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- W2007881707 endingPage "270" @default.
- W2007881707 startingPage "264" @default.
- W2007881707 abstract "The paper deals with microphysical modelling the low pressure reactive r.f. plasmas which are widely used in plasma technology particularly for etching of thin solid films in microelectronic pattern replication and plasma enhanced deposition of solid films. To model these types of plasma processing in addition to the complex discharge physics the production of chemically active species by electron impact reactions with the feed gas, the gas phase reactions and the transport of active species to the discharge surface as well as the surface reactions must be adequately described. The objective of the paper is to present the basic ideas which are applied when modelling the mentioned processes, to illustrate the complicated interplay of these processes in a real reactive r.f. discharge and to give some outlooks on future activities needed for improving the modelling." @default.
- W2007881707 created "2016-06-24" @default.
- W2007881707 creator A5029607622 @default.
- W2007881707 creator A5088912574 @default.
- W2007881707 date "1988-01-01" @default.
- W2007881707 modified "2023-10-18" @default.
- W2007881707 title "Modelling of Low Pressure Reactive RF Plasmas" @default.
- W2007881707 cites W1967571925 @default.
- W2007881707 cites W1968761733 @default.
- W2007881707 cites W1976906738 @default.
- W2007881707 cites W2009977402 @default.
- W2007881707 cites W2027295015 @default.
- W2007881707 cites W2050031136 @default.
- W2007881707 cites W2051285409 @default.
- W2007881707 cites W2063023051 @default.
- W2007881707 cites W2064040529 @default.
- W2007881707 cites W2065342023 @default.
- W2007881707 cites W2067979108 @default.
- W2007881707 cites W2086363193 @default.
- W2007881707 cites W2122540346 @default.
- W2007881707 cites W2128364570 @default.
- W2007881707 cites W2132133927 @default.
- W2007881707 cites W2164848720 @default.
- W2007881707 cites W2314036843 @default.
- W2007881707 doi "https://doi.org/10.1088/0031-8949/1988/t23/049" @default.
- W2007881707 hasPublicationYear "1988" @default.
- W2007881707 type Work @default.
- W2007881707 sameAs 2007881707 @default.
- W2007881707 citedByCount "5" @default.
- W2007881707 countsByYear W20078817072014 @default.
- W2007881707 countsByYear W20078817072015 @default.
- W2007881707 crossrefType "journal-article" @default.
- W2007881707 hasAuthorship W2007881707A5029607622 @default.
- W2007881707 hasAuthorship W2007881707A5088912574 @default.
- W2007881707 hasConcept C100460472 @default.
- W2007881707 hasConcept C107187091 @default.
- W2007881707 hasConcept C121332964 @default.
- W2007881707 hasConcept C130472188 @default.
- W2007881707 hasConcept C151730666 @default.
- W2007881707 hasConcept C159467904 @default.
- W2007881707 hasConcept C171250308 @default.
- W2007881707 hasConcept C185544564 @default.
- W2007881707 hasConcept C187937830 @default.
- W2007881707 hasConcept C192562407 @default.
- W2007881707 hasConcept C2779227376 @default.
- W2007881707 hasConcept C2816523 @default.
- W2007881707 hasConcept C3020013744 @default.
- W2007881707 hasConcept C61696701 @default.
- W2007881707 hasConcept C64297162 @default.
- W2007881707 hasConcept C82706917 @default.
- W2007881707 hasConcept C86803240 @default.
- W2007881707 hasConcept C97355855 @default.
- W2007881707 hasConceptScore W2007881707C100460472 @default.
- W2007881707 hasConceptScore W2007881707C107187091 @default.
- W2007881707 hasConceptScore W2007881707C121332964 @default.
- W2007881707 hasConceptScore W2007881707C130472188 @default.
- W2007881707 hasConceptScore W2007881707C151730666 @default.
- W2007881707 hasConceptScore W2007881707C159467904 @default.
- W2007881707 hasConceptScore W2007881707C171250308 @default.
- W2007881707 hasConceptScore W2007881707C185544564 @default.
- W2007881707 hasConceptScore W2007881707C187937830 @default.
- W2007881707 hasConceptScore W2007881707C192562407 @default.
- W2007881707 hasConceptScore W2007881707C2779227376 @default.
- W2007881707 hasConceptScore W2007881707C2816523 @default.
- W2007881707 hasConceptScore W2007881707C3020013744 @default.
- W2007881707 hasConceptScore W2007881707C61696701 @default.
- W2007881707 hasConceptScore W2007881707C64297162 @default.
- W2007881707 hasConceptScore W2007881707C82706917 @default.
- W2007881707 hasConceptScore W2007881707C86803240 @default.
- W2007881707 hasConceptScore W2007881707C97355855 @default.
- W2007881707 hasLocation W20078817071 @default.
- W2007881707 hasOpenAccess W2007881707 @default.
- W2007881707 hasPrimaryLocation W20078817071 @default.
- W2007881707 hasRelatedWork W1672156540 @default.
- W2007881707 hasRelatedWork W2019033319 @default.
- W2007881707 hasRelatedWork W2075490741 @default.
- W2007881707 hasRelatedWork W2139606557 @default.
- W2007881707 hasRelatedWork W2316410192 @default.
- W2007881707 hasRelatedWork W2535918899 @default.
- W2007881707 hasRelatedWork W2605053466 @default.
- W2007881707 hasRelatedWork W2766127330 @default.
- W2007881707 hasRelatedWork W2923172560 @default.
- W2007881707 hasRelatedWork W9341819 @default.
- W2007881707 hasVolume "T23" @default.
- W2007881707 isParatext "false" @default.
- W2007881707 isRetracted "false" @default.
- W2007881707 magId "2007881707" @default.
- W2007881707 workType "article" @default.