FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2007675194> ?p ?o ?g. }

• W2007675194 endingPage "D603" @default.
• W2007675194 startingPage "D603" @default.
• W2007675194 abstract "We have successfully demonstrated the patterning of Nafion membranes for multiple electrochemical applications using electron beam lithography and dry etching strategies. The fabricated structures include arrays of lines and circles with features as small as 300 nm. The fidelity of the patterned profiles showed a dependency on resist baking temperature, masking layer thickness, and feature size. The propagation of cracks on a patterned Nafion substrate due to relaxation of stresses caused by the vacuum and thermal processing cycles was mitigated by keeping electron beam resist baking temperatures between 70 and 80°C or by increasing the thickness of the masking layer. The etching of Nafion was quantified for oxygen and trifluoromethane gas plasmas using germanium as etching mask. Nafion etch rate increased with power for both gases, but showed little dependence on temperature and pressure in the oxygen plasma. Aspect ratio dependent etching was also observed during fabrication, particularly for feature sizes less than 2 μm." @default.
• W2007675194 created "2016-06-24" @default.
• W2007675194 creator A5035515824 @default.
• W2007675194 creator A5060653534 @default.
• W2007675194 date "2011-01-01" @default.
• W2007675194 modified "2023-10-16" @default.
• W2007675194 title "Electron Beam Assisted Patterning and Dry Etching of Nafion Membranes" @default.
• W2007675194 cites W1834949060 @default.
• W2007675194 cites W1971595071 @default.
• W2007675194 cites W1974499342 @default.
• W2007675194 cites W1975092722 @default.
• W2007675194 cites W1979500633 @default.
• W2007675194 cites W1986535314 @default.
• W2007675194 cites W1997957020 @default.
• W2007675194 cites W2020094150 @default.
• W2007675194 cites W2048662770 @default.
• W2007675194 cites W2050443743 @default.
• W2007675194 cites W2052440319 @default.
• W2007675194 cites W2054994736 @default.
• W2007675194 cites W2059563903 @default.
• W2007675194 cites W2060041518 @default.
• W2007675194 cites W2063567026 @default.
• W2007675194 cites W2064627459 @default.
• W2007675194 cites W2067247198 @default.
• W2007675194 cites W2070752296 @default.
• W2007675194 cites W2080592273 @default.
• W2007675194 cites W2093969449 @default.
• W2007675194 cites W2094255943 @default.
• W2007675194 cites W2094818654 @default.
• W2007675194 cites W2109381396 @default.
• W2007675194 cites W2113642911 @default.
• W2007675194 cites W2120667538 @default.
• W2007675194 cites W2160682533 @default.
• W2007675194 cites W2487708677 @default.
• W2007675194 cites W4232246540 @default.
• W2007675194 cites W4234795128 @default.
• W2007675194 cites W4254107894 @default.
• W2007675194 doi "https://doi.org/10.1149/1.3615938" @default.
• W2007675194 hasPublicationYear "2011" @default.
• W2007675194 type Work @default.
• W2007675194 sameAs 2007675194 @default.
• W2007675194 citedByCount "31" @default.
• W2007675194 countsByYear W20076751942012 @default.
• W2007675194 countsByYear W20076751942013 @default.
• W2007675194 countsByYear W20076751942014 @default.
• W2007675194 countsByYear W20076751942015 @default.
• W2007675194 countsByYear W20076751942017 @default.
• W2007675194 countsByYear W20076751942018 @default.
• W2007675194 countsByYear W20076751942019 @default.
• W2007675194 countsByYear W20076751942020 @default.
• W2007675194 countsByYear W20076751942021 @default.
• W2007675194 countsByYear W20076751942022 @default.
• W2007675194 countsByYear W20076751942023 @default.
• W2007675194 crossrefType "journal-article" @default.
• W2007675194 hasAuthorship W2007675194A5035515824 @default.
• W2007675194 hasAuthorship W2007675194A5060653534 @default.
• W2007675194 hasConcept C100460472 @default.
• W2007675194 hasConcept C107187091 @default.
• W2007675194 hasConcept C111368507 @default.
• W2007675194 hasConcept C113196181 @default.
• W2007675194 hasConcept C127313418 @default.
• W2007675194 hasConcept C1291036 @default.
• W2007675194 hasConcept C130472188 @default.
• W2007675194 hasConcept C134406635 @default.
• W2007675194 hasConcept C136525101 @default.
• W2007675194 hasConcept C142362112 @default.
• W2007675194 hasConcept C142724271 @default.
• W2007675194 hasConcept C147789679 @default.
• W2007675194 hasConcept C153349607 @default.
• W2007675194 hasConcept C159985019 @default.
• W2007675194 hasConcept C17525397 @default.
• W2007675194 hasConcept C185592680 @default.
• W2007675194 hasConcept C192562407 @default.
• W2007675194 hasConcept C200274948 @default.
• W2007675194 hasConcept C204223013 @default.
• W2007675194 hasConcept C204787440 @default.
• W2007675194 hasConcept C2777289219 @default.
• W2007675194 hasConcept C2777402240 @default.
• W2007675194 hasConcept C2778665636 @default.
• W2007675194 hasConcept C2779227376 @default.
• W2007675194 hasConcept C41625074 @default.
• W2007675194 hasConcept C43617362 @default.
• W2007675194 hasConcept C49040817 @default.
• W2007675194 hasConcept C52859227 @default.
• W2007675194 hasConcept C53524968 @default.
• W2007675194 hasConcept C55493867 @default.
• W2007675194 hasConcept C71924100 @default.
• W2007675194 hasConceptScore W2007675194C100460472 @default.
• W2007675194 hasConceptScore W2007675194C107187091 @default.
• W2007675194 hasConceptScore W2007675194C111368507 @default.
• W2007675194 hasConceptScore W2007675194C113196181 @default.
• W2007675194 hasConceptScore W2007675194C127313418 @default.
• W2007675194 hasConceptScore W2007675194C1291036 @default.
• W2007675194 hasConceptScore W2007675194C130472188 @default.
• W2007675194 hasConceptScore W2007675194C134406635 @default.
• W2007675194 hasConceptScore W2007675194C136525101 @default.
• W2007675194 hasConceptScore W2007675194C142362112 @default.
• W2007675194 hasConceptScore W2007675194C142724271 @default.

• next