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• W2007459552 abstract "A simple and novel method is proposed for the fabrication of aspherical SU-8 microlens arrays with a wide range of tunable focal lengths utilizing a soft SU-8 stamping process and an electro-static pulling method. In the proposed approach, an SU-8 stamp incorporating a micro-nozzle array and a reservoir containing unexposed SU-8 is fabricated on a glass substrate using a dose-controlled exposure process. Microlens arrays with diameters ranging from 20 to 500 μm and various radii of curvature are successfully fabricated using the proposed method. The low surface roughness (Ra = 3.84 nm) and high dimensional uniformity of the SU-8 microlens arrays (variation < 5% designed diameter) confirm both the optical quality of the individual microlenses and the general feasibility of the fabrication method. The innovative fabrication method proposed in this study provides a simple and efficient means of producing high quality aspherical microlens arrays with tunable focal lengths." @default.
• W2007459552 created "2016-06-24" @default.
• W2007459552 creator A5003303766 @default.
• W2007459552 creator A5043722879 @default.
• W2007459552 date "2010-08-25" @default.
• W2007459552 modified "2023-10-13" @default.
• W2007459552 title "Fabrication of aspherical SU-8 microlens array utilizing novel stamping process and electro-static pulling method" @default.
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• W2007459552 doi "https://doi.org/10.1364/oe.18.019114" @default.
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