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• W2008561304 abstract "In amorphous∕crystalline silicon heterojunction solar cells, we have performed real-time thickness control of hydrogenated amorphous silicon (a‐Si:H) layers with a precision better than ±1Å by applying spectroscopic ellipsometry (SE). A heterojunction solar cell fabricated by this process shows a relatively high conversion efficiency of 14.5%. At the amorphous∕crystalline interface, however, infrared attenuated total reflection spectroscopy (ATR) revealed the formation of a porous a‐Si:H layer with a large SiH2-hydrogen content of 27 at. %. Based on SE and ATR results, we discuss the growth processes and structures of a‐Si:H in heterojunction solar cells." @default.
• W2008561304 created "2016-06-24" @default.
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• W2008561304 date "2005-01-17" @default.
• W2008561304 modified "2023-09-30" @default.
• W2008561304 title "Real-time monitoring and process control in amorphous∕crystalline silicon heterojunction solar cells by spectroscopic ellipsometry and infrared spectroscopy" @default.
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• W2008561304 doi "https://doi.org/10.1063/1.1850612" @default.
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