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• W2008305428 endingPage "118" @default.
• W2008305428 startingPage "114" @default.
• W2008305428 abstract "When analyzing spectroscopic ellipsometry data it can be difficult to find unique solutions if, for instance, the dielectric function of a film must be found together with the film thickness. One method to find the solutions is `multiple sample analysis'. The basic assumption for this method is that the optical properties of the unknown layers are identical in all samples. In the analysis procedure a set of samples with different film thicknesses are prepared and measured, preferably at multiple angles of incidence. Several (one for each sample) identical optical models are then defined with coupled optical properties of the unknown layers and all data are fitted simultaneously. This will give solutions for the dielectric function of the films and the film thicknesses due to parameter decoupling. The analysis can also be extended to more complex samples including more than one film thickness, surface and interface roughness, and porosity. In this study we have applied the multiple sample analysis method to find dielectric functions, film thicknesses and surface roughnesses of thin films of Ta2O5, ScN and CeO2." @default.
• W2008305428 created "2016-06-24" @default.
• W2008305428 creator A5038291065 @default.
• W2008305428 creator A5054211889 @default.
• W2008305428 date "1998-02-01" @default.
• W2008305428 modified "2023-09-30" @default.
• W2008305428 title "Multiple sample analysis of spectroscopic ellipsometry data of semi-transparent films" @default.
• W2008305428 cites W1965119935 @default.
• W2008305428 cites W1965437664 @default.
• W2008305428 cites W1986106303 @default.
• W2008305428 cites W1988639161 @default.
• W2008305428 cites W1993371900 @default.
• W2008305428 cites W2001418327 @default.
• W2008305428 cites W2021740056 @default.
• W2008305428 cites W2067320242 @default.
• W2008305428 cites W2325850497 @default.
• W2008305428 doi "https://doi.org/10.1016/s0040-6090(97)00781-5" @default.
• W2008305428 hasPublicationYear "1998" @default.
• W2008305428 type Work @default.
• W2008305428 sameAs 2008305428 @default.
• W2008305428 citedByCount "54" @default.
• W2008305428 countsByYear W20083054282012 @default.
• W2008305428 countsByYear W20083054282013 @default.
• W2008305428 countsByYear W20083054282014 @default.
• W2008305428 countsByYear W20083054282015 @default.
• W2008305428 countsByYear W20083054282016 @default.
• W2008305428 countsByYear W20083054282017 @default.
• W2008305428 countsByYear W20083054282018 @default.
• W2008305428 countsByYear W20083054282019 @default.
• W2008305428 countsByYear W20083054282020 @default.
• W2008305428 countsByYear W20083054282021 @default.
• W2008305428 countsByYear W20083054282022 @default.
• W2008305428 countsByYear W20083054282023 @default.
• W2008305428 crossrefType "journal-article" @default.
• W2008305428 hasAuthorship W2008305428A5038291065 @default.
• W2008305428 hasAuthorship W2008305428A5054211889 @default.
• W2008305428 hasConcept C107365816 @default.
• W2008305428 hasConcept C113196181 @default.
• W2008305428 hasConcept C120665830 @default.
• W2008305428 hasConcept C121332964 @default.
• W2008305428 hasConcept C127413603 @default.
• W2008305428 hasConcept C133386390 @default.
• W2008305428 hasConcept C133731056 @default.
• W2008305428 hasConcept C159985019 @default.
• W2008305428 hasConcept C171250308 @default.
• W2008305428 hasConcept C18293161 @default.
• W2008305428 hasConcept C185592680 @default.
• W2008305428 hasConcept C19067145 @default.
• W2008305428 hasConcept C192562407 @default.
• W2008305428 hasConcept C198531522 @default.
• W2008305428 hasConcept C205606062 @default.
• W2008305428 hasConcept C2524010 @default.
• W2008305428 hasConcept C2776799497 @default.
• W2008305428 hasConcept C2988029435 @default.
• W2008305428 hasConcept C33923547 @default.
• W2008305428 hasConcept C43617362 @default.
• W2008305428 hasConcept C49040817 @default.
• W2008305428 hasConcept C6648577 @default.
• W2008305428 hasConcept C71039073 @default.
• W2008305428 hasConcept C97355855 @default.
• W2008305428 hasConceptScore W2008305428C107365816 @default.
• W2008305428 hasConceptScore W2008305428C113196181 @default.
• W2008305428 hasConceptScore W2008305428C120665830 @default.
• W2008305428 hasConceptScore W2008305428C121332964 @default.
• W2008305428 hasConceptScore W2008305428C127413603 @default.
• W2008305428 hasConceptScore W2008305428C133386390 @default.
• W2008305428 hasConceptScore W2008305428C133731056 @default.
• W2008305428 hasConceptScore W2008305428C159985019 @default.
• W2008305428 hasConceptScore W2008305428C171250308 @default.
• W2008305428 hasConceptScore W2008305428C18293161 @default.
• W2008305428 hasConceptScore W2008305428C185592680 @default.
• W2008305428 hasConceptScore W2008305428C19067145 @default.
• W2008305428 hasConceptScore W2008305428C192562407 @default.
• W2008305428 hasConceptScore W2008305428C198531522 @default.
• W2008305428 hasConceptScore W2008305428C205606062 @default.
• W2008305428 hasConceptScore W2008305428C2524010 @default.
• W2008305428 hasConceptScore W2008305428C2776799497 @default.
• W2008305428 hasConceptScore W2008305428C2988029435 @default.
• W2008305428 hasConceptScore W2008305428C33923547 @default.
• W2008305428 hasConceptScore W2008305428C43617362 @default.
• W2008305428 hasConceptScore W2008305428C49040817 @default.
• W2008305428 hasConceptScore W2008305428C6648577 @default.
• W2008305428 hasConceptScore W2008305428C71039073 @default.
• W2008305428 hasConceptScore W2008305428C97355855 @default.
• W2008305428 hasLocation W20083054281 @default.
• W2008305428 hasOpenAccess W2008305428 @default.
• W2008305428 hasPrimaryLocation W20083054281 @default.
• W2008305428 hasRelatedWork W1657313005 @default.
• W2008305428 hasRelatedWork W1973154964 @default.
• W2008305428 hasRelatedWork W1979779610 @default.
• W2008305428 hasRelatedWork W2008305428 @default.
• W2008305428 hasRelatedWork W2013812364 @default.
• W2008305428 hasRelatedWork W2054261068 @default.
• W2008305428 hasRelatedWork W2075213687 @default.
• W2008305428 hasRelatedWork W2090150496 @default.
• W2008305428 hasRelatedWork W2377232503 @default.
• W2008305428 hasRelatedWork W2909042226 @default.
• W2008305428 hasVolume "313-314" @default.

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