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- W2009212486 abstract "We proposed resolving the poor controllability in the metalorganic chemical vapor deposition (MOCVD) of a complex oxide film consisting of a few metal elements, Sr 2 AlTaO 6 (SAT) film, by using a double-metal source, tantalum aluminum isopropoxide TaAl(O–iC 3 H 7 ) 8 . It had a melting point as low as 93°C and generated suitable vapor pressure for MOCVD at a temperature of 100°C. The supply metal ratio, Al/Ta, was ∼1, because it remained a double-metal structure in the vapor phase. We grew stoichiometric SAT films using it as a metal source." @default.
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- W2009212486 date "2001-02-01" @default.
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- W2009212486 title "Tantalum Aluminum Alkoxide as a Double-Metal Precursor for Metalorganic Chemical Vapor Deposition of Sr<sub>2</sub>AlTaO<sub>6</sub>" @default.
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- W2009212486 doi "https://doi.org/10.1143/jjap.40.l167" @default.
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