Matches in SemOpenAlex for { <https://semopenalex.org/work/W2009209642> ?p ?o ?g. }
Showing items 1 to 74 of
74
with 100 items per page.
- W2009209642 abstract "The diffraction efficiency of a grating depends critically on the groove profile, which in the case of holographic gratings is usually more or less sinusiodal. In order to obtain high efficiency it is thus of great importance to have accurate control of the groove depth during the fabrication process. Usually the groove depth is determined by adjusting the exposure, and then developing the substrate for a fixed time. In this work, a technique is studied where also the development time may be varied in order to obtain the desired groove depth. After interrupting the development, the groove depth of the photo-resist grating, without metallic coating, is determined by measuring the diffraction efficiency in tranmission and comparing it with theoretical efficiencies. Good accuracy is achieved since, in the groove depth range where the efficiency of the final reflection grating has a maximum, the transmission efficiency of the photoresist grating increases rapidly with increasing groove depth. A great advantage is achieved by using a HeNe laser for the efficiency measurements. Since the resist is insensitive to red light, the measurements do not affect the sinusoidal solubility distribution, and the development can be continued to increase the groove depth, if desired." @default.
- W2009209642 created "2016-06-24" @default.
- W2009209642 creator A5067838482 @default.
- W2009209642 date "1983-10-26" @default.
- W2009209642 modified "2023-10-03" @default.
- W2009209642 title "<title>Controlling The Groove Depth Of Holographic Gratings</title>" @default.
- W2009209642 doi "https://doi.org/10.1117/12.935448" @default.
- W2009209642 hasPublicationYear "1983" @default.
- W2009209642 type Work @default.
- W2009209642 sameAs 2009209642 @default.
- W2009209642 citedByCount "0" @default.
- W2009209642 crossrefType "proceedings-article" @default.
- W2009209642 hasAuthorship W2009209642A5067838482 @default.
- W2009209642 hasConcept C120665830 @default.
- W2009209642 hasConcept C121332964 @default.
- W2009209642 hasConcept C126753812 @default.
- W2009209642 hasConcept C134406635 @default.
- W2009209642 hasConcept C159985019 @default.
- W2009209642 hasConcept C18355248 @default.
- W2009209642 hasConcept C187384414 @default.
- W2009209642 hasConcept C187590223 @default.
- W2009209642 hasConcept C191897082 @default.
- W2009209642 hasConcept C192562407 @default.
- W2009209642 hasConcept C207114421 @default.
- W2009209642 hasConcept C2777813233 @default.
- W2009209642 hasConcept C2779227376 @default.
- W2009209642 hasConcept C2779472054 @default.
- W2009209642 hasConcept C49040817 @default.
- W2009209642 hasConcept C520434653 @default.
- W2009209642 hasConcept C53524968 @default.
- W2009209642 hasConceptScore W2009209642C120665830 @default.
- W2009209642 hasConceptScore W2009209642C121332964 @default.
- W2009209642 hasConceptScore W2009209642C126753812 @default.
- W2009209642 hasConceptScore W2009209642C134406635 @default.
- W2009209642 hasConceptScore W2009209642C159985019 @default.
- W2009209642 hasConceptScore W2009209642C18355248 @default.
- W2009209642 hasConceptScore W2009209642C187384414 @default.
- W2009209642 hasConceptScore W2009209642C187590223 @default.
- W2009209642 hasConceptScore W2009209642C191897082 @default.
- W2009209642 hasConceptScore W2009209642C192562407 @default.
- W2009209642 hasConceptScore W2009209642C207114421 @default.
- W2009209642 hasConceptScore W2009209642C2777813233 @default.
- W2009209642 hasConceptScore W2009209642C2779227376 @default.
- W2009209642 hasConceptScore W2009209642C2779472054 @default.
- W2009209642 hasConceptScore W2009209642C49040817 @default.
- W2009209642 hasConceptScore W2009209642C520434653 @default.
- W2009209642 hasConceptScore W2009209642C53524968 @default.
- W2009209642 hasLocation W20092096421 @default.
- W2009209642 hasOpenAccess W2009209642 @default.
- W2009209642 hasPrimaryLocation W20092096421 @default.
- W2009209642 hasRelatedWork W1965173576 @default.
- W2009209642 hasRelatedWork W1965881174 @default.
- W2009209642 hasRelatedWork W2028336819 @default.
- W2009209642 hasRelatedWork W2067055016 @default.
- W2009209642 hasRelatedWork W2073505951 @default.
- W2009209642 hasRelatedWork W2083231431 @default.
- W2009209642 hasRelatedWork W2113056073 @default.
- W2009209642 hasRelatedWork W2258885615 @default.
- W2009209642 hasRelatedWork W2328519160 @default.
- W2009209642 hasRelatedWork W2352669067 @default.
- W2009209642 hasRelatedWork W2370776019 @default.
- W2009209642 hasRelatedWork W2416752409 @default.
- W2009209642 hasRelatedWork W2417184512 @default.
- W2009209642 hasRelatedWork W2765001671 @default.
- W2009209642 hasRelatedWork W3011666163 @default.
- W2009209642 hasRelatedWork W3166026325 @default.
- W2009209642 hasRelatedWork W892678360 @default.
- W2009209642 hasRelatedWork W2272361245 @default.
- W2009209642 hasRelatedWork W2620017898 @default.
- W2009209642 hasRelatedWork W3144347867 @default.
- W2009209642 isParatext "false" @default.
- W2009209642 isRetracted "false" @default.
- W2009209642 magId "2009209642" @default.
- W2009209642 workType "article" @default.