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• W2008350610 abstract "A high-speed distributed electrode phase modulator has been designed and fabricated. The processing of this device presented many challenges: (1) smooth rib waveguides etched to an accuracy of +/- 200angstroms; (2) polyimide planarization of 5micrometers step heights, with vias patterned as small as 1.6 micrometers ; (3) contact metalization with resistivities as low as 1 X 10-6(Omega) -cm2; (4) coplanar n and p gold contacts 2.5 micrometers thick, with a 0.5 micrometers gap between contacts; (5) ion- implantation to achieve both electrical and optical isolation. A brief description of how each of these processes have been accomplished will be presented. The epitaxial growth structure of this device will be discussed, including SEM cross-sections of the completed device.© (1994) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only." @default.
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• W2008350610 date "1994-06-10" @default.
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• W2008350610 title "<title>Fabrication of high-performance GaAs/AlGaAs optical phase modulators for microwave/photonic integrated circuits</title>" @default.
• W2008350610 doi "https://doi.org/10.1117/12.177393" @default.
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