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- W2008223846 abstract "Holographic generation of gratings with periodicities down to 140nm in thin polymethyl methacrylate (PMMA) layers on Si-substrates using a narrow band KrF-excimer laser (λ=248 nm) is reported. At low single pulse energy densities (<3OmJ/cm2) the gratings are prepared by conventional photolithography. At higher single pulse energy densities (>70mJ/cm2) we directly write gratings in the PMMA by photoetching (ablation)." @default.
- W2008223846 created "2016-06-24" @default.
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- W2008223846 date "1989-04-26" @default.
- W2008223846 modified "2023-09-23" @default.
- W2008223846 title "Holographic Generation Of Gratings With Periodicities Below 150 nm With An Excimer Laser" @default.
- W2008223846 doi "https://doi.org/10.1117/12.950154" @default.
- W2008223846 hasPublicationYear "1989" @default.
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