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• W2008654583 endingPage "B61" @default.
• W2008654583 startingPage "B55" @default.
• W2008654583 abstract "A miniature, ultra-low power, sensitive, microbridge-based thermal conductivity gas sensor has been developed. The batch fabrication of the sensors was realized by CMOS compatible processes and surface micromachining techniques. Doped polysilicon was used as the structural material of the bridge with critical dimension of 500 nm. A model of the microbridge was simulated in COMSOL that couples electrical and thermal physics together and includes minimal simplifications. Modeling results shows that the majority of heat is transferred via conduction through the gas gap under the bridge. Heat loss from constant voltage application was observed to be a function of the thermal conductivity of the gas ambient, resulting in different magnitude of resistance change. Maximum temperature occurs at the center of the bridge and could be as high as 800 K. Modeling results coincide with experimental data in predicting resistance changes. The sensor was tested with nitrogen, carbon dioxide, and helium. The response of the sensor to the mixtures of helium fractions in nitrogen was tested. We demonstrated that the sensitivity for helium in nitrogen was 0.34 mΩ/ppm when operated at 3.6 V supplies (at power level of 4.3 mW). With a Wheatstone bridge with ac excitation and a lock-in amplifier the sensor limit of detection was ∼700 ppm helium in nitrogen. The stability of the sensor was excellent achieving over 30 billion measurements before failure." @default.
• W2008654583 created "2016-06-24" @default.
• W2008654583 creator A5003417709 @default.
• W2008654583 creator A5038622857 @default.
• W2008654583 creator A5039289866 @default.
• W2008654583 creator A5055057263 @default.
• W2008654583 creator A5058340615 @default.
• W2008654583 creator A5060040904 @default.
• W2008654583 creator A5062888194 @default.
• W2008654583 date "2014-01-01" @default.
• W2008654583 modified "2023-10-18" @default.
• W2008654583 title "Simulation and Fabrication of an Ultra-Low Power Miniature Microbridge Thermal Conductivity Gas Sensor" @default.
• W2008654583 cites W1973732831 @default.
• W2008654583 cites W1993722278 @default.
• W2008654583 cites W1998953374 @default.
• W2008654583 cites W2028161486 @default.
• W2008654583 cites W2051049287 @default.
• W2008654583 cites W2052352713 @default.
• W2008654583 cites W2053515221 @default.
• W2008654583 cites W2060682899 @default.
• W2008654583 cites W2078159969 @default.
• W2008654583 cites W2103125677 @default.
• W2008654583 cites W2142362050 @default.
• W2008654583 doi "https://doi.org/10.1149/2.032404jes" @default.
• W2008654583 hasPublicationYear "2014" @default.
• W2008654583 type Work @default.
• W2008654583 sameAs 2008654583 @default.
• W2008654583 citedByCount "24" @default.
• W2008654583 countsByYear W20086545832015 @default.
• W2008654583 countsByYear W20086545832016 @default.
• W2008654583 countsByYear W20086545832017 @default.
• W2008654583 countsByYear W20086545832018 @default.
• W2008654583 countsByYear W20086545832019 @default.
• W2008654583 countsByYear W20086545832020 @default.
• W2008654583 countsByYear W20086545832022 @default.
• W2008654583 countsByYear W20086545832023 @default.
• W2008654583 crossrefType "journal-article" @default.
• W2008654583 hasAuthorship W2008654583A5003417709 @default.
• W2008654583 hasAuthorship W2008654583A5038622857 @default.
• W2008654583 hasAuthorship W2008654583A5039289866 @default.
• W2008654583 hasAuthorship W2008654583A5055057263 @default.
• W2008654583 hasAuthorship W2008654583A5058340615 @default.
• W2008654583 hasAuthorship W2008654583A5060040904 @default.
• W2008654583 hasAuthorship W2008654583A5062888194 @default.
• W2008654583 hasBestOaLocation W20086545831 @default.
• W2008654583 hasConcept C104713690 @default.
• W2008654583 hasConcept C108939769 @default.
• W2008654583 hasConcept C113196181 @default.
• W2008654583 hasConcept C119599485 @default.
• W2008654583 hasConcept C127413603 @default.
• W2008654583 hasConcept C136525101 @default.
• W2008654583 hasConcept C137488568 @default.
• W2008654583 hasConcept C142724271 @default.
• W2008654583 hasConcept C145667562 @default.
• W2008654583 hasConcept C159985019 @default.
• W2008654583 hasConcept C165801399 @default.
• W2008654583 hasConcept C178790620 @default.
• W2008654583 hasConcept C1855228 @default.
• W2008654583 hasConcept C185592680 @default.
• W2008654583 hasConcept C192562407 @default.
• W2008654583 hasConcept C194257627 @default.
• W2008654583 hasConcept C204787440 @default.
• W2008654583 hasConcept C43617362 @default.
• W2008654583 hasConcept C46362747 @default.
• W2008654583 hasConcept C49040817 @default.
• W2008654583 hasConcept C546029482 @default.
• W2008654583 hasConcept C71924100 @default.
• W2008654583 hasConcept C97346530 @default.
• W2008654583 hasConceptScore W2008654583C104713690 @default.
• W2008654583 hasConceptScore W2008654583C108939769 @default.
• W2008654583 hasConceptScore W2008654583C113196181 @default.
• W2008654583 hasConceptScore W2008654583C119599485 @default.
• W2008654583 hasConceptScore W2008654583C127413603 @default.
• W2008654583 hasConceptScore W2008654583C136525101 @default.
• W2008654583 hasConceptScore W2008654583C137488568 @default.
• W2008654583 hasConceptScore W2008654583C142724271 @default.
• W2008654583 hasConceptScore W2008654583C145667562 @default.
• W2008654583 hasConceptScore W2008654583C159985019 @default.
• W2008654583 hasConceptScore W2008654583C165801399 @default.
• W2008654583 hasConceptScore W2008654583C178790620 @default.
• W2008654583 hasConceptScore W2008654583C1855228 @default.
• W2008654583 hasConceptScore W2008654583C185592680 @default.
• W2008654583 hasConceptScore W2008654583C192562407 @default.
• W2008654583 hasConceptScore W2008654583C194257627 @default.
• W2008654583 hasConceptScore W2008654583C204787440 @default.
• W2008654583 hasConceptScore W2008654583C43617362 @default.
• W2008654583 hasConceptScore W2008654583C46362747 @default.
• W2008654583 hasConceptScore W2008654583C49040817 @default.
• W2008654583 hasConceptScore W2008654583C546029482 @default.
• W2008654583 hasConceptScore W2008654583C71924100 @default.
• W2008654583 hasConceptScore W2008654583C97346530 @default.
• W2008654583 hasIssue "4" @default.
• W2008654583 hasLocation W20086545831 @default.
• W2008654583 hasOpenAccess W2008654583 @default.
• W2008654583 hasPrimaryLocation W20086545831 @default.
• W2008654583 hasRelatedWork W1657368479 @default.
• W2008654583 hasRelatedWork W2006069293 @default.
• W2008654583 hasRelatedWork W2031738477 @default.

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