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- W2008485172 abstract "Abstract A new method for microultrasonic machining (MUSM) has been developed. In order to obtain high-precision tool rotation, the spindle mechanism employed in micro-EDM machines was introduced. Since the mechanism does not allow the vibration of tools, the workpiece was vibrated during machining. Using this setup, we have succeeded in machining microholes as small as 5pm in diameter in quartz glass and silicon. In this machining range, high tool wear posed a problem. To solve this problem, a sintered diamond (SD) tool was tested and was proven to be effective." @default.
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- W2008485172 date "1999-01-01" @default.
- W2008485172 modified "2023-09-26" @default.
- W2008485172 title "Microultrasonic Machining by the Application of Workpiece Vibration" @default.
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- W2008485172 doi "https://doi.org/10.1016/s0007-8506(07)63148-5" @default.
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