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• W2008522676 abstract "The patterning of carbon nanostructures by electron beam stimulated oxidation is described. Sputter deposited carbon thin films and carbon nanotubes are locally oxidized in a scanning electron microscope using injected water vapor. The resulting structures are examined with scanning electron microscopy (SEM) and transmission electron microscopy (TEM). Electrical resistance obtained post-processing is comparable to as-deposited values. Etched linewidths on the order of 20nm are demonstrated along with sub-2nm wide carbon wires." @default.
• W2008522676 created "2016-06-24" @default.
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• W2008522676 date "2009-01-01" @default.
• W2008522676 modified "2023-09-22" @default.
• W2008522676 title "Electron Beam Stimulated Oxidation of Carbon (EBSOC)" @default.
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• W2008522676 doi "https://doi.org/10.1109/memsys.2009.4805446" @default.
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