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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2007454908> ?p ?o ?g. }

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• W2007454908 abstract "The nucleation and subsequent growth of high-quality AlN layers of both crystallographic polarities on nonpolar Si(1 1 1) substrates were investigated. The films were grown by plasma-assisted molecular beam epitaxy. The nucleation conditions of the epitaxial AlN on Si(1 1 1) surface were found to be critical for the formation of the AlN films either with Al- or N-face. The existence of a 7×7-reconstructed Si(1 1 1) surface is also found to be important to provide a proper nucleation and subsequent two-dimensional growth of the AlN (000̄1) and (0 0 0 1) oriented films. The AlN film polarity determination has been performed either ex situ by X-ray photoelectron diffraction or in situ by observing the polarity-dependent surface reconstructions. Finally, the AlN layers of both polarities were characterized by atomic force microscopy to provide information about the surface morphology of the grown films." @default.
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• W2007454908 date "1999-12-01" @default.
• W2007454908 modified "2023-09-23" @default.
• W2007454908 title "The polarity of AlN films grown on Si(111)" @default.
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• W2007454908 doi "https://doi.org/10.1016/s0022-0248(99)00375-9" @default.
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