Matches in SemOpenAlex for { <https://semopenalex.org/work/W2008267708> ?p ?o ?g. }
Showing items 1 to 100 of
100
with 100 items per page.
- W2008267708 endingPage "133505" @default.
- W2008267708 startingPage "133505" @default.
- W2008267708 abstract "Utilizing lattice-matched GaAs∕InGaP∕GaAs heterostructures, clean micromechanical resonators are fabricated and characterized. The nearly perfect selectivity of GaAs∕InGaP is demonstrated by realizing paddle-shaped resonators, which require significant lateral etching of the sacrificial layer. Doubly clamped beam resonators are also created, with a Q factor as high as 17 000 at 45mK. Both linear and nonlinear behaviors are observed in GaAs micromechanical resonators. Furthermore, a direct relationship between Q factor and resonant frequency is found by controlling the electrostatic force on the paddle-shaped resonators. For beam resonators, the dissipation (Q−1) as a function of temperature obeys a power law similar to silicon resonators." @default.
- W2008267708 created "2016-06-24" @default.
- W2008267708 creator A5002388862 @default.
- W2008267708 creator A5036139303 @default.
- W2008267708 creator A5036352144 @default.
- W2008267708 creator A5054577222 @default.
- W2008267708 creator A5080158903 @default.
- W2008267708 creator A5080320389 @default.
- W2008267708 creator A5080689244 @default.
- W2008267708 creator A5081690032 @default.
- W2008267708 creator A5083210688 @default.
- W2008267708 date "2007-09-24" @default.
- W2008267708 modified "2023-10-14" @default.
- W2008267708 title "Micromechanical resonators fabricated from lattice-matched and etch-selective GaAs∕InGaP∕GaAs heterostructures" @default.
- W2008267708 cites W1975640799 @default.
- W2008267708 cites W1980430386 @default.
- W2008267708 cites W1981023162 @default.
- W2008267708 cites W1982398731 @default.
- W2008267708 cites W1982785873 @default.
- W2008267708 cites W1995314372 @default.
- W2008267708 cites W1996828607 @default.
- W2008267708 cites W1997219702 @default.
- W2008267708 cites W2003239526 @default.
- W2008267708 cites W2006627882 @default.
- W2008267708 cites W2027618767 @default.
- W2008267708 cites W2047881217 @default.
- W2008267708 cites W2057198157 @default.
- W2008267708 cites W2060728988 @default.
- W2008267708 cites W2078740349 @default.
- W2008267708 cites W2084839438 @default.
- W2008267708 cites W2091334166 @default.
- W2008267708 cites W2106577405 @default.
- W2008267708 cites W2142115235 @default.
- W2008267708 cites W2143922216 @default.
- W2008267708 cites W2156290918 @default.
- W2008267708 cites W2950286889 @default.
- W2008267708 cites W3100266850 @default.
- W2008267708 cites W3100675208 @default.
- W2008267708 doi "https://doi.org/10.1063/1.2790482" @default.
- W2008267708 hasPublicationYear "2007" @default.
- W2008267708 type Work @default.
- W2008267708 sameAs 2008267708 @default.
- W2008267708 citedByCount "20" @default.
- W2008267708 countsByYear W20082677082012 @default.
- W2008267708 countsByYear W20082677082013 @default.
- W2008267708 countsByYear W20082677082014 @default.
- W2008267708 countsByYear W20082677082017 @default.
- W2008267708 countsByYear W20082677082018 @default.
- W2008267708 countsByYear W20082677082022 @default.
- W2008267708 crossrefType "journal-article" @default.
- W2008267708 hasAuthorship W2008267708A5002388862 @default.
- W2008267708 hasAuthorship W2008267708A5036139303 @default.
- W2008267708 hasAuthorship W2008267708A5036352144 @default.
- W2008267708 hasAuthorship W2008267708A5054577222 @default.
- W2008267708 hasAuthorship W2008267708A5080158903 @default.
- W2008267708 hasAuthorship W2008267708A5080320389 @default.
- W2008267708 hasAuthorship W2008267708A5080689244 @default.
- W2008267708 hasAuthorship W2008267708A5081690032 @default.
- W2008267708 hasAuthorship W2008267708A5083210688 @default.
- W2008267708 hasConcept C121332964 @default.
- W2008267708 hasConcept C135402231 @default.
- W2008267708 hasConcept C187725362 @default.
- W2008267708 hasConcept C192562407 @default.
- W2008267708 hasConcept C49040817 @default.
- W2008267708 hasConcept C510052550 @default.
- W2008267708 hasConcept C544956773 @default.
- W2008267708 hasConcept C79794668 @default.
- W2008267708 hasConcept C97126364 @default.
- W2008267708 hasConcept C97355855 @default.
- W2008267708 hasConceptScore W2008267708C121332964 @default.
- W2008267708 hasConceptScore W2008267708C135402231 @default.
- W2008267708 hasConceptScore W2008267708C187725362 @default.
- W2008267708 hasConceptScore W2008267708C192562407 @default.
- W2008267708 hasConceptScore W2008267708C49040817 @default.
- W2008267708 hasConceptScore W2008267708C510052550 @default.
- W2008267708 hasConceptScore W2008267708C544956773 @default.
- W2008267708 hasConceptScore W2008267708C79794668 @default.
- W2008267708 hasConceptScore W2008267708C97126364 @default.
- W2008267708 hasConceptScore W2008267708C97355855 @default.
- W2008267708 hasIssue "13" @default.
- W2008267708 hasLocation W20082677081 @default.
- W2008267708 hasOpenAccess W2008267708 @default.
- W2008267708 hasPrimaryLocation W20082677081 @default.
- W2008267708 hasRelatedWork W1521678744 @default.
- W2008267708 hasRelatedWork W1998031657 @default.
- W2008267708 hasRelatedWork W2004730873 @default.
- W2008267708 hasRelatedWork W2050408731 @default.
- W2008267708 hasRelatedWork W2058676402 @default.
- W2008267708 hasRelatedWork W2075574875 @default.
- W2008267708 hasRelatedWork W2106626554 @default.
- W2008267708 hasRelatedWork W2149497170 @default.
- W2008267708 hasRelatedWork W2799048710 @default.
- W2008267708 hasRelatedWork W4210949943 @default.
- W2008267708 hasVolume "91" @default.
- W2008267708 isParatext "false" @default.
- W2008267708 isRetracted "false" @default.
- W2008267708 magId "2008267708" @default.
- W2008267708 workType "article" @default.