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- W2007659756 abstract "In this paper we have investigated the long-term reliability of TiN/HfSixOy/TiN Metal–Insulator–Metal (MIM) capacitors by using constant voltage stress (CVS) and constant current stress (CCS). No significant increase in leakage current was observed as a function of stress time. On the other hand, stress induced capacitance changes were observed due to change in quadratic and liner coefficients of permittivity nonlinearities. Stress-induced oxygen vacancy related defect formation believed to be the cause of this shift in permittivity." @default.
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- W2007659756 date "2013-02-01" @default.
- W2007659756 modified "2023-09-27" @default.
- W2007659756 title "Voltage and current stress induced variations in TiN/HfSixOy/TiN MIM capacitors" @default.
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- W2007659756 doi "https://doi.org/10.1016/j.microrel.2012.08.020" @default.
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