Matches in SemOpenAlex for { <https://semopenalex.org/work/W2008051331> ?p ?o ?g. }
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- W2008051331 endingPage "811" @default.
- W2008051331 startingPage "806" @default.
- W2008051331 abstract "In this paper we report on studies of the mechanisms responsible for HF/H2O etching and cleaning of Si surfaces. From these studies we have clearly established that the role of water is to provide a condensed solvent medium for the HF on the surface. Our results, as well as those in the literature, show that if the partial pressures of HF and H2O are too low (or sample temperature too high) condensation does not occur and little or no oxide etching is observed. Based on these ideas and vapor pressure data from the literature, we have developed a detailed model that provides for the calculation of the onset of condensation as a function of wafer temperature and reactant partial pressures. In addition, the model allows determination of the HF concentration in the condensed H2O film. Comparison of etch rates obtained for aqueous etching as a function of HF concentration and vapor phase etching as a function of calculated HF concentration show good agreement." @default.
- W2008051331 created "2016-06-24" @default.
- W2008051331 creator A5039017658 @default.
- W2008051331 creator A5084848327 @default.
- W2008051331 date "1992-07-01" @default.
- W2008051331 modified "2023-10-01" @default.
- W2008051331 title "Mechanisms of the HF/H2O vapor phase etching of SiO2" @default.
- W2008051331 doi "https://doi.org/10.1116/1.577676" @default.
- W2008051331 hasPublicationYear "1992" @default.
- W2008051331 type Work @default.
- W2008051331 sameAs 2008051331 @default.
- W2008051331 citedByCount "70" @default.
- W2008051331 countsByYear W20080513312012 @default.
- W2008051331 countsByYear W20080513312013 @default.
- W2008051331 countsByYear W20080513312014 @default.
- W2008051331 countsByYear W20080513312015 @default.
- W2008051331 countsByYear W20080513312016 @default.
- W2008051331 countsByYear W20080513312017 @default.
- W2008051331 countsByYear W20080513312018 @default.
- W2008051331 countsByYear W20080513312020 @default.
- W2008051331 countsByYear W20080513312021 @default.
- W2008051331 countsByYear W20080513312022 @default.
- W2008051331 countsByYear W20080513312023 @default.
- W2008051331 crossrefType "journal-article" @default.
- W2008051331 hasAuthorship W2008051331A5039017658 @default.
- W2008051331 hasAuthorship W2008051331A5084848327 @default.
- W2008051331 hasConcept C100460472 @default.
- W2008051331 hasConcept C113196181 @default.
- W2008051331 hasConcept C121332964 @default.
- W2008051331 hasConcept C147534773 @default.
- W2008051331 hasConcept C147789679 @default.
- W2008051331 hasConcept C160671074 @default.
- W2008051331 hasConcept C171250308 @default.
- W2008051331 hasConcept C178790620 @default.
- W2008051331 hasConcept C184651966 @default.
- W2008051331 hasConcept C185592680 @default.
- W2008051331 hasConcept C19184958 @default.
- W2008051331 hasConcept C192562407 @default.
- W2008051331 hasConcept C200093464 @default.
- W2008051331 hasConcept C2779227376 @default.
- W2008051331 hasConcept C2779851234 @default.
- W2008051331 hasConcept C3018640491 @default.
- W2008051331 hasConcept C43617362 @default.
- W2008051331 hasConcept C44280652 @default.
- W2008051331 hasConcept C540031477 @default.
- W2008051331 hasConcept C68463220 @default.
- W2008051331 hasConcept C97355855 @default.
- W2008051331 hasConceptScore W2008051331C100460472 @default.
- W2008051331 hasConceptScore W2008051331C113196181 @default.
- W2008051331 hasConceptScore W2008051331C121332964 @default.
- W2008051331 hasConceptScore W2008051331C147534773 @default.
- W2008051331 hasConceptScore W2008051331C147789679 @default.
- W2008051331 hasConceptScore W2008051331C160671074 @default.
- W2008051331 hasConceptScore W2008051331C171250308 @default.
- W2008051331 hasConceptScore W2008051331C178790620 @default.
- W2008051331 hasConceptScore W2008051331C184651966 @default.
- W2008051331 hasConceptScore W2008051331C185592680 @default.
- W2008051331 hasConceptScore W2008051331C19184958 @default.
- W2008051331 hasConceptScore W2008051331C192562407 @default.
- W2008051331 hasConceptScore W2008051331C200093464 @default.
- W2008051331 hasConceptScore W2008051331C2779227376 @default.
- W2008051331 hasConceptScore W2008051331C2779851234 @default.
- W2008051331 hasConceptScore W2008051331C3018640491 @default.
- W2008051331 hasConceptScore W2008051331C43617362 @default.
- W2008051331 hasConceptScore W2008051331C44280652 @default.
- W2008051331 hasConceptScore W2008051331C540031477 @default.
- W2008051331 hasConceptScore W2008051331C68463220 @default.
- W2008051331 hasConceptScore W2008051331C97355855 @default.
- W2008051331 hasIssue "4" @default.
- W2008051331 hasLocation W20080513311 @default.
- W2008051331 hasOpenAccess W2008051331 @default.
- W2008051331 hasPrimaryLocation W20080513311 @default.
- W2008051331 hasRelatedWork W1539051985 @default.
- W2008051331 hasRelatedWork W1968772928 @default.
- W2008051331 hasRelatedWork W2042729495 @default.
- W2008051331 hasRelatedWork W2052794911 @default.
- W2008051331 hasRelatedWork W2074083839 @default.
- W2008051331 hasRelatedWork W2093688338 @default.
- W2008051331 hasRelatedWork W2097469055 @default.
- W2008051331 hasRelatedWork W2561716551 @default.
- W2008051331 hasRelatedWork W3008172807 @default.
- W2008051331 hasRelatedWork W4214731581 @default.
- W2008051331 hasVolume "10" @default.
- W2008051331 isParatext "false" @default.
- W2008051331 isRetracted "false" @default.
- W2008051331 magId "2008051331" @default.
- W2008051331 workType "article" @default.