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- W2008193211 abstract "Abstract Molecular layer deposition (MLD) is a useful technique for fabricating hybrid organic‐inorganic thin films. MLD allows for the growth of ultrathin and conformal films using sequential, self‐limiting reactions. This article focuses on the MLD of hybrid organic‐inorganic films grown using metal precursors and various organic alcohols that yield metal alkoxide films. This family of metal alkoxides can be described as “metalcones”. Many metalcones are possible, such as the “alucones” and “zincones” based on the reaction of trimethylaluminum and diethylzinc, respectively, with various organic diols such as ethylene glycol. Alloys of the various metalcones with their parent metal oxide atomic layer deposition (ALD) films can also be fabricated that have an organic‐inorganic composition that can be adjusted by controlling the relative number of ALD and MLD cycles. These metalcone alloys have tunable chemical, optical, mechanical, and electrical properties that may be useful for designing various functional films. The metalcone hybrid organic‐inorganic materials offer a new tool set for engineering thin film properties." @default.
- W2008193211 created "2016-06-24" @default.
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- W2008193211 creator A5033879679 @default.
- W2008193211 creator A5087210690 @default.
- W2008193211 date "2012-09-07" @default.
- W2008193211 modified "2023-10-17" @default.
- W2008193211 title "Growth and Properties of Hybrid Organic-Inorganic Metalcone Films Using Molecular Layer Deposition Techniques" @default.
- W2008193211 cites W1635304008 @default.
- W2008193211 cites W1896289247 @default.
- W2008193211 cites W1932474876 @default.
- W2008193211 cites W1963678391 @default.
- W2008193211 cites W1963821965 @default.
- W2008193211 cites W1964889455 @default.
- W2008193211 cites W1965694705 @default.
- W2008193211 cites W1968083459 @default.
- W2008193211 cites W1972566389 @default.
- W2008193211 cites W1974107959 @default.
- W2008193211 cites W1974610587 @default.
- W2008193211 cites W1975493559 @default.
- W2008193211 cites W1977292655 @default.
- W2008193211 cites W1977333046 @default.
- W2008193211 cites W1983373532 @default.
- W2008193211 cites W1984145497 @default.
- W2008193211 cites W1984962131 @default.
- W2008193211 cites W1989481106 @default.
- W2008193211 cites W1990309856 @default.
- W2008193211 cites W1991081333 @default.
- W2008193211 cites W1992004111 @default.
- W2008193211 cites W1993209440 @default.
- W2008193211 cites W1993243846 @default.
- W2008193211 cites W1994237928 @default.
- W2008193211 cites W1994392457 @default.
- W2008193211 cites W1994939627 @default.
- W2008193211 cites W1995191254 @default.
- W2008193211 cites W1995836054 @default.
- W2008193211 cites W2000399637 @default.
- W2008193211 cites W2001364659 @default.
- W2008193211 cites W2003055041 @default.
- W2008193211 cites W2008365303 @default.
- W2008193211 cites W2012445711 @default.
- W2008193211 cites W2013803057 @default.
- W2008193211 cites W2015517429 @default.
- W2008193211 cites W2015878742 @default.
- W2008193211 cites W2019107588 @default.
- W2008193211 cites W2019879943 @default.
- W2008193211 cites W2022379816 @default.
- W2008193211 cites W2024025132 @default.
- W2008193211 cites W2029571457 @default.
- W2008193211 cites W2030058108 @default.
- W2008193211 cites W2034000947 @default.
- W2008193211 cites W2035329304 @default.
- W2008193211 cites W2035397082 @default.
- W2008193211 cites W2035449306 @default.
- W2008193211 cites W2041155652 @default.
- W2008193211 cites W2045765444 @default.
- W2008193211 cites W2046778260 @default.
- W2008193211 cites W2051166244 @default.
- W2008193211 cites W2053223109 @default.
- W2008193211 cites W2053762275 @default.
- W2008193211 cites W2054143712 @default.
- W2008193211 cites W2065584904 @default.
- W2008193211 cites W2068224253 @default.
- W2008193211 cites W2069347463 @default.
- W2008193211 cites W2072249032 @default.
- W2008193211 cites W2072408783 @default.
- W2008193211 cites W2072526654 @default.
- W2008193211 cites W2074358422 @default.
- W2008193211 cites W2076306638 @default.
- W2008193211 cites W2077948549 @default.
- W2008193211 cites W2078244500 @default.
- W2008193211 cites W2078914259 @default.
- W2008193211 cites W2082043387 @default.
- W2008193211 cites W2082085422 @default.
- W2008193211 cites W2087498102 @default.
- W2008193211 cites W2091177316 @default.
- W2008193211 cites W2092976415 @default.
- W2008193211 cites W2094858777 @default.
- W2008193211 cites W2102680086 @default.
- W2008193211 cites W2105490514 @default.
- W2008193211 cites W2106879023 @default.
- W2008193211 cites W2109737358 @default.
- W2008193211 cites W2111156460 @default.
- W2008193211 cites W2113981342 @default.
- W2008193211 cites W2119585240 @default.
- W2008193211 cites W2120208812 @default.
- W2008193211 cites W2129477636 @default.
- W2008193211 cites W2142891621 @default.
- W2008193211 cites W2152811838 @default.
- W2008193211 cites W2156745075 @default.
- W2008193211 cites W2158932701 @default.
- W2008193211 cites W2315982753 @default.
- W2008193211 cites W2319640461 @default.
- W2008193211 cites W2327813712 @default.
- W2008193211 cites W2329409615 @default.
- W2008193211 cites W2330136148 @default.