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- W2007498919 abstract "From our research and development in hard x-ray lithography, we have found that our conventional leadscrew driven scanner stages do not provide adequate scan speed or travel. These considerations have led us to develop a scanning system based on a long stroke hydraulic drive with 635 mm of travel and closed loop feedback to position the stage to better than 100 micrometers. The control of the device is through a PC with a custom LabView interface coupled to simple x-ray beam diagnostics. This configuration allows us to set a variety of scan parameters, including target dose, scan range, scan rates, and dose rate. Results from our prototype system at beamline X-27B are described as well as progress on a production version for the X-14B beamline." @default.
- W2007498919 created "2016-06-24" @default.
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- W2007498919 date "1998-02-24" @default.
- W2007498919 modified "2023-10-16" @default.
- W2007498919 title "High speed hydraulic scanner for deep X-ray lithography" @default.
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- W2007498919 doi "https://doi.org/10.1007/s005420050096" @default.
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