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- W2007366429 endingPage "2602" @default.
- W2007366429 startingPage "2597" @default.
- W2007366429 abstract "A scanning tunneling microscope (STM) was employed to investigate properties of the chemically amplified negative electron beam resist MICROPOSIT■ SAL-601■, from Shipley Company. The usual processing sequence of the resist includes a postexposure bake (PEB) to promote the cross-linking action of the acid catalyst. However, it has been proposed that PEB can induce thermally activated diffusion of the acid catalyst as well. Using the STM to generate a spatially localized beam of low kinetic energy electrons, we have investigated the effects of exposure dose and voltage and PEB time on linewidth in thin (50 nm) resist films. Even with no PEB, insoluble resist features were observable. Energy calculations do not support significant local heating. Therefore, cross-linking must be due to the electron exposure. Dose and PEB times under 10 min have only a small effect on linewidth. From the variation of feature size with PEB time, an upper limit to the diffusion coefficient was measured to be 0.3 nm2/s. This value is well below what has been previously reported. The process latitude of exposure with a 50 kV electron beam has also been investigated. Both dose and PEB conditions had a much larger effect on feature size for the high energy lithography." @default.
- W2007366429 created "2016-06-24" @default.
- W2007366429 creator A5041737859 @default.
- W2007366429 creator A5045856956 @default.
- W2007366429 creator A5083600534 @default.
- W2007366429 date "1993-11-01" @default.
- W2007366429 modified "2023-10-03" @default.
- W2007366429 title "Determination of acid diffusion rate in a chemically amplified resist with scanning tunneling microscope lithography" @default.
- W2007366429 doi "https://doi.org/10.1116/1.586632" @default.
- W2007366429 hasPublicationYear "1993" @default.
- W2007366429 type Work @default.
- W2007366429 sameAs 2007366429 @default.
- W2007366429 citedByCount "15" @default.
- W2007366429 countsByYear W20073664292013 @default.
- W2007366429 countsByYear W20073664292017 @default.
- W2007366429 countsByYear W20073664292020 @default.
- W2007366429 crossrefType "journal-article" @default.
- W2007366429 hasAuthorship W2007366429A5041737859 @default.
- W2007366429 hasAuthorship W2007366429A5045856956 @default.
- W2007366429 hasAuthorship W2007366429A5083600534 @default.
- W2007366429 hasConcept C113196181 @default.
- W2007366429 hasConcept C120665830 @default.
- W2007366429 hasConcept C121332964 @default.
- W2007366429 hasConcept C142181693 @default.
- W2007366429 hasConcept C159985019 @default.
- W2007366429 hasConcept C171250308 @default.
- W2007366429 hasConcept C178790620 @default.
- W2007366429 hasConcept C185592680 @default.
- W2007366429 hasConcept C192562407 @default.
- W2007366429 hasConcept C200274948 @default.
- W2007366429 hasConcept C204223013 @default.
- W2007366429 hasConcept C26771246 @default.
- W2007366429 hasConcept C2779227376 @default.
- W2007366429 hasConcept C49040817 @default.
- W2007366429 hasConcept C520434653 @default.
- W2007366429 hasConcept C53524968 @default.
- W2007366429 hasConcept C6518042 @default.
- W2007366429 hasConcept C69357855 @default.
- W2007366429 hasConcept C97355855 @default.
- W2007366429 hasConceptScore W2007366429C113196181 @default.
- W2007366429 hasConceptScore W2007366429C120665830 @default.
- W2007366429 hasConceptScore W2007366429C121332964 @default.
- W2007366429 hasConceptScore W2007366429C142181693 @default.
- W2007366429 hasConceptScore W2007366429C159985019 @default.
- W2007366429 hasConceptScore W2007366429C171250308 @default.
- W2007366429 hasConceptScore W2007366429C178790620 @default.
- W2007366429 hasConceptScore W2007366429C185592680 @default.
- W2007366429 hasConceptScore W2007366429C192562407 @default.
- W2007366429 hasConceptScore W2007366429C200274948 @default.
- W2007366429 hasConceptScore W2007366429C204223013 @default.
- W2007366429 hasConceptScore W2007366429C26771246 @default.
- W2007366429 hasConceptScore W2007366429C2779227376 @default.
- W2007366429 hasConceptScore W2007366429C49040817 @default.
- W2007366429 hasConceptScore W2007366429C520434653 @default.
- W2007366429 hasConceptScore W2007366429C53524968 @default.
- W2007366429 hasConceptScore W2007366429C6518042 @default.
- W2007366429 hasConceptScore W2007366429C69357855 @default.
- W2007366429 hasConceptScore W2007366429C97355855 @default.
- W2007366429 hasIssue "6" @default.
- W2007366429 hasLocation W20073664291 @default.
- W2007366429 hasOpenAccess W2007366429 @default.
- W2007366429 hasPrimaryLocation W20073664291 @default.
- W2007366429 hasRelatedWork W1994386437 @default.
- W2007366429 hasRelatedWork W2001798417 @default.
- W2007366429 hasRelatedWork W2016342374 @default.
- W2007366429 hasRelatedWork W2053190549 @default.
- W2007366429 hasRelatedWork W2065404899 @default.
- W2007366429 hasRelatedWork W2071702983 @default.
- W2007366429 hasRelatedWork W2085237633 @default.
- W2007366429 hasRelatedWork W2145603813 @default.
- W2007366429 hasRelatedWork W2286317343 @default.
- W2007366429 hasRelatedWork W3091884080 @default.
- W2007366429 hasVolume "11" @default.
- W2007366429 isParatext "false" @default.
- W2007366429 isRetracted "false" @default.
- W2007366429 magId "2007366429" @default.
- W2007366429 workType "article" @default.