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- W2008528131 endingPage "L1796" @default.
- W2008528131 startingPage "L1796" @default.
- W2008528131 abstract "A simple technique for fabricating an array of isolated nanometer-size Si dots is reported. The processing procedures consist of electron beam lithography and reactive ion etching followed by wet etching in NH 4 OH/H 2 O 2 /H 2 O. The resulting array has isolated crystalline Si dots, each 10 nm in diameter and 10 nm high. To our knowledge, these are the smallest isolated crystalline Si dots reported to date." @default.
- W2008528131 created "2016-06-24" @default.
- W2008528131 creator A5025079801 @default.
- W2008528131 creator A5079814086 @default.
- W2008528131 creator A5090765558 @default.
- W2008528131 date "1994-12-01" @default.
- W2008528131 modified "2023-09-26" @default.
- W2008528131 title "Isolated Nanometer-Size Si Dot Arrays Fabricated Using Electron-Beam Lithography, Reactive Ion Etching, and Wet Etching in NH<sub>4</sub>OH/H<sub>2</sub>O<sub>2</sub>/H<sub>2</sub>O" @default.
- W2008528131 cites W1969830259 @default.
- W2008528131 cites W1985766013 @default.
- W2008528131 cites W1999194691 @default.
- W2008528131 cites W2008226975 @default.
- W2008528131 cites W2009890741 @default.
- W2008528131 cites W2042469719 @default.
- W2008528131 cites W2051581750 @default.
- W2008528131 cites W2066070165 @default.
- W2008528131 cites W2066600857 @default.
- W2008528131 cites W2078740510 @default.
- W2008528131 doi "https://doi.org/10.1143/jjap.33.l1796" @default.
- W2008528131 hasPublicationYear "1994" @default.
- W2008528131 type Work @default.
- W2008528131 sameAs 2008528131 @default.
- W2008528131 citedByCount "26" @default.
- W2008528131 countsByYear W20085281312012 @default.
- W2008528131 countsByYear W20085281312013 @default.
- W2008528131 countsByYear W20085281312016 @default.
- W2008528131 countsByYear W20085281312018 @default.
- W2008528131 crossrefType "journal-article" @default.
- W2008528131 hasAuthorship W2008528131A5025079801 @default.
- W2008528131 hasAuthorship W2008528131A5079814086 @default.
- W2008528131 hasAuthorship W2008528131A5090765558 @default.
- W2008528131 hasConcept C100460472 @default.
- W2008528131 hasConcept C113196181 @default.
- W2008528131 hasConcept C1291036 @default.
- W2008528131 hasConcept C130472188 @default.
- W2008528131 hasConcept C145148216 @default.
- W2008528131 hasConcept C159985019 @default.
- W2008528131 hasConcept C171250308 @default.
- W2008528131 hasConcept C178790620 @default.
- W2008528131 hasConcept C185592680 @default.
- W2008528131 hasConcept C192562407 @default.
- W2008528131 hasConcept C200274948 @default.
- W2008528131 hasConcept C204223013 @default.
- W2008528131 hasConcept C2779227376 @default.
- W2008528131 hasConcept C33220542 @default.
- W2008528131 hasConcept C43617362 @default.
- W2008528131 hasConcept C49040817 @default.
- W2008528131 hasConcept C53524968 @default.
- W2008528131 hasConcept C77066764 @default.
- W2008528131 hasConceptScore W2008528131C100460472 @default.
- W2008528131 hasConceptScore W2008528131C113196181 @default.
- W2008528131 hasConceptScore W2008528131C1291036 @default.
- W2008528131 hasConceptScore W2008528131C130472188 @default.
- W2008528131 hasConceptScore W2008528131C145148216 @default.
- W2008528131 hasConceptScore W2008528131C159985019 @default.
- W2008528131 hasConceptScore W2008528131C171250308 @default.
- W2008528131 hasConceptScore W2008528131C178790620 @default.
- W2008528131 hasConceptScore W2008528131C185592680 @default.
- W2008528131 hasConceptScore W2008528131C192562407 @default.
- W2008528131 hasConceptScore W2008528131C200274948 @default.
- W2008528131 hasConceptScore W2008528131C204223013 @default.
- W2008528131 hasConceptScore W2008528131C2779227376 @default.
- W2008528131 hasConceptScore W2008528131C33220542 @default.
- W2008528131 hasConceptScore W2008528131C43617362 @default.
- W2008528131 hasConceptScore W2008528131C49040817 @default.
- W2008528131 hasConceptScore W2008528131C53524968 @default.
- W2008528131 hasConceptScore W2008528131C77066764 @default.
- W2008528131 hasIssue "12B" @default.
- W2008528131 hasLocation W20085281311 @default.
- W2008528131 hasOpenAccess W2008528131 @default.
- W2008528131 hasPrimaryLocation W20085281311 @default.
- W2008528131 hasRelatedWork W1984567615 @default.
- W2008528131 hasRelatedWork W2005900394 @default.
- W2008528131 hasRelatedWork W2008528131 @default.
- W2008528131 hasRelatedWork W2011228020 @default.
- W2008528131 hasRelatedWork W2023356181 @default.
- W2008528131 hasRelatedWork W2055632094 @default.
- W2008528131 hasRelatedWork W2067267817 @default.
- W2008528131 hasRelatedWork W2070089925 @default.
- W2008528131 hasRelatedWork W2072249253 @default.
- W2008528131 hasRelatedWork W2546334402 @default.
- W2008528131 hasVolume "33" @default.
- W2008528131 isParatext "false" @default.
- W2008528131 isRetracted "false" @default.
- W2008528131 magId "2008528131" @default.
- W2008528131 workType "article" @default.