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- W2008578229 abstract "This study establishes a batch fabricated process to implement and monolithically integrate CNTs (carbon nanotubes) based physical sensors. In this process, vertically aligned CNTs (not horizontally aligned or mixed CNTs) are grown and patterned on Si-wafer as sensing elements, and also integrated with MEMS (microelectromechanical systems) structures. The mechanical deformation and temperature change is thus detected by the resistance change of such CNTs sensing elements. In applications, the CNTs-based pressure sensor and temperature sensor are monolithically fabricated on a chip. Preliminary measurements indicate the presented CNTs-based piezoresistive pressure sensor has a gauge factor of ~20, and the sensitivity of CNTs-based temperature sensor is 0.19/°C." @default.
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- W2008578229 date "2010-01-01" @default.
- W2008578229 modified "2023-09-26" @default.
- W2008578229 title "Monolithic integration of carbon nanotubes based physical sensors" @default.
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- W2008578229 doi "https://doi.org/10.1109/memsys.2010.5442566" @default.
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