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- W2007526107 abstract "A highly efficient nano-periodical blazed grating is fully theoretically investigated for outcoupling extreme ultraviolet (XUV) radiation. Rigorous coupled-wave analysis (RCWA) with the S matrix method is employed to optimize the parameters of the grating. The grating is designed to be etched on the top layers of an IR reflector, performing as a highly reflective mirror for IR light and a highly efficient outcoupler for XUV. The diffraction efficiency of the −1 order of this XUV outcoupler is greater than 20% in the range near 60 nm, which allows high-resolution spectroscopy of the 1s–2s transition in He+ at around 60 nm with extreme precision. The theoretical calculations are consistent with the experimental data." @default.
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- W2007526107 date "2013-06-11" @default.
- W2007526107 modified "2023-09-25" @default.
- W2007526107 title "Theoretical investigation of a highly efficient nanograting for outcoupling XUV" @default.
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- W2007526107 doi "https://doi.org/10.1088/1612-2011/10/7/075302" @default.
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