Matches in SemOpenAlex for { <https://semopenalex.org/work/W2009164554> ?p ?o ?g. }
Showing items 1 to 66 of
66
with 100 items per page.
- W2009164554 abstract "Reliable submicron Al.Si interconnects based on tungsten encapsulation have been developed. Tungsten encapsulation technology was effective to improve the tolerance against the stress induced failure for both the conventionally sputtered and bias sputtered Al.Si interconnects at the line width down to 0.6µm. Moreover, a novel submicron multilevel interconnection structure with high aspect ratio contact holes has been proposed by using this interconnect technology." @default.
- W2009164554 created "2016-06-24" @default.
- W2009164554 creator A5003854379 @default.
- W2009164554 creator A5014493260 @default.
- W2009164554 creator A5023612009 @default.
- W2009164554 creator A5037963429 @default.
- W2009164554 creator A5045529143 @default.
- W2009164554 date "1987-01-01" @default.
- W2009164554 modified "2023-09-26" @default.
- W2009164554 title "Reliable tungsten encapsulated Al-Si interconnects for submicron multilevel interconnection" @default.
- W2009164554 doi "https://doi.org/10.1109/iedm.1987.191388" @default.
- W2009164554 hasPublicationYear "1987" @default.
- W2009164554 type Work @default.
- W2009164554 sameAs 2009164554 @default.
- W2009164554 citedByCount "3" @default.
- W2009164554 crossrefType "proceedings-article" @default.
- W2009164554 hasAuthorship W2009164554A5003854379 @default.
- W2009164554 hasAuthorship W2009164554A5014493260 @default.
- W2009164554 hasAuthorship W2009164554A5023612009 @default.
- W2009164554 hasAuthorship W2009164554A5037963429 @default.
- W2009164554 hasAuthorship W2009164554A5045529143 @default.
- W2009164554 hasConcept C123745756 @default.
- W2009164554 hasConcept C127413603 @default.
- W2009164554 hasConcept C191897082 @default.
- W2009164554 hasConcept C192562407 @default.
- W2009164554 hasConcept C24326235 @default.
- W2009164554 hasConcept C31258907 @default.
- W2009164554 hasConcept C41008148 @default.
- W2009164554 hasConcept C49040817 @default.
- W2009164554 hasConcept C542268612 @default.
- W2009164554 hasConceptScore W2009164554C123745756 @default.
- W2009164554 hasConceptScore W2009164554C127413603 @default.
- W2009164554 hasConceptScore W2009164554C191897082 @default.
- W2009164554 hasConceptScore W2009164554C192562407 @default.
- W2009164554 hasConceptScore W2009164554C24326235 @default.
- W2009164554 hasConceptScore W2009164554C31258907 @default.
- W2009164554 hasConceptScore W2009164554C41008148 @default.
- W2009164554 hasConceptScore W2009164554C49040817 @default.
- W2009164554 hasConceptScore W2009164554C542268612 @default.
- W2009164554 hasLocation W20091645541 @default.
- W2009164554 hasOpenAccess W2009164554 @default.
- W2009164554 hasPrimaryLocation W20091645541 @default.
- W2009164554 hasRelatedWork W1483317440 @default.
- W2009164554 hasRelatedWork W1517537916 @default.
- W2009164554 hasRelatedWork W1526945721 @default.
- W2009164554 hasRelatedWork W1579805675 @default.
- W2009164554 hasRelatedWork W1652805420 @default.
- W2009164554 hasRelatedWork W1873452479 @default.
- W2009164554 hasRelatedWork W1923726270 @default.
- W2009164554 hasRelatedWork W2002280523 @default.
- W2009164554 hasRelatedWork W2067212855 @default.
- W2009164554 hasRelatedWork W2098312834 @default.
- W2009164554 hasRelatedWork W2132542693 @default.
- W2009164554 hasRelatedWork W2136073664 @default.
- W2009164554 hasRelatedWork W2138057221 @default.
- W2009164554 hasRelatedWork W2255271044 @default.
- W2009164554 hasRelatedWork W2309330996 @default.
- W2009164554 hasRelatedWork W2479291025 @default.
- W2009164554 hasRelatedWork W2519785129 @default.
- W2009164554 hasRelatedWork W2546297513 @default.
- W2009164554 hasRelatedWork W96865455 @default.
- W2009164554 hasRelatedWork W2136438609 @default.
- W2009164554 isParatext "false" @default.
- W2009164554 isRetracted "false" @default.
- W2009164554 magId "2009164554" @default.
- W2009164554 workType "article" @default.