Matches in SemOpenAlex for { <https://semopenalex.org/work/W2007508056> ?p ?o ?g. }
Showing items 1 to 100 of
100
with 100 items per page.
- W2007508056 endingPage "459" @default.
- W2007508056 startingPage "459" @default.
- W2007508056 abstract "The spreading resistance probe (SRP) and four point probe (FPP) use, respectively, two or four metal probes with loads in the range of 5–100 g to obtain indispensable information on the electrical characteristics (sheet resistance, junction depth, activation degree, profile shape) of impurity depth profiles in silicon. Recently, however, it has been reported that FPP sheet values are becoming irreproducible and that SRP depth profiles can be significantly shallower than the corresponding secondary ion mass spectrometry dopant profiles for ultrashallow structures. In this work we analyze the impact of probe penetration on the accuracy of SRP and FPP measurements for a series of sub-50 nm profiles with different steepness and substrate level. The probe penetration has been measured by atomic force microscopy and ranged from 5 to 130 nm. The FPP sheet resistance errors of up to 300%, as found for the higher loads, can be correlated with the penetration of the probes through the electrical junction taking into account material removal effects. Experimental data and simulations indicate that SRP raw data are relatively insensitive to probe penetration for source/drain implantation and diffusion profiles. Dependent on the structure involved, however, the SRP depth scale must be corrected for an offset due to probe penetration." @default.
- W2007508056 created "2016-06-24" @default.
- W2007508056 creator A5049003157 @default.
- W2007508056 creator A5056463388 @default.
- W2007508056 creator A5088335671 @default.
- W2007508056 date "2002-01-01" @default.
- W2007508056 modified "2023-10-14" @default.
- W2007508056 title "Impact of probe penetration on the electrical characterization of sub-50 nm profiles" @default.
- W2007508056 cites W1921773051 @default.
- W2007508056 cites W1964340754 @default.
- W2007508056 cites W1998678647 @default.
- W2007508056 cites W2002013672 @default.
- W2007508056 cites W2058072636 @default.
- W2007508056 cites W2067194431 @default.
- W2007508056 cites W2072699969 @default.
- W2007508056 cites W2094979447 @default.
- W2007508056 cites W2106282549 @default.
- W2007508056 cites W4251915324 @default.
- W2007508056 doi "https://doi.org/10.1116/1.1432965" @default.
- W2007508056 hasPublicationYear "2002" @default.
- W2007508056 type Work @default.
- W2007508056 sameAs 2007508056 @default.
- W2007508056 citedByCount "24" @default.
- W2007508056 countsByYear W20075080562012 @default.
- W2007508056 countsByYear W20075080562014 @default.
- W2007508056 countsByYear W20075080562018 @default.
- W2007508056 countsByYear W20075080562021 @default.
- W2007508056 crossrefType "journal-article" @default.
- W2007508056 hasAuthorship W2007508056A5049003157 @default.
- W2007508056 hasAuthorship W2007508056A5056463388 @default.
- W2007508056 hasAuthorship W2007508056A5088335671 @default.
- W2007508056 hasConcept C113196181 @default.
- W2007508056 hasConcept C120665830 @default.
- W2007508056 hasConcept C121332964 @default.
- W2007508056 hasConcept C127413603 @default.
- W2007508056 hasConcept C145148216 @default.
- W2007508056 hasConcept C159985019 @default.
- W2007508056 hasConcept C171250308 @default.
- W2007508056 hasConcept C178790620 @default.
- W2007508056 hasConcept C185592680 @default.
- W2007508056 hasConcept C191952053 @default.
- W2007508056 hasConcept C192562407 @default.
- W2007508056 hasConcept C193493375 @default.
- W2007508056 hasConcept C207521374 @default.
- W2007508056 hasConcept C2779227376 @default.
- W2007508056 hasConcept C42475967 @default.
- W2007508056 hasConcept C43617362 @default.
- W2007508056 hasConcept C49040817 @default.
- W2007508056 hasConcept C544956773 @default.
- W2007508056 hasConcept C57863236 @default.
- W2007508056 hasConcept C66825105 @default.
- W2007508056 hasConcept C71987851 @default.
- W2007508056 hasConcept C77671233 @default.
- W2007508056 hasConcept C80107235 @default.
- W2007508056 hasConcept C94857076 @default.
- W2007508056 hasConceptScore W2007508056C113196181 @default.
- W2007508056 hasConceptScore W2007508056C120665830 @default.
- W2007508056 hasConceptScore W2007508056C121332964 @default.
- W2007508056 hasConceptScore W2007508056C127413603 @default.
- W2007508056 hasConceptScore W2007508056C145148216 @default.
- W2007508056 hasConceptScore W2007508056C159985019 @default.
- W2007508056 hasConceptScore W2007508056C171250308 @default.
- W2007508056 hasConceptScore W2007508056C178790620 @default.
- W2007508056 hasConceptScore W2007508056C185592680 @default.
- W2007508056 hasConceptScore W2007508056C191952053 @default.
- W2007508056 hasConceptScore W2007508056C192562407 @default.
- W2007508056 hasConceptScore W2007508056C193493375 @default.
- W2007508056 hasConceptScore W2007508056C207521374 @default.
- W2007508056 hasConceptScore W2007508056C2779227376 @default.
- W2007508056 hasConceptScore W2007508056C42475967 @default.
- W2007508056 hasConceptScore W2007508056C43617362 @default.
- W2007508056 hasConceptScore W2007508056C49040817 @default.
- W2007508056 hasConceptScore W2007508056C544956773 @default.
- W2007508056 hasConceptScore W2007508056C57863236 @default.
- W2007508056 hasConceptScore W2007508056C66825105 @default.
- W2007508056 hasConceptScore W2007508056C71987851 @default.
- W2007508056 hasConceptScore W2007508056C77671233 @default.
- W2007508056 hasConceptScore W2007508056C80107235 @default.
- W2007508056 hasConceptScore W2007508056C94857076 @default.
- W2007508056 hasIssue "1" @default.
- W2007508056 hasLocation W20075080561 @default.
- W2007508056 hasOpenAccess W2007508056 @default.
- W2007508056 hasPrimaryLocation W20075080561 @default.
- W2007508056 hasRelatedWork W2010053156 @default.
- W2007508056 hasRelatedWork W2019550975 @default.
- W2007508056 hasRelatedWork W2028994635 @default.
- W2007508056 hasRelatedWork W2035815550 @default.
- W2007508056 hasRelatedWork W2056362178 @default.
- W2007508056 hasRelatedWork W2057221880 @default.
- W2007508056 hasRelatedWork W2082713480 @default.
- W2007508056 hasRelatedWork W2092596997 @default.
- W2007508056 hasRelatedWork W2114183123 @default.
- W2007508056 hasRelatedWork W2969374918 @default.
- W2007508056 hasVolume "20" @default.
- W2007508056 isParatext "false" @default.
- W2007508056 isRetracted "false" @default.
- W2007508056 magId "2007508056" @default.
- W2007508056 workType "article" @default.