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- W2008228415 abstract "The paper is presenting the technology of a nanowire FET device to be used in biodetection. The nanosensor we are presenting is containing a FET device realized on top of a silicon wafer substrate with a long nanowire allowing the conduction between source and drain and hosting the specific biomaterial on top of it. (nanowire bioFET) The FET device that is presented comprises two gates, one on the back, and one on top. The FET with double gate was realized in a unique technological process flow that will be described. The masks and the layout will be presented. The technology of the device will be presented and the development of the nanowire technology as well." @default.
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- W2008228415 date "2009-10-01" @default.
- W2008228415 modified "2023-09-27" @default.
- W2008228415 title "Technology of a nanowire bioFET device for biomolecules detection" @default.
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- W2008228415 doi "https://doi.org/10.1109/smicnd.2009.5336651" @default.
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