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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2007757411> ?p ?o ?g. }

• W2007757411 abstract "Abstract The etching behaviour of silicon in chlorine atmosphere assisted by laser radiation at 248 nm has been studied as a function of laser fluence and gas pressure. Different process regions have been determined. The crystalline quality and the surface morphology and roughness have been investigated by transmission electron microscopy and secondary ion mass spectroscopy." @default.
• W2007757411 created "2016-06-24" @default.
• W2007757411 creator A5001167141 @default.
• W2007757411 creator A5005888732 @default.
• W2007757411 creator A5089283234 @default.
• W2007757411 date "1995-02-01" @default.
• W2007757411 modified "2023-10-07" @default.
• W2007757411 title "Excimer-laser-induced etching of silicon in chlorine atmosphere at a wavelength of 248 nm" @default.
• W2007757411 cites W1552901919 @default.
• W2007757411 cites W1975929227 @default.
• W2007757411 cites W1977419538 @default.
• W2007757411 cites W1986966687 @default.
• W2007757411 cites W2011747856 @default.
• W2007757411 cites W2015322558 @default.
• W2007757411 cites W2019359936 @default.
• W2007757411 cites W2035406661 @default.
• W2007757411 cites W2042469719 @default.
• W2007757411 cites W2049405627 @default.
• W2007757411 cites W2065950352 @default.
• W2007757411 cites W2071496045 @default.
• W2007757411 cites W2085215088 @default.
• W2007757411 doi "https://doi.org/10.1016/0169-4332(94)00440-4" @default.
• W2007757411 hasPublicationYear "1995" @default.
• W2007757411 type Work @default.
• W2007757411 sameAs 2007757411 @default.
• W2007757411 citedByCount "5" @default.
• W2007757411 countsByYear W20077574112016 @default.
• W2007757411 countsByYear W20077574112019 @default.
• W2007757411 crossrefType "journal-article" @default.
• W2007757411 hasAuthorship W2007757411A5001167141 @default.
• W2007757411 hasAuthorship W2007757411A5005888732 @default.
• W2007757411 hasAuthorship W2007757411A5089283234 @default.
• W2007757411 hasConcept C100460472 @default.
• W2007757411 hasConcept C113196181 @default.
• W2007757411 hasConcept C120665830 @default.
• W2007757411 hasConcept C121332964 @default.
• W2007757411 hasConcept C130472188 @default.
• W2007757411 hasConcept C146088050 @default.
• W2007757411 hasConcept C159985019 @default.
• W2007757411 hasConcept C171250308 @default.
• W2007757411 hasConcept C185592680 @default.
• W2007757411 hasConcept C191897082 @default.
• W2007757411 hasConcept C192562407 @default.
• W2007757411 hasConcept C22078206 @default.
• W2007757411 hasConcept C26771246 @default.
• W2007757411 hasConcept C2779227376 @default.
• W2007757411 hasConcept C2780477314 @default.
• W2007757411 hasConcept C43617362 @default.
• W2007757411 hasConcept C49040817 @default.
• W2007757411 hasConcept C505241676 @default.
• W2007757411 hasConcept C520434653 @default.
• W2007757411 hasConcept C544956773 @default.
• W2007757411 hasConcept C65440619 @default.
• W2007757411 hasConcept C97355855 @default.
• W2007757411 hasConceptScore W2007757411C100460472 @default.
• W2007757411 hasConceptScore W2007757411C113196181 @default.
• W2007757411 hasConceptScore W2007757411C120665830 @default.
• W2007757411 hasConceptScore W2007757411C121332964 @default.
• W2007757411 hasConceptScore W2007757411C130472188 @default.
• W2007757411 hasConceptScore W2007757411C146088050 @default.
• W2007757411 hasConceptScore W2007757411C159985019 @default.
• W2007757411 hasConceptScore W2007757411C171250308 @default.
• W2007757411 hasConceptScore W2007757411C185592680 @default.
• W2007757411 hasConceptScore W2007757411C191897082 @default.
• W2007757411 hasConceptScore W2007757411C192562407 @default.
• W2007757411 hasConceptScore W2007757411C22078206 @default.
• W2007757411 hasConceptScore W2007757411C26771246 @default.
• W2007757411 hasConceptScore W2007757411C2779227376 @default.
• W2007757411 hasConceptScore W2007757411C2780477314 @default.
• W2007757411 hasConceptScore W2007757411C43617362 @default.
• W2007757411 hasConceptScore W2007757411C49040817 @default.
• W2007757411 hasConceptScore W2007757411C505241676 @default.
• W2007757411 hasConceptScore W2007757411C520434653 @default.
• W2007757411 hasConceptScore W2007757411C544956773 @default.
• W2007757411 hasConceptScore W2007757411C65440619 @default.
• W2007757411 hasConceptScore W2007757411C97355855 @default.
• W2007757411 hasLocation W20077574111 @default.
• W2007757411 hasOpenAccess W2007757411 @default.
• W2007757411 hasPrimaryLocation W20077574111 @default.
• W2007757411 hasRelatedWork W1968097362 @default.
• W2007757411 hasRelatedWork W1971669891 @default.
• W2007757411 hasRelatedWork W1984654107 @default.
• W2007757411 hasRelatedWork W1985576249 @default.
• W2007757411 hasRelatedWork W1996874180 @default.
• W2007757411 hasRelatedWork W1998783743 @default.
• W2007757411 hasRelatedWork W1998954261 @default.
• W2007757411 hasRelatedWork W2008236465 @default.
• W2007757411 hasRelatedWork W2009545536 @default.
• W2007757411 hasRelatedWork W2024696591 @default.
• W2007757411 hasRelatedWork W2038023196 @default.
• W2007757411 hasRelatedWork W2048488955 @default.
• W2007757411 hasRelatedWork W2049279148 @default.
• W2007757411 hasRelatedWork W2060674781 @default.
• W2007757411 hasRelatedWork W2068831235 @default.
• W2007757411 hasRelatedWork W2074442296 @default.
• W2007757411 hasRelatedWork W2078983587 @default.
• W2007757411 hasRelatedWork W2090025749 @default.
• W2007757411 hasRelatedWork W2123394609 @default.
• W2007757411 hasRelatedWork W2330845958 @default.
• W2007757411 isParatext "false" @default.

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