Matches in SemOpenAlex for { <https://semopenalex.org/work/W2007921083> ?p ?o ?g. }
Showing items 1 to 80 of
80
with 100 items per page.
- W2007921083 endingPage "172" @default.
- W2007921083 startingPage "166" @default.
- W2007921083 abstract "Abstract Young's modulus E f and hardness H f of Pd thin films were measured by the nano-indentation technique. Pd films were made under various conditions with the film thickness t f varied from 20 to 280 nm and deposition temperature T s from 25 to 360 °C in vacuum. As an independent check, the Young's modulus 〈 E f 〉 of some selected Pd films was measured again by the X-ray diffraction plus stress measurement. The values of E f and 〈 E f 〉 in general agree with each other for the same Pd film. The surface morphology of each film was examined by an atomic force microscope, and the surface roughness parameters, such as S q and S a , were calculated. From X-ray diffraction studies we estimated the grain size D and the ratio I 111 / I 200 , where I 111 and I 200 are the peak amplitudes of the (111) and (200) diffraction lines, of the Pd films. We also find that both E f and H f are dependent on t f . In short, E f increases when 20 nm t f t f = 196 nm, and decreases afterwards, while H f decreases monotonically with increasing t f . The E f data are analyzed based on the structural properties, such as the ratio I 111 / I 200 and the density δ , of each Pd film. The H f data are discussed based on the t f dependence of grain size D . Finally, the conditions required to make a good nano-indentation measurement on a thin-film sample are summarized." @default.
- W2007921083 created "2016-06-24" @default.
- W2007921083 creator A5016004684 @default.
- W2007921083 creator A5042930179 @default.
- W2007921083 date "2005-12-01" @default.
- W2007921083 modified "2023-09-24" @default.
- W2007921083 title "Young's modulus and hardness of Pd thin films" @default.
- W2007921083 cites W1508909221 @default.
- W2007921083 cites W1971085834 @default.
- W2007921083 cites W1981340625 @default.
- W2007921083 cites W1981476636 @default.
- W2007921083 cites W1982181644 @default.
- W2007921083 cites W1982910523 @default.
- W2007921083 cites W1991265289 @default.
- W2007921083 cites W2032527665 @default.
- W2007921083 cites W2036042259 @default.
- W2007921083 cites W2040758402 @default.
- W2007921083 cites W2050315993 @default.
- W2007921083 cites W2060975414 @default.
- W2007921083 cites W2066658291 @default.
- W2007921083 cites W2073630122 @default.
- W2007921083 cites W2129468263 @default.
- W2007921083 doi "https://doi.org/10.1016/j.tsf.2005.06.048" @default.
- W2007921083 hasPublicationYear "2005" @default.
- W2007921083 type Work @default.
- W2007921083 sameAs 2007921083 @default.
- W2007921083 citedByCount "31" @default.
- W2007921083 countsByYear W20079210832012 @default.
- W2007921083 countsByYear W20079210832013 @default.
- W2007921083 countsByYear W20079210832014 @default.
- W2007921083 countsByYear W20079210832015 @default.
- W2007921083 countsByYear W20079210832016 @default.
- W2007921083 countsByYear W20079210832017 @default.
- W2007921083 countsByYear W20079210832020 @default.
- W2007921083 countsByYear W20079210832021 @default.
- W2007921083 countsByYear W20079210832022 @default.
- W2007921083 crossrefType "journal-article" @default.
- W2007921083 hasAuthorship W2007921083A5016004684 @default.
- W2007921083 hasAuthorship W2007921083A5042930179 @default.
- W2007921083 hasConcept C159985019 @default.
- W2007921083 hasConcept C165720898 @default.
- W2007921083 hasConcept C171250308 @default.
- W2007921083 hasConcept C19067145 @default.
- W2007921083 hasConcept C191897082 @default.
- W2007921083 hasConcept C192562407 @default.
- W2007921083 hasConcept C193867417 @default.
- W2007921083 hasConcept C196029304 @default.
- W2007921083 hasConcept C42698342 @default.
- W2007921083 hasConcept C87976508 @default.
- W2007921083 hasConceptScore W2007921083C159985019 @default.
- W2007921083 hasConceptScore W2007921083C165720898 @default.
- W2007921083 hasConceptScore W2007921083C171250308 @default.
- W2007921083 hasConceptScore W2007921083C19067145 @default.
- W2007921083 hasConceptScore W2007921083C191897082 @default.
- W2007921083 hasConceptScore W2007921083C192562407 @default.
- W2007921083 hasConceptScore W2007921083C193867417 @default.
- W2007921083 hasConceptScore W2007921083C196029304 @default.
- W2007921083 hasConceptScore W2007921083C42698342 @default.
- W2007921083 hasConceptScore W2007921083C87976508 @default.
- W2007921083 hasIssue "1-2" @default.
- W2007921083 hasLocation W20079210831 @default.
- W2007921083 hasOpenAccess W2007921083 @default.
- W2007921083 hasPrimaryLocation W20079210831 @default.
- W2007921083 hasRelatedWork W197669595 @default.
- W2007921083 hasRelatedWork W1996626041 @default.
- W2007921083 hasRelatedWork W2072902252 @default.
- W2007921083 hasRelatedWork W2080785017 @default.
- W2007921083 hasRelatedWork W2080897440 @default.
- W2007921083 hasRelatedWork W2098166625 @default.
- W2007921083 hasRelatedWork W2108887759 @default.
- W2007921083 hasRelatedWork W2552879436 @default.
- W2007921083 hasRelatedWork W4234983613 @default.
- W2007921083 hasRelatedWork W4245252044 @default.
- W2007921083 hasVolume "492" @default.
- W2007921083 isParatext "false" @default.
- W2007921083 isRetracted "false" @default.
- W2007921083 magId "2007921083" @default.
- W2007921083 workType "article" @default.