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- W2007551779 abstract "We report on a technique to determine the sheet resistance of induced inversion layers on silicon substrates, using a modified transmission line method (TLM). Many dielectric films used to passivated silicon wafer surfaces tend to have a moderate to high density of fixed charge in the bulk of the films or at the silicon-dielectric interfaces. Based on the polarity and density of the fixed charge, and the underlying doping in the silicon, accumulation or depletion of majority carriers may occur in the silicon. A high enough density of fixed charge in the dielectric film can lead to the formation of a thin inversion layer at the silicon surface. This phenomenon has been used to make induced emitters in metal-insulator-semiconductor (MIS) solar cells. The sheet resistance of such induced emitters can not be measured by the conventional 4-probe technique because the induced emitter gets disrupted under the probe tips. As such, a modified TLM technique must be used to characterize the induced emitter. We fabricated TLM structures by forming metal contacts on heavily p-type diffused fingers at various separations on an n-type silicon substrate. Al 2 O 3 film with a high negative fixed charge density was deposited using atomic layer deposition (ALD) between these fingers. A measurement of the resistance between fingers as a function of separation allowed the determination of sheet resistance of the induced inversion layer. We measured a sheet resistance of 15kΩ/sq for a fixed charge density of about 6.6×1012 per cm2. These results are in good agreement with our modeled values as well as with numbers reported in the literature previously." @default.
- W2007551779 created "2016-06-24" @default.
- W2007551779 creator A5015441055 @default.
- W2007551779 creator A5021799893 @default.
- W2007551779 creator A5027903572 @default.
- W2007551779 creator A5072250400 @default.
- W2007551779 date "2011-06-01" @default.
- W2007551779 modified "2023-09-25" @default.
- W2007551779 title "Direct measurement of induced inversion layer sheet resistance by transmission line method" @default.
- W2007551779 cites W2048166183 @default.
- W2007551779 cites W2112110470 @default.
- W2007551779 cites W2118161878 @default.
- W2007551779 cites W2148582071 @default.
- W2007551779 cites W2524490654 @default.
- W2007551779 cites W2990463952 @default.
- W2007551779 doi "https://doi.org/10.1109/pvsc.2011.6186561" @default.
- W2007551779 hasPublicationYear "2011" @default.
- W2007551779 type Work @default.
- W2007551779 sameAs 2007551779 @default.
- W2007551779 citedByCount "1" @default.
- W2007551779 countsByYear W20075517792013 @default.
- W2007551779 crossrefType "proceedings-article" @default.
- W2007551779 hasAuthorship W2007551779A5015441055 @default.
- W2007551779 hasAuthorship W2007551779A5021799893 @default.
- W2007551779 hasAuthorship W2007551779A5027903572 @default.
- W2007551779 hasAuthorship W2007551779A5072250400 @default.
- W2007551779 hasConcept C111368507 @default.
- W2007551779 hasConcept C127313418 @default.
- W2007551779 hasConcept C133386390 @default.
- W2007551779 hasConcept C160671074 @default.
- W2007551779 hasConcept C171250308 @default.
- W2007551779 hasConcept C192562407 @default.
- W2007551779 hasConcept C207521374 @default.
- W2007551779 hasConcept C2777289219 @default.
- W2007551779 hasConcept C2779227376 @default.
- W2007551779 hasConcept C46918542 @default.
- W2007551779 hasConcept C49040817 @default.
- W2007551779 hasConcept C53143962 @default.
- W2007551779 hasConcept C544956773 @default.
- W2007551779 hasConcept C57863236 @default.
- W2007551779 hasConcept C66825105 @default.
- W2007551779 hasConcept C69544855 @default.
- W2007551779 hasConceptScore W2007551779C111368507 @default.
- W2007551779 hasConceptScore W2007551779C127313418 @default.
- W2007551779 hasConceptScore W2007551779C133386390 @default.
- W2007551779 hasConceptScore W2007551779C160671074 @default.
- W2007551779 hasConceptScore W2007551779C171250308 @default.
- W2007551779 hasConceptScore W2007551779C192562407 @default.
- W2007551779 hasConceptScore W2007551779C207521374 @default.
- W2007551779 hasConceptScore W2007551779C2777289219 @default.
- W2007551779 hasConceptScore W2007551779C2779227376 @default.
- W2007551779 hasConceptScore W2007551779C46918542 @default.
- W2007551779 hasConceptScore W2007551779C49040817 @default.
- W2007551779 hasConceptScore W2007551779C53143962 @default.
- W2007551779 hasConceptScore W2007551779C544956773 @default.
- W2007551779 hasConceptScore W2007551779C57863236 @default.
- W2007551779 hasConceptScore W2007551779C66825105 @default.
- W2007551779 hasConceptScore W2007551779C69544855 @default.
- W2007551779 hasLocation W20075517791 @default.
- W2007551779 hasOpenAccess W2007551779 @default.
- W2007551779 hasPrimaryLocation W20075517791 @default.
- W2007551779 hasRelatedWork W1506723986 @default.
- W2007551779 hasRelatedWork W1997380413 @default.
- W2007551779 hasRelatedWork W2000653333 @default.
- W2007551779 hasRelatedWork W2038553555 @default.
- W2007551779 hasRelatedWork W2045981902 @default.
- W2007551779 hasRelatedWork W2052567054 @default.
- W2007551779 hasRelatedWork W2058184765 @default.
- W2007551779 hasRelatedWork W2064120049 @default.
- W2007551779 hasRelatedWork W2065861624 @default.
- W2007551779 hasRelatedWork W2066424959 @default.
- W2007551779 hasRelatedWork W2067408897 @default.
- W2007551779 hasRelatedWork W2074728854 @default.
- W2007551779 hasRelatedWork W2078891375 @default.
- W2007551779 hasRelatedWork W2085796811 @default.
- W2007551779 hasRelatedWork W2090795657 @default.
- W2007551779 hasRelatedWork W2094196735 @default.
- W2007551779 hasRelatedWork W2153915165 @default.
- W2007551779 hasRelatedWork W2338178895 @default.
- W2007551779 hasRelatedWork W2944396781 @default.
- W2007551779 hasRelatedWork W2997537772 @default.
- W2007551779 isParatext "false" @default.
- W2007551779 isRetracted "false" @default.
- W2007551779 magId "2007551779" @default.
- W2007551779 workType "article" @default.