Matches in SemOpenAlex for { <https://semopenalex.org/work/W2008596280> ?p ?o ?g. }
Showing items 1 to 80 of
80
with 100 items per page.
- W2008596280 abstract "A negative deep UV resist Micro Resist for Shorter wavelengths (MRS) is successfully applied to 1:1 projection printing. The MRS is characterized by strong absorption of deep UV light and absence of swelling in the developer. It resolves steep profile images of 1-µm linewidth in 1-µm-thick films. The resist has extremely high sensitivity to deep UV light. Scanning exposure time necessary for a 4-in wafer is about 25 s. The MRS exhibits dry etching resistance superior to that of an AZ-type positive resist. Furthermore, MRS is not adversely affected by reflected light from stepped aluminum surfaces. Application of MRS should open the way to realization of a practical deep UV 1:1 projection lithography featuring high resolution and throughput." @default.
- W2008596280 created "2016-06-24" @default.
- W2008596280 creator A5033126685 @default.
- W2008596280 creator A5033571598 @default.
- W2008596280 date "1981-11-01" @default.
- W2008596280 modified "2023-09-24" @default.
- W2008596280 title "Deep UV 1:1 projection lithography utilizing negative resist MRS" @default.
- W2008596280 cites W1972020376 @default.
- W2008596280 cites W2010539247 @default.
- W2008596280 cites W2023800104 @default.
- W2008596280 cites W2024988965 @default.
- W2008596280 cites W2069602738 @default.
- W2008596280 cites W2333706031 @default.
- W2008596280 doi "https://doi.org/10.1109/t-ed.1981.20601" @default.
- W2008596280 hasPublicationYear "1981" @default.
- W2008596280 type Work @default.
- W2008596280 sameAs 2008596280 @default.
- W2008596280 citedByCount "11" @default.
- W2008596280 crossrefType "journal-article" @default.
- W2008596280 hasAuthorship W2008596280A5033126685 @default.
- W2008596280 hasAuthorship W2008596280A5033571598 @default.
- W2008596280 hasConcept C100460472 @default.
- W2008596280 hasConcept C105487726 @default.
- W2008596280 hasConcept C120665830 @default.
- W2008596280 hasConcept C121332964 @default.
- W2008596280 hasConcept C134406635 @default.
- W2008596280 hasConcept C142181693 @default.
- W2008596280 hasConcept C160671074 @default.
- W2008596280 hasConcept C162996421 @default.
- W2008596280 hasConcept C171250308 @default.
- W2008596280 hasConcept C192562407 @default.
- W2008596280 hasConcept C204223013 @default.
- W2008596280 hasConcept C2779227376 @default.
- W2008596280 hasConcept C41794268 @default.
- W2008596280 hasConcept C49040817 @default.
- W2008596280 hasConcept C520434653 @default.
- W2008596280 hasConcept C53524968 @default.
- W2008596280 hasConceptScore W2008596280C100460472 @default.
- W2008596280 hasConceptScore W2008596280C105487726 @default.
- W2008596280 hasConceptScore W2008596280C120665830 @default.
- W2008596280 hasConceptScore W2008596280C121332964 @default.
- W2008596280 hasConceptScore W2008596280C134406635 @default.
- W2008596280 hasConceptScore W2008596280C142181693 @default.
- W2008596280 hasConceptScore W2008596280C160671074 @default.
- W2008596280 hasConceptScore W2008596280C162996421 @default.
- W2008596280 hasConceptScore W2008596280C171250308 @default.
- W2008596280 hasConceptScore W2008596280C192562407 @default.
- W2008596280 hasConceptScore W2008596280C204223013 @default.
- W2008596280 hasConceptScore W2008596280C2779227376 @default.
- W2008596280 hasConceptScore W2008596280C41794268 @default.
- W2008596280 hasConceptScore W2008596280C49040817 @default.
- W2008596280 hasConceptScore W2008596280C520434653 @default.
- W2008596280 hasConceptScore W2008596280C53524968 @default.
- W2008596280 hasLocation W20085962801 @default.
- W2008596280 hasOpenAccess W2008596280 @default.
- W2008596280 hasPrimaryLocation W20085962801 @default.
- W2008596280 hasRelatedWork W1983564545 @default.
- W2008596280 hasRelatedWork W1999283028 @default.
- W2008596280 hasRelatedWork W2005825135 @default.
- W2008596280 hasRelatedWork W2008000336 @default.
- W2008596280 hasRelatedWork W2010539247 @default.
- W2008596280 hasRelatedWork W2026126345 @default.
- W2008596280 hasRelatedWork W2032531762 @default.
- W2008596280 hasRelatedWork W2033400525 @default.
- W2008596280 hasRelatedWork W2038640180 @default.
- W2008596280 hasRelatedWork W2049322875 @default.
- W2008596280 hasRelatedWork W2053923373 @default.
- W2008596280 hasRelatedWork W2060195579 @default.
- W2008596280 hasRelatedWork W2067855773 @default.
- W2008596280 hasRelatedWork W2070836883 @default.
- W2008596280 hasRelatedWork W2072645774 @default.
- W2008596280 hasRelatedWork W2075977180 @default.
- W2008596280 hasRelatedWork W2092281385 @default.
- W2008596280 hasRelatedWork W2140926846 @default.
- W2008596280 hasRelatedWork W2304255342 @default.
- W2008596280 hasRelatedWork W2813440323 @default.
- W2008596280 isParatext "false" @default.
- W2008596280 isRetracted "false" @default.
- W2008596280 magId "2008596280" @default.
- W2008596280 workType "article" @default.