FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2007808819> ?p ?o ?g. }

• W2007808819 endingPage "H612" @default.
• W2007808819 startingPage "H612" @default.
• W2007808819 abstract "Deep Level Transient Spectroscopy (DLTS) has been applied to Metal-Oxide-Semiconductor (MOS) capacitors fabricated on crystalline silicon n- and p-type substrates, with a SiO2 or a SiO2/SiNx passivation stack, covered by an Al gate. It is shown that similar interface state distributions are obtained in both cases, from which it is concluded that the SiNx deposition does not degrade the interface. It is also shown that a rather large density of dangling bond defects is present at the Si/SiO2 interface, which is related to the absence of a post metallization forming gas annealing." @default.
• W2007808819 created "2016-06-24" @default.
• W2007808819 creator A5014975821 @default.
• W2007808819 creator A5017852429 @default.
• W2007808819 creator A5030275438 @default.
• W2007808819 creator A5046174818 @default.
• W2007808819 creator A5055633263 @default.
• W2007808819 creator A5073348744 @default.
• W2007808819 date "2011-01-01" @default.
• W2007808819 modified "2023-10-18" @default.
• W2007808819 title "A DLTS Study of SiO2 and SiO2/SiNx Surface Passivation of Silicon" @default.
• W2007808819 cites W1963819968 @default.
• W2007808819 cites W1972409839 @default.
• W2007808819 cites W1981486872 @default.
• W2007808819 cites W1983840242 @default.
• W2007808819 cites W1985472157 @default.
• W2007808819 cites W1989986644 @default.
• W2007808819 cites W1992938980 @default.
• W2007808819 cites W1996547611 @default.
• W2007808819 cites W1999499650 @default.
• W2007808819 cites W2000000543 @default.
• W2007808819 cites W2006784916 @default.
• W2007808819 cites W2023609276 @default.
• W2007808819 cites W2024971765 @default.
• W2007808819 cites W2026154902 @default.
• W2007808819 cites W2026590010 @default.
• W2007808819 cites W2026655406 @default.
• W2007808819 cites W2035270798 @default.
• W2007808819 cites W2036249931 @default.
• W2007808819 cites W2038517839 @default.
• W2007808819 cites W2038976971 @default.
• W2007808819 cites W2041003801 @default.
• W2007808819 cites W2055641155 @default.
• W2007808819 cites W2059596402 @default.
• W2007808819 cites W2060573139 @default.
• W2007808819 cites W2064072391 @default.
• W2007808819 cites W2065213983 @default.
• W2007808819 cites W2076935039 @default.
• W2007808819 cites W2079739484 @default.
• W2007808819 cites W2081989773 @default.
• W2007808819 cites W2083329804 @default.
• W2007808819 cites W2096724241 @default.
• W2007808819 cites W2102157882 @default.
• W2007808819 cites W2107573503 @default.
• W2007808819 cites W2143400671 @default.
• W2007808819 cites W2148424982 @default.
• W2007808819 cites W2153915165 @default.
• W2007808819 cites W2160724514 @default.
• W2007808819 cites W2164442411 @default.
• W2007808819 doi "https://doi.org/10.1149/1.3568952" @default.
• W2007808819 hasPublicationYear "2011" @default.
• W2007808819 type Work @default.
• W2007808819 sameAs 2007808819 @default.
• W2007808819 citedByCount "20" @default.
• W2007808819 countsByYear W20078088192012 @default.
• W2007808819 countsByYear W20078088192013 @default.
• W2007808819 countsByYear W20078088192014 @default.
• W2007808819 countsByYear W20078088192015 @default.
• W2007808819 countsByYear W20078088192016 @default.
• W2007808819 countsByYear W20078088192017 @default.
• W2007808819 countsByYear W20078088192018 @default.
• W2007808819 countsByYear W20078088192020 @default.
• W2007808819 countsByYear W20078088192023 @default.
• W2007808819 crossrefType "journal-article" @default.
• W2007808819 hasAuthorship W2007808819A5014975821 @default.
• W2007808819 hasAuthorship W2007808819A5017852429 @default.
• W2007808819 hasAuthorship W2007808819A5030275438 @default.
• W2007808819 hasAuthorship W2007808819A5046174818 @default.
• W2007808819 hasAuthorship W2007808819A5055633263 @default.
• W2007808819 hasAuthorship W2007808819A5073348744 @default.
• W2007808819 hasBestOaLocation W20078088191 @default.
• W2007808819 hasConcept C108225325 @default.
• W2007808819 hasConcept C119599485 @default.
• W2007808819 hasConcept C127413603 @default.
• W2007808819 hasConcept C165801399 @default.
• W2007808819 hasConcept C171250308 @default.
• W2007808819 hasConcept C191897082 @default.
• W2007808819 hasConcept C192562407 @default.
• W2007808819 hasConcept C2777855556 @default.
• W2007808819 hasConcept C2779227376 @default.
• W2007808819 hasConcept C2779851234 @default.
• W2007808819 hasConcept C2780080961 @default.
• W2007808819 hasConcept C32424582 @default.
• W2007808819 hasConcept C33574316 @default.
• W2007808819 hasConcept C49040817 @default.
• W2007808819 hasConcept C52192207 @default.
• W2007808819 hasConcept C544153396 @default.
• W2007808819 hasConcept C544956773 @default.
• W2007808819 hasConceptScore W2007808819C108225325 @default.
• W2007808819 hasConceptScore W2007808819C119599485 @default.
• W2007808819 hasConceptScore W2007808819C127413603 @default.
• W2007808819 hasConceptScore W2007808819C165801399 @default.
• W2007808819 hasConceptScore W2007808819C171250308 @default.
• W2007808819 hasConceptScore W2007808819C191897082 @default.
• W2007808819 hasConceptScore W2007808819C192562407 @default.
• W2007808819 hasConceptScore W2007808819C2777855556 @default.
• W2007808819 hasConceptScore W2007808819C2779227376 @default.
• W2007808819 hasConceptScore W2007808819C2779851234 @default.

• next