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• W2008647937 abstract "Abstract To improve the characteristics of a diamond-like carbon (DLC) film, Ti-containing amorphous hydrogenated carbon thin films were deposited on sus304 stainless steel substrates by high-power plasma-sputtering with titanium metal as the solid plasma source in a mixed ArC 2 H 2 atmosphere. The films were fabricated to obtain a multilayered structure of Ti/TiC/DLC gradient for improving adhesion and reducing residual stress. The effects of substrate bias and target-substrate distance on the films' properties were studied by glow discharge spectroscope, X-ray diffractometer, Raman spectroscope, nanoindenter, and a pin-on-disk tribometer. The results indicate that the films possess superior adhesive strength and toughness." @default.
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• W2008647937 date "2012-06-01" @default.
• W2008647937 modified "2023-10-17" @default.
• W2008647937 title "Ti-containing hydrogenated carbon films fabricated by high-power plasma magnetron sputtering" @default.
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• W2008647937 doi "https://doi.org/10.1016/s1003-6326(11)61329-0" @default.
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