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• W2009094321 abstract "Atomic layer deposition (ALD) was used to deposit passivating interfacial nitride layers between Ge and high-κ oxides. High-κ oxides on Ge surfaces passivated by ultrathin (1–2nm) ALD Hf3N4 or AlN layers exhibited well-behaved C-V characteristics with an equivalent oxide thickness as low as 0.8nm, no significant flatband voltage shifts, and midgap density of interface states values of 2×1012cm−1eV−1. Functional n-channel and p-channel Ge field effect transistors with nitride interlayer/high-κ oxide/metal gate stacks are demonstrated." @default.
• W2009094321 created "2016-06-24" @default.
• W2009094321 creator A5009768695 @default.
• W2009094321 creator A5036036552 @default.
• W2009094321 creator A5056314310 @default.
• W2009094321 creator A5073128572 @default.
• W2009094321 date "2007-05-21" @default.
• W2009094321 modified "2023-10-18" @default.
• W2009094321 title "Atomic layer deposition of insulating nitride interfacial layers for germanium metal oxide semiconductor field effect transistors with high-κ oxide/tungsten nitride gate stacks" @default.
• W2009094321 cites W1649289083 @default.
• W2009094321 cites W1967800610 @default.
• W2009094321 cites W1985598923 @default.
• W2009094321 cites W2019936836 @default.
• W2009094321 cites W2045981902 @default.
• W2009094321 cites W2053674573 @default.
• W2009094321 cites W2053784345 @default.
• W2009094321 cites W2079471989 @default.
• W2009094321 cites W2103160775 @default.
• W2009094321 cites W2120201770 @default.
• W2009094321 cites W2125074739 @default.
• W2009094321 cites W2128922073 @default.
• W2009094321 cites W2148961769 @default.
• W2009094321 cites W2169933013 @default.
• W2009094321 doi "https://doi.org/10.1063/1.2741609" @default.
• W2009094321 hasPublicationYear "2007" @default.
• W2009094321 type Work @default.
• W2009094321 sameAs 2009094321 @default.
• W2009094321 citedByCount "56" @default.
• W2009094321 countsByYear W20090943212012 @default.
• W2009094321 countsByYear W20090943212013 @default.
• W2009094321 countsByYear W20090943212014 @default.
• W2009094321 countsByYear W20090943212015 @default.
• W2009094321 countsByYear W20090943212016 @default.
• W2009094321 countsByYear W20090943212017 @default.
• W2009094321 countsByYear W20090943212018 @default.
• W2009094321 countsByYear W20090943212019 @default.
• W2009094321 countsByYear W20090943212020 @default.
• W2009094321 countsByYear W20090943212021 @default.
• W2009094321 countsByYear W20090943212022 @default.
• W2009094321 countsByYear W20090943212023 @default.
• W2009094321 crossrefType "journal-article" @default.
• W2009094321 hasAuthorship W2009094321A5009768695 @default.
• W2009094321 hasAuthorship W2009094321A5036036552 @default.
• W2009094321 hasAuthorship W2009094321A5056314310 @default.
• W2009094321 hasAuthorship W2009094321A5073128572 @default.
• W2009094321 hasConcept C119599485 @default.
• W2009094321 hasConcept C127413603 @default.
• W2009094321 hasConcept C145598152 @default.
• W2009094321 hasConcept C151730666 @default.
• W2009094321 hasConcept C165801399 @default.
• W2009094321 hasConcept C171250308 @default.
• W2009094321 hasConcept C172385210 @default.
• W2009094321 hasConcept C191897082 @default.
• W2009094321 hasConcept C192562407 @default.
• W2009094321 hasConcept C194760766 @default.
• W2009094321 hasConcept C2361726 @default.
• W2009094321 hasConcept C2778112282 @default.
• W2009094321 hasConcept C2779227376 @default.
• W2009094321 hasConcept C2779851234 @default.
• W2009094321 hasConcept C2816523 @default.
• W2009094321 hasConcept C49040817 @default.
• W2009094321 hasConcept C52780932 @default.
• W2009094321 hasConcept C542268612 @default.
• W2009094321 hasConcept C544153396 @default.
• W2009094321 hasConcept C544956773 @default.
• W2009094321 hasConcept C550623735 @default.
• W2009094321 hasConcept C57410435 @default.
• W2009094321 hasConcept C64297162 @default.
• W2009094321 hasConcept C69544855 @default.
• W2009094321 hasConcept C86803240 @default.
• W2009094321 hasConceptScore W2009094321C119599485 @default.
• W2009094321 hasConceptScore W2009094321C127413603 @default.
• W2009094321 hasConceptScore W2009094321C145598152 @default.
• W2009094321 hasConceptScore W2009094321C151730666 @default.
• W2009094321 hasConceptScore W2009094321C165801399 @default.
• W2009094321 hasConceptScore W2009094321C171250308 @default.
• W2009094321 hasConceptScore W2009094321C172385210 @default.
• W2009094321 hasConceptScore W2009094321C191897082 @default.
• W2009094321 hasConceptScore W2009094321C192562407 @default.
• W2009094321 hasConceptScore W2009094321C194760766 @default.
• W2009094321 hasConceptScore W2009094321C2361726 @default.
• W2009094321 hasConceptScore W2009094321C2778112282 @default.
• W2009094321 hasConceptScore W2009094321C2779227376 @default.
• W2009094321 hasConceptScore W2009094321C2779851234 @default.
• W2009094321 hasConceptScore W2009094321C2816523 @default.
• W2009094321 hasConceptScore W2009094321C49040817 @default.
• W2009094321 hasConceptScore W2009094321C52780932 @default.
• W2009094321 hasConceptScore W2009094321C542268612 @default.
• W2009094321 hasConceptScore W2009094321C544153396 @default.
• W2009094321 hasConceptScore W2009094321C544956773 @default.
• W2009094321 hasConceptScore W2009094321C550623735 @default.
• W2009094321 hasConceptScore W2009094321C57410435 @default.
• W2009094321 hasConceptScore W2009094321C64297162 @default.
• W2009094321 hasConceptScore W2009094321C69544855 @default.
• W2009094321 hasConceptScore W2009094321C86803240 @default.
• W2009094321 hasIssue "21" @default.
• W2009094321 hasLocation W20090943211 @default.
• W2009094321 hasOpenAccess W2009094321 @default.
• W2009094321 hasPrimaryLocation W20090943211 @default.
• W2009094321 hasRelatedWork W1953214728 @default.

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