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- W2007693412 abstract "Aiming for bearings of ultra-precision, infinite stiffness, high vibration damping capability and new functions (axis positioning and dynamic stiffness control), the authors present in this paper an 'active air journal bearing' (AAJB) capable of precisely controlling the radial position of its axis. The AAJB utilizes non-contact sensors to detect the radial position of the axis, non-contact actuators (movable air pads driven by piezoelectric actuators) to support and drive the axis, and a controller to regulate the whole system. In the paper, the basic configuration of the AAJB as well as its dynamic model and the controller design is shown. The stiffness and the positioning characteristics of the AAJB are examined and a method of compensating motion errors caused by profile error of the axis and bearing parts is presented. By experiments, it is shown that the AAJB has an almost infinite static stiffness and an increased damping capability, a band-width of more than 1 kHz and an absolute rotary motion accuracy of better than 21 nm with the axis rotating at 750 rpm." @default.
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- W2007693412 date "1992-04-01" @default.
- W2007693412 modified "2023-10-14" @default.
- W2007693412 title "An active air journal bearing" @default.
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- W2007693412 doi "https://doi.org/10.1088/0957-4484/3/2/006" @default.
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