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- W2007660057 endingPage "159" @default.
- W2007660057 startingPage "157" @default.
- W2007660057 abstract "The electrical characteristics of HfO/sub 2/ pMOSFETs prepared by B/sub 2/H/sub 6/ plasma doping and excimer laser annealing were investigated. Various metal gate electrodes were evaluated to protect the high-/spl kappa/ oxide during laser irradiation. Although the aluminum gate electrode showed superior reflectivity to the laser, the equivalent oxide thickness was increased due to the interaction between aluminum and HfO/sub 2/, which resulted in reduced capacitance. In contrast, the Al-TaN stacked gate showed good reflectivity up to laser energy of 500 mJ/cm/sup 2/ and improved capacitance was obtained compared with the Al gate. For the first time, the electrical characteristics of a HfO/sub 2/ pMOSFET with an Al-TaN gate fabricated by plasma doping and excimer laser annealing were demonstrated. It was also demonstrated that plasma doping and excimer laser annealing combined with a metal gate could be applied for high-/spl kappa/ oxide MOSFET fabrication." @default.
- W2007660057 created "2016-06-24" @default.
- W2007660057 creator A5000027424 @default.
- W2007660057 creator A5002094352 @default.
- W2007660057 creator A5006254584 @default.
- W2007660057 creator A5074442084 @default.
- W2007660057 date "2005-03-01" @default.
- W2007660057 modified "2023-09-30" @default.
- W2007660057 title "Characteristics of HfO/sub 2/ pMOSFET prepared by B/sub 2/H/sub 6/ plasma doping and KrF excimer laser annealing" @default.
- W2007660057 cites W1543078141 @default.
- W2007660057 cites W1572253984 @default.
- W2007660057 cites W1971601819 @default.
- W2007660057 cites W1982298809 @default.
- W2007660057 cites W2008449124 @default.
- W2007660057 cites W2076614108 @default.
- W2007660057 cites W2114373806 @default.
- W2007660057 cites W2118197415 @default.
- W2007660057 cites W2157881933 @default.
- W2007660057 cites W2168923320 @default.
- W2007660057 doi "https://doi.org/10.1109/led.2004.842438" @default.
- W2007660057 hasPublicationYear "2005" @default.
- W2007660057 type Work @default.
- W2007660057 sameAs 2007660057 @default.
- W2007660057 citedByCount "8" @default.
- W2007660057 crossrefType "journal-article" @default.
- W2007660057 hasAuthorship W2007660057A5000027424 @default.
- W2007660057 hasAuthorship W2007660057A5002094352 @default.
- W2007660057 hasAuthorship W2007660057A5006254584 @default.
- W2007660057 hasAuthorship W2007660057A5074442084 @default.
- W2007660057 hasConcept C113196181 @default.
- W2007660057 hasConcept C119599485 @default.
- W2007660057 hasConcept C120665830 @default.
- W2007660057 hasConcept C121332964 @default.
- W2007660057 hasConcept C127413603 @default.
- W2007660057 hasConcept C147789679 @default.
- W2007660057 hasConcept C165801399 @default.
- W2007660057 hasConcept C172385210 @default.
- W2007660057 hasConcept C17525397 @default.
- W2007660057 hasConcept C185592680 @default.
- W2007660057 hasConcept C191897082 @default.
- W2007660057 hasConcept C192562407 @default.
- W2007660057 hasConcept C2361726 @default.
- W2007660057 hasConcept C2777855556 @default.
- W2007660057 hasConcept C2778413303 @default.
- W2007660057 hasConcept C2780477314 @default.
- W2007660057 hasConcept C30066665 @default.
- W2007660057 hasConcept C43617362 @default.
- W2007660057 hasConcept C49040817 @default.
- W2007660057 hasConcept C51140833 @default.
- W2007660057 hasConcept C520434653 @default.
- W2007660057 hasConcept C57863236 @default.
- W2007660057 hasConceptScore W2007660057C113196181 @default.
- W2007660057 hasConceptScore W2007660057C119599485 @default.
- W2007660057 hasConceptScore W2007660057C120665830 @default.
- W2007660057 hasConceptScore W2007660057C121332964 @default.
- W2007660057 hasConceptScore W2007660057C127413603 @default.
- W2007660057 hasConceptScore W2007660057C147789679 @default.
- W2007660057 hasConceptScore W2007660057C165801399 @default.
- W2007660057 hasConceptScore W2007660057C172385210 @default.
- W2007660057 hasConceptScore W2007660057C17525397 @default.
- W2007660057 hasConceptScore W2007660057C185592680 @default.
- W2007660057 hasConceptScore W2007660057C191897082 @default.
- W2007660057 hasConceptScore W2007660057C192562407 @default.
- W2007660057 hasConceptScore W2007660057C2361726 @default.
- W2007660057 hasConceptScore W2007660057C2777855556 @default.
- W2007660057 hasConceptScore W2007660057C2778413303 @default.
- W2007660057 hasConceptScore W2007660057C2780477314 @default.
- W2007660057 hasConceptScore W2007660057C30066665 @default.
- W2007660057 hasConceptScore W2007660057C43617362 @default.
- W2007660057 hasConceptScore W2007660057C49040817 @default.
- W2007660057 hasConceptScore W2007660057C51140833 @default.
- W2007660057 hasConceptScore W2007660057C520434653 @default.
- W2007660057 hasConceptScore W2007660057C57863236 @default.
- W2007660057 hasIssue "3" @default.
- W2007660057 hasLocation W20076600571 @default.
- W2007660057 hasOpenAccess W2007660057 @default.
- W2007660057 hasPrimaryLocation W20076600571 @default.
- W2007660057 hasRelatedWork W2014320329 @default.
- W2007660057 hasRelatedWork W2064661788 @default.
- W2007660057 hasRelatedWork W2120984927 @default.
- W2007660057 hasRelatedWork W2149426302 @default.
- W2007660057 hasRelatedWork W2152195783 @default.
- W2007660057 hasRelatedWork W2166227906 @default.
- W2007660057 hasRelatedWork W2532712859 @default.
- W2007660057 hasRelatedWork W2548865441 @default.
- W2007660057 hasRelatedWork W3016546013 @default.
- W2007660057 hasRelatedWork W4361791941 @default.
- W2007660057 hasVolume "26" @default.
- W2007660057 isParatext "false" @default.
- W2007660057 isRetracted "false" @default.
- W2007660057 magId "2007660057" @default.
- W2007660057 workType "article" @default.