Matches in SemOpenAlex for { <https://semopenalex.org/work/W2008520220> ?p ?o ?g. }
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- W2008520220 endingPage "1346" @default.
- W2008520220 startingPage "1341" @default.
- W2008520220 abstract "A high performance pressure sensor using double silicon-on-insulator (SOI) structures, a (100) Si// (100) Al2O3// (100) Si/ SiO2/ (100) Si substrate, has been developed that is capable of very accurate operation at temperatures as high as 350 °C. A first SOI layer made by bonding two oxidized Si wafers together was employed as an etch-stop layer during KOH selective anisotropic etching and for controlling the thickness of the thin diaphragm. A double-heteroepitaxially grown second SOI layer on the first SOI layer was used as a dielectrically isolated single-element four terminal strain gauge that was placed at the center of a rectangular diaphragm. The dimensions of the diaphragm and its thickness were 360 μm ×1140 μm and 5 μm, respectively. This sensor has high sensitivity (0.04 mV/V⋅mmHg) for 700 mmHg full scale pressure range, with a nonlinearity less than +0.15% full scale. In the temperature range from −20 °C to +350 °C, the shift in sensitivity and offset voltage are less than −0.2% and +0.1%, respectively. Moreover, the implemented sensor is very useful for the miniaturization and integration of the sensor." @default.
- W2008520220 created "2016-06-24" @default.
- W2008520220 creator A5000723708 @default.
- W2008520220 creator A5028577029 @default.
- W2008520220 creator A5043309984 @default.
- W2008520220 creator A5048186403 @default.
- W2008520220 creator A5054783051 @default.
- W2008520220 creator A5065338590 @default.
- W2008520220 date "1991-05-01" @default.
- W2008520220 modified "2023-10-03" @default.
- W2008520220 title "High‐performance pressure sensors using double silicon‐on‐insulator structures" @default.
- W2008520220 cites W1964958541 @default.
- W2008520220 cites W1967954878 @default.
- W2008520220 cites W1974302073 @default.
- W2008520220 cites W1979294059 @default.
- W2008520220 cites W2006465965 @default.
- W2008520220 cites W2011271508 @default.
- W2008520220 cites W2036376639 @default.
- W2008520220 cites W2042729174 @default.
- W2008520220 cites W2056590407 @default.
- W2008520220 cites W2093573246 @default.
- W2008520220 cites W2156061401 @default.
- W2008520220 doi "https://doi.org/10.1063/1.1142496" @default.
- W2008520220 hasPublicationYear "1991" @default.
- W2008520220 type Work @default.
- W2008520220 sameAs 2008520220 @default.
- W2008520220 citedByCount "20" @default.
- W2008520220 countsByYear W20085202202013 @default.
- W2008520220 countsByYear W20085202202014 @default.
- W2008520220 countsByYear W20085202202015 @default.
- W2008520220 countsByYear W20085202202016 @default.
- W2008520220 countsByYear W20085202202023 @default.
- W2008520220 crossrefType "journal-article" @default.
- W2008520220 hasAuthorship W2008520220A5000723708 @default.
- W2008520220 hasAuthorship W2008520220A5028577029 @default.
- W2008520220 hasAuthorship W2008520220A5043309984 @default.
- W2008520220 hasAuthorship W2008520220A5048186403 @default.
- W2008520220 hasAuthorship W2008520220A5054783051 @default.
- W2008520220 hasAuthorship W2008520220A5065338590 @default.
- W2008520220 hasConcept C121332964 @default.
- W2008520220 hasConcept C159985019 @default.
- W2008520220 hasConcept C160671074 @default.
- W2008520220 hasConcept C171250308 @default.
- W2008520220 hasConcept C178889773 @default.
- W2008520220 hasConcept C192562407 @default.
- W2008520220 hasConcept C23125352 @default.
- W2008520220 hasConcept C2779227376 @default.
- W2008520220 hasConcept C37977207 @default.
- W2008520220 hasConcept C41325743 @default.
- W2008520220 hasConcept C49040817 @default.
- W2008520220 hasConcept C53143962 @default.
- W2008520220 hasConcept C544956773 @default.
- W2008520220 hasConcept C57528182 @default.
- W2008520220 hasConcept C97355855 @default.
- W2008520220 hasConceptScore W2008520220C121332964 @default.
- W2008520220 hasConceptScore W2008520220C159985019 @default.
- W2008520220 hasConceptScore W2008520220C160671074 @default.
- W2008520220 hasConceptScore W2008520220C171250308 @default.
- W2008520220 hasConceptScore W2008520220C178889773 @default.
- W2008520220 hasConceptScore W2008520220C192562407 @default.
- W2008520220 hasConceptScore W2008520220C23125352 @default.
- W2008520220 hasConceptScore W2008520220C2779227376 @default.
- W2008520220 hasConceptScore W2008520220C37977207 @default.
- W2008520220 hasConceptScore W2008520220C41325743 @default.
- W2008520220 hasConceptScore W2008520220C49040817 @default.
- W2008520220 hasConceptScore W2008520220C53143962 @default.
- W2008520220 hasConceptScore W2008520220C544956773 @default.
- W2008520220 hasConceptScore W2008520220C57528182 @default.
- W2008520220 hasConceptScore W2008520220C97355855 @default.
- W2008520220 hasIssue "5" @default.
- W2008520220 hasLocation W20085202201 @default.
- W2008520220 hasOpenAccess W2008520220 @default.
- W2008520220 hasPrimaryLocation W20085202201 @default.
- W2008520220 hasRelatedWork W1493799057 @default.
- W2008520220 hasRelatedWork W1961952755 @default.
- W2008520220 hasRelatedWork W2010481829 @default.
- W2008520220 hasRelatedWork W2016718907 @default.
- W2008520220 hasRelatedWork W2029645626 @default.
- W2008520220 hasRelatedWork W2076467392 @default.
- W2008520220 hasRelatedWork W2113540591 @default.
- W2008520220 hasRelatedWork W2352772338 @default.
- W2008520220 hasRelatedWork W2368943318 @default.
- W2008520220 hasRelatedWork W4221083985 @default.
- W2008520220 hasVolume "62" @default.
- W2008520220 isParatext "false" @default.
- W2008520220 isRetracted "false" @default.
- W2008520220 magId "2008520220" @default.
- W2008520220 workType "article" @default.