Matches in SemOpenAlex for { <https://semopenalex.org/work/W2009096131> ?p ?o ?g. }
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- W2009096131 endingPage "386" @default.
- W2009096131 startingPage "381" @default.
- W2009096131 abstract "Spectroscopic ellipsometry over the range 1.5–4.5 eV was applied as a real time probe of the processes occurring in the initial nucleation of thin film diamond by heated-filament assisted chemical vapor deposition. Using both untreated and diamond-polished c-Si substrates, as well as both carburized and uncarburized tungsten filaments, it was possible to separate and characterize competing phenomena, including the increase in surface temperature induced by filament ignition, the formation of carbide layers, contamination of the substrate by tungsten from the filament, annealing of diamond polishing damage, and, finally, diamond nucleation. An accurate measurement of the true temperature of the substrate surface averaged over the top 500 Å can be obtained from the energy position of critical points in the c-Si band structure. For diamond deposition, we operated with an initial excess flow of CH4 to stimulate nucleation. We applied real time feedback and manual control to reduce the CH4 flow in the first monolayers of deposition. The thickness of diamond and an estimate of its nucleation density can be obtained from real time spectra, and the latter was in good agreement with that obtained from scanning electron microscopy." @default.
- W2009096131 created "2016-06-24" @default.
- W2009096131 creator A5013627493 @default.
- W2009096131 creator A5031359871 @default.
- W2009096131 creator A5037887608 @default.
- W2009096131 creator A5072715318 @default.
- W2009096131 creator A5078004951 @default.
- W2009096131 creator A5085740219 @default.
- W2009096131 date "1991-12-01" @default.
- W2009096131 modified "2023-09-26" @default.
- W2009096131 title "Real time monitoring of filament-assisted chemically vapor deposited diamond by spectroscopic ellipsometry" @default.
- W2009096131 cites W1967866204 @default.
- W2009096131 cites W1971187946 @default.
- W2009096131 cites W1976972281 @default.
- W2009096131 cites W1982175253 @default.
- W2009096131 cites W1987820481 @default.
- W2009096131 cites W2016099037 @default.
- W2009096131 cites W2017071473 @default.
- W2009096131 cites W2059284468 @default.
- W2009096131 doi "https://doi.org/10.1016/0257-8972(91)90087-d" @default.
- W2009096131 hasPublicationYear "1991" @default.
- W2009096131 type Work @default.
- W2009096131 sameAs 2009096131 @default.
- W2009096131 citedByCount "9" @default.
- W2009096131 crossrefType "journal-article" @default.
- W2009096131 hasAuthorship W2009096131A5013627493 @default.
- W2009096131 hasAuthorship W2009096131A5031359871 @default.
- W2009096131 hasAuthorship W2009096131A5037887608 @default.
- W2009096131 hasAuthorship W2009096131A5072715318 @default.
- W2009096131 hasAuthorship W2009096131A5078004951 @default.
- W2009096131 hasAuthorship W2009096131A5085740219 @default.
- W2009096131 hasConcept C113196181 @default.
- W2009096131 hasConcept C127413603 @default.
- W2009096131 hasConcept C159985019 @default.
- W2009096131 hasConcept C162882748 @default.
- W2009096131 hasConcept C171250308 @default.
- W2009096131 hasConcept C178790620 @default.
- W2009096131 hasConcept C18293161 @default.
- W2009096131 hasConcept C185592680 @default.
- W2009096131 hasConcept C19067145 @default.
- W2009096131 hasConcept C192562407 @default.
- W2009096131 hasConcept C2776921476 @default.
- W2009096131 hasConcept C2777855556 @default.
- W2009096131 hasConcept C2778583532 @default.
- W2009096131 hasConcept C2781422231 @default.
- W2009096131 hasConcept C42360764 @default.
- W2009096131 hasConcept C43617362 @default.
- W2009096131 hasConcept C57410435 @default.
- W2009096131 hasConcept C61048295 @default.
- W2009096131 hasConceptScore W2009096131C113196181 @default.
- W2009096131 hasConceptScore W2009096131C127413603 @default.
- W2009096131 hasConceptScore W2009096131C159985019 @default.
- W2009096131 hasConceptScore W2009096131C162882748 @default.
- W2009096131 hasConceptScore W2009096131C171250308 @default.
- W2009096131 hasConceptScore W2009096131C178790620 @default.
- W2009096131 hasConceptScore W2009096131C18293161 @default.
- W2009096131 hasConceptScore W2009096131C185592680 @default.
- W2009096131 hasConceptScore W2009096131C19067145 @default.
- W2009096131 hasConceptScore W2009096131C192562407 @default.
- W2009096131 hasConceptScore W2009096131C2776921476 @default.
- W2009096131 hasConceptScore W2009096131C2777855556 @default.
- W2009096131 hasConceptScore W2009096131C2778583532 @default.
- W2009096131 hasConceptScore W2009096131C2781422231 @default.
- W2009096131 hasConceptScore W2009096131C42360764 @default.
- W2009096131 hasConceptScore W2009096131C43617362 @default.
- W2009096131 hasConceptScore W2009096131C57410435 @default.
- W2009096131 hasConceptScore W2009096131C61048295 @default.
- W2009096131 hasIssue "1-3" @default.
- W2009096131 hasLocation W20090961311 @default.
- W2009096131 hasOpenAccess W2009096131 @default.
- W2009096131 hasPrimaryLocation W20090961311 @default.
- W2009096131 hasRelatedWork W1643789723 @default.
- W2009096131 hasRelatedWork W1993237389 @default.
- W2009096131 hasRelatedWork W2009096131 @default.
- W2009096131 hasRelatedWork W2015561727 @default.
- W2009096131 hasRelatedWork W2034663772 @default.
- W2009096131 hasRelatedWork W2037497935 @default.
- W2009096131 hasRelatedWork W2064823740 @default.
- W2009096131 hasRelatedWork W2072287117 @default.
- W2009096131 hasRelatedWork W2887392657 @default.
- W2009096131 hasRelatedWork W3156317641 @default.
- W2009096131 hasVolume "49" @default.
- W2009096131 isParatext "false" @default.
- W2009096131 isRetracted "false" @default.
- W2009096131 magId "2009096131" @default.
- W2009096131 workType "article" @default.