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- W2008956052 abstract "We have studied the carbon incorporation properties in MOCVD Al0.7Ga0.3As epilayers on differently oriented surfaces by using either arsine or tertiarybutylarsine (TBAs). The present study has shown that the carbon incorporation in the layers using TBAs is significantly lower than that using AsH3 under higher VIII ratio and/or lower temperature conditions. The results also indicate that the carbon does not originate in TBAs but in TMG and TMA. According to these results, the carbon incorporation mechanism is discussed through analysis of reaction products by growth. A growth model in which As molecules rather than H atoms act on the carbon elimination from the growth surface is presented." @default.
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- W2008956052 date "1995-10-01" @default.
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- W2008956052 title "Comparative study on carbon incorporation in MOCVD AlGaAs layers between arsine and tertiarybutylarsine" @default.
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- W2008956052 doi "https://doi.org/10.1016/0022-0248(95)00151-4" @default.
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