007339900 hasConcept C192562407 @default.
- W2007339900 hasConcept C195114451 @default.
- W2007339900 hasConcept C196806460 @default.
- W2007339900 hasConcept C202444582 @default.
- W2007339900 hasConcept C204530211 @default.
- W2007339900 hasConcept C2524010 @default.
- W2007339900 hasConcept C26953177 @default.
- W2007339900 hasConcept C2777431650 @default.
- W2007339900 hasConcept C2779105228 @default.
- W2007339900 hasConcept C2779281663 @default.
- W2007339900 hasConcept C2779851234 @default.
- W2007339900 hasConcept C2780069185 @default.
- W2007339900 hasConcept C28413391 @default.
- W2007339900 hasConcept C33923547 @default.
- W2007339900 hasConcept C49040817 @default.
- W2007339900 hasConcept C540031477 @default.
- W2007339900 hasConcept C544956773 @default.
- W2007339900 hasConcept C97355855 @default.
- W2007339900 hasConceptScore W2007339900C113843644 @default.
- W2007339900 hasConceptScore W2007339900C121332964 @default.
- W2007339900 hasConceptScore W2007339900C13355873 @default.
- W2007339900 hasConceptScore W2007339900C159467904 @default.
- W2007339900 hasConceptScore W2007339900C159985019 @default.
- W2007339900 hasConceptScore W2007339900C168167062 @default.
- W2007339900 hasConceptScore W2007339900C178790620 @default.
- W2007339900 hasConceptScore W2007339900C185592680 @default.
- W2007339900 hasConceptScore W2007339900C191897082 @default.
- W2007339900 hasConceptScore W2007339900C192562407 @default.
- W2007339900 hasConceptScore W2007339900C195114451 @default.
- W2007339900 hasConceptScore W2007339900C196806460 @default.
- W2007339900 hasConceptScore W2007339900C202444582 @default.
- W2007339900 hasConceptScore W2007339900C204530211 @default.
- W2007339900 hasConceptScore W2007339900C2524010 @default.
- W2007339900 hasConceptScore W2007339900C26953177 @default.
- W2007339900 hasConceptScore W2007339900C2777431650 @default.
- W2007339900 hasConceptScore W2007339900C2779105228 @default.
- W2007339900 hasConceptScore W2007339900C2779281663 @default.
- W2007339900 hasConceptScore W2007339900C2779851234 @default.
- W2007339900 hasConceptScore W2007339900C2780069185 @default.
- W2007339900 hasConceptScore W2007339900C28413391 @default.
- W2007339900 hasConceptScore W2007339900C33923547 @default.
- W2007339900 hasConceptScore W2007339900C49040817 @default.
- W2007339900 hasConceptScore W2007339900C540031477 @default.
- W2007339900 hasConceptScore W2007339900C544956773 @default.
- W2007339900 hasConceptScore W2007339900C97355855 @default.
- W2007339900 hasIssue "11" @default.
- W2007339900 hasLocation W20073399001 @default.
- W2007339900 hasOpenAccess W2007339900 @default.
- W2007339900 hasPrimaryLocation W20073399001 @default.
- W2007339900 hasRelatedWork W2000235795 @default.
- W2007339900 hasRelatedWork W2036207620 @default.
- W2007339900 hasRelatedWork W2062152640 @default.
- W2007339900 hasRelatedWork W2067843835 @default.
- W2007339900 hasRelatedWork W2351892592 @default.
- W2007339900 hasRelatedWork W2969397407 @default.
- W2007339900 hasRelatedWork W755330085 @default.
- W2007339900 hasRelatedWork W1991474562 @default.
- W2007339900 hasRelatedWork W2052726931 @default.
- W2007339900 hasRelatedWork W2518300032 @default.
- W2007339900 hasVolume "46" @default.
- W2007339900 isParatext "false" @default.
- W2007339900 isRetracted "false" @default.
- W2007339900 magId "2007339900" @default.
- W2007339900 workType "article" @default.