Matches in SemOpenAlex for { <https://semopenalex.org/work/W2008602066> ?p ?o ?g. }
- W2008602066 endingPage "2652" @default.
- W2008602066 startingPage "2644" @default.
- W2008602066 abstract "The dependence of the deposition rate on the radius of the synchrotron radiation (SR) beam, on the incident angle to the substrate and on substrate configuration to SR beam is investigated in SR-excited chemical vapor deposition of silicon nitride films. Through the experimental results and related analyses, the contribution of gas-phase excitation near the substrate surface to deposition is clarified. In addition, by evaluating the numbers of photoelectrons and secondary electrons emitted from the SR-irradiated substrate, the contribution of low-energy secondary electrons to the excitation of gas-phase and adsorbed molecules is discussed. Finally, a reaction model including the excitation of the core electrons of substrate constituent atoms and the contribution of the interaction between generated low-energy secondary electrons and gas-phase molecules and adsorbates near/at the surface is proposed to explain the material dependence of the film composition observed in the SiH4+NH3 gas system." @default.
- W2008602066 created "2016-06-24" @default.
- W2008602066 creator A5089877989 @default.
- W2008602066 date "1997-09-01" @default.
- W2008602066 modified "2023-09-27" @default.
- W2008602066 title "Role of low-energy secondary electrons in synchrotron radiation-excited chemical vapor deposition of silicon nitride films" @default.
- W2008602066 cites W1967710304 @default.
- W2008602066 cites W1969264101 @default.
- W2008602066 cites W1972237908 @default.
- W2008602066 cites W1973848011 @default.
- W2008602066 cites W1977432791 @default.
- W2008602066 cites W1985240132 @default.
- W2008602066 cites W1987985246 @default.
- W2008602066 cites W1988558365 @default.
- W2008602066 cites W2000271105 @default.
- W2008602066 cites W2001638084 @default.
- W2008602066 cites W2005001819 @default.
- W2008602066 cites W2005886438 @default.
- W2008602066 cites W2005997477 @default.
- W2008602066 cites W2006443074 @default.
- W2008602066 cites W2006531006 @default.
- W2008602066 cites W2010059957 @default.
- W2008602066 cites W2011916382 @default.
- W2008602066 cites W2018779140 @default.
- W2008602066 cites W2031799986 @default.
- W2008602066 cites W2038897246 @default.
- W2008602066 cites W2039392012 @default.
- W2008602066 cites W2042681725 @default.
- W2008602066 cites W2048841751 @default.
- W2008602066 cites W2052813182 @default.
- W2008602066 cites W2054147052 @default.
- W2008602066 cites W2060065222 @default.
- W2008602066 cites W2063886438 @default.
- W2008602066 cites W2066387861 @default.
- W2008602066 cites W2066636396 @default.
- W2008602066 cites W2068093798 @default.
- W2008602066 cites W2072769438 @default.
- W2008602066 cites W2084887266 @default.
- W2008602066 cites W2085315956 @default.
- W2008602066 cites W2087622925 @default.
- W2008602066 cites W2089310599 @default.
- W2008602066 cites W2093791089 @default.
- W2008602066 cites W2163554252 @default.
- W2008602066 cites W2914804869 @default.
- W2008602066 doi "https://doi.org/10.1116/1.580936" @default.
- W2008602066 hasPublicationYear "1997" @default.
- W2008602066 type Work @default.
- W2008602066 sameAs 2008602066 @default.
- W2008602066 citedByCount "4" @default.
- W2008602066 countsByYear W20086020662023 @default.
- W2008602066 crossrefType "journal-article" @default.
- W2008602066 hasAuthorship W2008602066A5089877989 @default.
- W2008602066 hasConcept C111368507 @default.
- W2008602066 hasConcept C120665830 @default.
- W2008602066 hasConcept C121332964 @default.
- W2008602066 hasConcept C127313418 @default.
- W2008602066 hasConcept C13892213 @default.
- W2008602066 hasConcept C147120987 @default.
- W2008602066 hasConcept C151730666 @default.
- W2008602066 hasConcept C16332341 @default.
- W2008602066 hasConcept C181500209 @default.
- W2008602066 hasConcept C184779094 @default.
- W2008602066 hasConcept C185592680 @default.
- W2008602066 hasConcept C192562407 @default.
- W2008602066 hasConcept C2777289219 @default.
- W2008602066 hasConcept C2777431650 @default.
- W2008602066 hasConcept C2816523 @default.
- W2008602066 hasConcept C34667332 @default.
- W2008602066 hasConcept C49040817 @default.
- W2008602066 hasConcept C544956773 @default.
- W2008602066 hasConcept C57410435 @default.
- W2008602066 hasConcept C62520636 @default.
- W2008602066 hasConcept C64297162 @default.
- W2008602066 hasConcept C71570822 @default.
- W2008602066 hasConcept C7770020 @default.
- W2008602066 hasConcept C86803240 @default.
- W2008602066 hasConceptScore W2008602066C111368507 @default.
- W2008602066 hasConceptScore W2008602066C120665830 @default.
- W2008602066 hasConceptScore W2008602066C121332964 @default.
- W2008602066 hasConceptScore W2008602066C127313418 @default.
- W2008602066 hasConceptScore W2008602066C13892213 @default.
- W2008602066 hasConceptScore W2008602066C147120987 @default.
- W2008602066 hasConceptScore W2008602066C151730666 @default.
- W2008602066 hasConceptScore W2008602066C16332341 @default.
- W2008602066 hasConceptScore W2008602066C181500209 @default.
- W2008602066 hasConceptScore W2008602066C184779094 @default.
- W2008602066 hasConceptScore W2008602066C185592680 @default.
- W2008602066 hasConceptScore W2008602066C192562407 @default.
- W2008602066 hasConceptScore W2008602066C2777289219 @default.
- W2008602066 hasConceptScore W2008602066C2777431650 @default.
- W2008602066 hasConceptScore W2008602066C2816523 @default.
- W2008602066 hasConceptScore W2008602066C34667332 @default.
- W2008602066 hasConceptScore W2008602066C49040817 @default.
- W2008602066 hasConceptScore W2008602066C544956773 @default.
- W2008602066 hasConceptScore W2008602066C57410435 @default.
- W2008602066 hasConceptScore W2008602066C62520636 @default.
- W2008602066 hasConceptScore W2008602066C64297162 @default.
- W2008602066 hasConceptScore W2008602066C71570822 @default.